Please note: RBD Instruments is closed beginning December 19, 2025, reopening on January 5, 2026, to give our team members time to enjoy the holiday season. Due to this closure, we will not be able to receive any shipments between these dates. If you ship a package to RBD, please make sure that it will not arrive until January 5th or later. Otherwise, there is a chance that UPS or FedEx will return your package as non-deliverable.

3kV Ion Source Package

A complete, low beam energy, large area ion sputter package

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3kV Ion Source Package

3kV Large Area Ion Source and Controller

RBD's 3kV Large-Area Ion Sputter Package comprises an electron discharge source, power supply, and cable. Designed to operate as low as 100 eV, the 3 kV ion source provides a large 10 mm spot size, uses argon gas, and does not require differential pumping.

The package includes ion source, electronic control unit, sample current meter, cabling, operating manual and a spare filament assembly.


Data Sheet
Manual
Source Schematic
Beam Performance

 

Features

  • High beam currents at low beam energy
  • Broad 10 mm spot with no raster required
  • Long working distance; avoids conflict with other instrumentation
  • Dual filaments
  • UHV compatible

 

Specifications

  • 2.75" mounting flange
  • Flange to target distance of up to 12"
  • Operating Pressure – typically 5 x 10-6 Torr
  • Beam current – 1 uA @ 100 eV to 18 uA @1 kV to 3 kV
  • Beam voltage – variable 0 to 3 kV
  • Filaments – dual Tungsten/Thoria
  • Gas Inlet Flange - 34 mm OD CF (separate leak valve required)

 

Theory of Operation

The 3 kV Ion Source is an oscillating electron discharge source with electrostatic extraction and focusing lens. Argon gas is leaked directly into the discharge chamber where ions are formed at a selected energy of between 100 and 3000eV. The ions are extracted and focused into a spot of approximately 10mm diameter at the sample surface where the impact of the energetic ions physically removes surface material.