Tag Archives: IG2

New controller for IG2 sputter ion source package

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The RBD Instrument’s IG2 sputter ion source package is a very simple, low cost sputtering package that is based on the old Physical Electronics 04-161/162 ion source and 20-045 ion source controller. The beam voltage can be varied from 500 volts (lower on request) to 2kV.

There are quite a few of these packages in the field where users do not need anything other than simply sputter cleaning an area off the surface of their specimen. More powerful ion source packages have a variety of performance options and can cost as much as $300K.

Some of the parts needed to build the 32-165 IG2 2 kV ion source controller are no longer available. As a result, we have redesigned the 32-165 and are now providing its replacement, the 32-175. The 32-175 functionality will be the same as the 32-165 with one exception: we have removed the anode monitor feature and replaced it with an emission current meter. The new emission current meter makes it possible for the user to set the amount of filament current needed to obtain the highest possible ion current and to monitor the thermal stability of the ionizer. Just like the 32-165, the new 32-175 will be compatible with the PHI 04-161 and 04-162 ion sources in addition to the RBD 04-165 2 kV ion source.

If you need a low cost sputter ion source visit the RBD Instruments website for more information – RBD Instruments IG2

Putting Together a Compact UHV (Ultra-high Vacuum) Chamber for Spectroscopy

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Small, inexpensive UHV chambers have been the backbone of many commercial labs and universities for decades. The cost of larger, feature-rich systems has gone up dramatically in recent years, making compact, DIY chambers even more cost-effective for specialized applications and education.

RBD has a range of products available to add value to your compact chamber, and in fact built our own recently to develop and test our microCMA compact Auger analyzer.

RBD Kimball Chamber
Kimball Physics chamber with RBD miniZ, IG2, and microCMA compact Auger analyzer

The Chamber

We started with an 8 inch spherical octagon chamber from Kimball Physics. This chamber has two 8.00″ CF and eight 2.75″ CF mounts, with an internal volume of  106.6 cu. in. (1,747 cc):

Kimball Physics Chamber
Kimball Physics 8.0″ Spherical Octagon – Vacuum Chamber

The vacuum chamber was fitted with an ion pump from Gamma Vacuum, and valves and windows from MDC. Affordable turbo pumps can be sourced from Pfeiffer (HiCube 80 Eco) and Edwards (nEXT85).

Rough vacuum gauges are available from a number of companies including Digivac.

Rough Vacuum Gauge
Rough vacuum gauge

Ion gauges and ion gauge controllers are available from a number of companies including Stanford Research Systems

Ion Gauge Controller
Ion gauge controller

Accessories

To assist with water vapor desorption, the chamber is fitted with RBD’s miniZ. The mini-Z uses UVC radiation to desorb water from the chamber walls, resulting in faster pump-down times and lower ultimate vacuum.

RBD miniZ
RBD miniZ water vapor desorption system

This chamber is also fitted with RBD’s IG2 2 kV low cost sputter ion gun for specimen cleaning:

Instrumentation

The ultimate purpose of this system was to house RBD’s microCMA compact Auger analyzer (shown below with the Z translator attached):

RBD microCMA
RBD’s microCMA compact Auger Analyzer

For applications that require elemental analysis, this chamber, with the addition of a PC and CMapp AES acquisition and data massage software, is now a complete system providing quantitative, surface-sensitive Auger electron spectroscopy. At around $50,000 for all the components listed here, this is one example of a budget-sensitive spectroscopy system that can be assembled, repaired and upgraded without costly field service visits.