The RBD Instrument’s IG2 sputter ion source package is a very simple, low cost sputtering package that is based on the old Physical Electronics 04-161/162 ion source and 20-045 ion source controller. The beam voltage can be varied from 500 volts (lower on request) to 2kV.

There are quite a few of these packages in the field where users do not need anything other than simply sputter cleaning an area off the surface of their specimen. More powerful ion source packages have a variety of performance options and can cost as much as $300K.

Some of the parts needed to build the 32-165 IG2 2 kV ion source controller are no longer available. As a result, we have redesigned the 32-165 and are now providing its replacement, the 32-175. The 32-175 functionality will be the same as the 32-165 with one exception: we have removed the anode monitor feature and replaced it with an emission current meter. The new emission current meter makes it possible for the user to set the amount of filament current needed to obtain the highest possible ion current and to monitor the thermal stability of the ionizer. Just like the 32-165, the new 32-175 will be compatible with the PHI 04-161 and 04-162 ion sources in addition to the RBD 04-165 2 kV ion source.

If you need a low cost sputter ion source visit the RBD Instruments website for more information – RBD Instruments IG2