Please note: RBD Instruments is closed beginning December 19, 2025, reopening on January 5, 2026, to give our team members time to enjoy the holiday season. Due to this closure, we will not be able to receive any shipments between these dates. If you ship a package to RBD, please make sure that it will not arrive until January 5th or later. Otherwise, there is a chance that UPS or FedEx will return your package as non-deliverable.

The microCMA

Surface Sensitive
Auger Electron Spectroscopy
On a 2.75 inch Flange

More information...

Now Available: PHI 5600 XPS System

Available in Europe: PHI 5500 XPS System

Products

Explore the cutting-edge solutions offered by RBD Instruments. From state-of-the-art Auger electron spectroscopy (AES) systems to innovative water vapor desorption technologies, ion sputter cleaning packages, and precise electron/ion current measuring solutions, our products promise to revolutionize your approach to surface analysis and materials science.


Compact Auger Analyzers

microCMA

microCMA

Surface-sensitive analysis with AES Auger electron spectroscopy for material characterization. Fits on your existing vacuum chamber and includes a USB interface with Windows acquisition and data massage software.

USB Picoammeters

microCMA

9103

Discover the versatile 9103 Picoammeter: floats up to +/- 5000 V DC. Rugged, portable, and affordable.
Comes with data logging, graphing software, and ASCII programmability for seamless integration.

Ion Source Packages

microCMA

All
IG2 2kv
3kv

RBD provides both 2 kV and 3 kV sputter ion source packages for optimal sample cleaning and depth profiling.

Water Vapor Desorption Systems

microCMA

All
VB Infrared Bakeout
UVB-100
miniZ Compact System

Enhance vacuum chamber performance with UVC-based and IR-based water vapor desorption / oxidative hydrocarbon removal systems.
Achieve faster pump down times and superior ultimate vacuum levels.

Ultra-high Vacuum (UHV)

High Vacuum Furnace

High Vacuum Furnace

Heat materials in a high vacuum environment and avoid surface oxidation and undesirable chemical reactions.

 

PHI / PerkinElmer Service and Parts

For 33+ years, RBD has excelled in servicing, upgrading, and supplying legacy PHI/Physical Electronics systems. Our renowned support and industry-standard AugerScan and AugerMap PC upgrades simplify operation.

Additionally, as a top supplier of refurbished PHI components, we extend the lifespan of older AES and XPS surface analysis systems.


Refurbished Components

System Upgrade and Software

Replacement Parts and Components