RBD's low cost sputter ion source package - the IG2 - is the ideal solution for sputter cleaning of samples under UHV conditions. The IG2 Ion Source Package consists of the Model 04-165 2 kV Backfill Ion Source and the Model 32-175 Ion Source Control. These units are interchangeable with the PHI 04-161 and 04-162 ion sourcess and the PHI 20-045 control, respectively.
RBD provides a 3 kV ion source sputter package that comprises an electron discharge source, power supply, and cable. Designed to operate as low as 100 eV, the 3 kV ion source provides a large 10 mm spot size and is compatible with all inert gasses and does not require differential pumping.
The package includes ion source, electronic control unit, sample current meter, cabling, operating manual and a spare filament assembly.
Sputter Rate Standards are also available from RBD.