microCMA Compact Auger Analyzer

Surface Sensitive Elemental Analysis

A Compact Auger Electron Spectroscopy probe that fits on your existing vacuum chamber

Add a Complete Auger System to Your Vacuum Chamber




Simple to operate and easy to maintain, the microCMA provides a complete quantitative surface sensitive elemental Auger Electron (AES) analyzer package that mounts on a 2.75”/ 70 mm CF flange.

For elemental analysis, the microCMA is much more affordable than a standalone XPS system.

The complete AES system includes the cylindrical mirror analyzer (with integrated coaxial electron source), a USB interface controller, and Windows acquisition and data-massage software. It's Auger analysis made easy!

Base package: microCMA analyzer, USB interface controller, preamp with 15 ft (4.6m) cable, data acquisition and massage software, and manual.
Optional accessories: XYZ translator, 9103 USB picoammeter, custom lengths for CMA and preamp cable.

Complete configuration and ordering information...

Learn more about Auger Spectroscopy...

Frequently Asked Questions




The microCMA is an Auger Spectroscopy cylindrical mirror analyzer designed for the many applications for Auger analysis that do not require AES mapping capability
Those applications include analysis of:

  • Thin film elemental composition
  • Sample cleanliness
  • Metal component thermal oxides
  • Quantization of light element surface films

Overview Video


  • Compact: Fits on a 2.75" / 70 mm CF flange (min. 1.52" / 38.6 mm I.D. tube). It is now possible to build an Auger Spectroscopy system with just a T and a small ion pump!
  • Proven Design: The second order focusing of the Cylindrical Mirror Analyzer provides both good transmission and resolution.
  • Easy to Use:The USB control and data-massage Auger software interface is simple to use and makes Auger analysis easy.
  • Powerful: Auger Spectroscopy (AES) is a powerful surface sensitive technique that provides you with quantitative information on the first few monolayers of your sample.


Kimball Physics Chamber

Kimball Physics Chamber with microCMA, miniZ, and IG2



  • The small diameter of the microCMA allows it to fit on existing deposition or analytical chambers.
  • Because the microCMA is based on the classic cylindrical mirror analyzer design, it has a similar signal-to-noise when compared with larger CMAs. Basically, the microCMA collects the same electrons as larger CMAs do; it just collects the electrons closer to the sample.
  • Integrated 3 kV electron source simplifies the CMA-to-sample alignment.
  • Electron source has automated features such as warm up and conditioning.
  • The microCMA is perfect for elemental surface analysis of thin films and for checking the cleanliness of samples
  • The CMapp Auger software provides total control of acquisition parameters and then quantifies the data post-acquisition.


Send RBD Your Sample for Analysis

Not sure if the microCMA can meet your needs? Send us a sample for analysis.
Contact us for more information.


Application Notes and Whitepapers


Sample Data

microCMA Sample Survey Data


cylindrical mirror analyzer

Mechanical Specifications and Customizations

Customs lengths are available. Contact us for more information.
microCMA Dimensions Form
microCMA Dimensions Form (print version)



  • The end-of-optics to sample distance is 4 mm.
  • Since the microCMA is so small, the co-axial built-in electron source is limited to 3 kV.


Ordering Information

Request Quote / Info

Please fill out this microCMA Dimensions Form indicating the flange-to-sample distance so that we can quote the correct length CMA and Z translator combination.
Customs lengths are available.


Part Number Description
MCMAPR microCMA package: Controller, Analyzer & System Cable.
Includes Compact 2.75" / 70 mm CF flange mounted Auger CMA with USB control, software and cables.
Z-translator and 9103 picoammeter are not included in price. Z-translator is required. 9103 is recommended.
EQA-BLT27S-02 Z axis translator, 2" (50mm) stroke, Compressed Height 2.6" (66mm)
EQA-BLT27S-03 Z axis translator, 3" (75mm) stroke, Compressed Height 2.75" (70mm)
EQA-BLT27S-04 Z axis translator, 4" (100mm) stroke, Compressed Height 2.9" (74mm)
EQA-BLT27S-06 Z axis translator, 6" (150mm) stroke, Compressed Height 3.2" (81mm)
MCMACTLRPR microCMA Controller Only
MCMAOPPR microCMA Analyzer Only
MCMA-5901-EDR Channeltron CEM 5901 Multiplier for mCMA, EDR
MCMA-CA17-A microCMA System Main Cable - 15-foot (4.6-meter) length
MCMA-CA17-B microCMA System Main Cable - 10-meter (32.8-foot) length
MCMA-CA17-U microCMA System Main Cable upgrade to 10-meter (32.8-foot) length when purchased with MCMA Package.
Incurs additional charge.



microCMA Drivers
Unplug the microCMA USB interface before downloading, then plug back in for updates to take effect.

CMapp for the microCMA - Version 1.2
The latest version includes the features for extended filament conditioning as well as improved dynamic multiplier conditioning.


Installation and Operation Manual

microCMA Manual