VB Series Vacuum Bakeout Packages

The VB Series of vacuum bakeout packages are designed for vacuum chambers that can take the high heat of shortwave IR. High-power infrared radiation heats the vacuum chamber from the inside out to effectively desorb water vapor from vacuum chambers.

There are two packages available depending on your power requirements:
The VB-1 operates on 120 VAC and the VB-2 operates on 230 VAC for Europe and Asia.
Both the VB-1 and VB-2 packages include the BC-3 Bakeout Controller, the IRB-600 IR heat emitter, and cables.

Designed to control both shortwave IR heating emitters and heating tape, the BC-3 vacuum chamber controller provides precise control of heating power, temperature, and bakeout time. The thermocouple sensor that is mounted to the vacuum chamber provides temperature feedback to the controller. The vacuum interlock feature is ideal for preventing excessive water vapor-loading on ion pumped chambers.

Used in conjunction with the IRB-600 shortwave infrared heating emitters, the BC-3 provides high energy power to desorb water vapor in vacuum chambers without the need to remove cables and realign optics, which is necessary with blanket radiant bakeouts. If you are using a Variac transformer to control the AC voltage to existing heat tapes, the BC-3 vacuum chamber bake out controller provides a safe alternative with additional layers of control.

The IRB-600 shortwave IR emitter assembly provides 600 watts of heating power to the inside of your vacuum chamber. The flange-to-center of the IRB-600’s emitter length can be customized so that the emitter is in the center of your chamber, ensuring more uniform heating. The IRB-600 is available in both 2.75" / 70mm CF and 40 KF flange styles. The BC-3 vacuum chamber bakeout controller can drive two IRB-600 emitters for a total power output of up to 1200 watts.

If you want to use Variac to control the IRB-600 IR Emitter or if you will use the BC-3 to control your own heating tape, you can purchase the IRB-600 IR Emitter and the BC-3 Bakeout Controller separately.

Base package: BC-3 Controller (specify 120 VAC or 220 VAC), IRB-600 emitter mounted on 2.75” (70mm) CF flange (specify 120 VAC or 220 VAC), 15 ft (4.6m) cables and manual.
Optional accessories: Additional IRB-600 emitter, 40KF mounting flange on emitter, custom length flange to emitter distance (inquire).

Frequently Asked Questions

 

Features

• Simplifies the bakeout process
• High-power infrared heating effectively removes water vapor from vacuum chambers
• Adjustable power regulation
• Temperature feedback
• Vacuum interlock
• Scalable

 

 

Applications

For surface analysis systems such as X-ray photoelectron and Auger spectrometers, our VB packages provide an easy way to bake out the system without removing all the cables to the optics or covering the chamber with the bakeout blanket. This means that you avoid the need to realign the analyzer focal point and microscope, which saves you hours of time.

For general-purpose vacuum chambers, the VB series Vacuum Bakeout packages provide effective infrared heating of the inside of chamber walls, desorbing water vapor and improving the working vacuum of the chamber.

Video

Demo Units Available

Not sure if the VB-1 or VB-2 will work for your application? Contact us for more information about our rental program. For a nominal rental charge, you can try a VB-series package for 30 days and see if you get the desired results. If so and you decide to purchase the package, then the rental fee is applied to the purchase price.
Please read this FAQ for additional information.

When returning a demo VB-series package to RBD that has been installed in a vacuum chamber please fill out this Non-Contamination Form and return it with the VB-series package.

 

Testimonials

Auburn University FINO Lab

We are a thin film synthesis group employing an unconventional growth technique for MBE that involves metal-organic precursors. The configuration of our chamber makes baking after a vent very difficult, so we got the IRB lamp to make it easier to bake the system after vents and to desorb the water and organic material that comes in from the precursors. The IRB has been great for us, accelerating our pumpdown, lowering our base pressure by a factor of 5, and allowing us to clean the chamber walls after we’ve used the precursors.
We use it regularly and would recommend any group doing CVD, ALD, or metal-organic MBE or who has a difficult-to-bake system to get an IRB.

-Ryan Comes
Assistant Professor of Physics, Auburn University

More Testimonials

 

Installation and Operation Manual

VB Bakeout System Manual