A blog on the repair, operation and calibration of surface analysis systems and components including electron spectrometers, sputter ion guns and vacuum related hardware. Click on the Index tab below to see a list of all posts. Visit our website at http://www.rbdinstruments.com
Category Archives: Ion Sources
Information on PHI (Physical Electronics) ion source repair, maintenance, and operation
The RBD Instrument’s IG2 sputter ion source package is a very simple, low cost sputtering package that is based on the old Physical Electronics 04-161/162 ion source and 20-045 ion source controller. The beam voltage can be varied from 500 volts (lower on request) to 2kV.
There are quite a few of these packages in the field where users do not need anything other than simply sputter cleaning an area off the surface of their specimen. More powerful ion source packages have a variety of performance options and can cost as much as $300K.
Some of the parts needed to build the 32-165 IG2 2 kV ion source controller are no longer available. As a result, we have redesigned the 32-165 and are now providing its replacement, the 32-175. The 32-175 functionality will be the same as the 32-165 with one exception: we have removed the anode monitor feature and replaced it with an emission current meter. The new emission current meter makes it possible for the user to set the amount of filament current needed to obtain the highest possible ion current and to monitor the thermal stability of the ionizer. Just like the 32-165, the new 32-175 will be compatible with the PHI 04-161 and 04-162 ion sources in addition to the RBD 04-165 2 kV ion source.
If you need a low cost sputter ion source visit the RBD Instruments website for more information – RBD Instruments IG2
This blog post shows you how to test the filament current supply on an 11-065 when it is connected to the 04-303 ion source.
Make sure that the 11-065 main power switch is OFF and then remove all cables and the power cord. Put the 11-065 on the table top or bench. Note that you will need to connect the black high voltage cable from J9 on the back of the 11-065 to the 04-303 ion source.
Remove the top cover on the 11-065.
11-065 Top Cover
Remove the High Voltage cover on the right hand side. Remove the 4 outside screws, not the 4 inside screws.
11-065 high voltage coverRemove 4 outside screws
The two high voltage boards are now visible.
HV2 board is on the left, HV1 board is on the right
On the right hand HV1 board, E93 is the high voltage output, E92 and E91 are the filament current output connectors. With the 11-065 power OFF and the high voltage OFF and set to zero, unplug the E92 connector and then connect a current meter that can go up to 10 amps DC between the E92 cable lug and the E92 connector on the HV1 board. Make sure that the meter leads are not touching anything.
CAUTION! High voltages can be present on this board. As long as you have the high voltage on the 11-065 set to zero (fully CCW) and the high voltage switch set to off, then there is no high voltage present. Refer this test to someone who is trained to work safety with high voltage if you are not familiar with operating a DVM.
Remove E92 cable from HV1 board.Fluke meter set to 10 amps DC
Make sure that the beam voltage switch is set to zero and the beam voltage control potentiometer is turned fully CCW.
Beam voltage set to OFF and control potentiometer set to zero (fully CCW)
Connect the black high voltage cable between the 11-065 and the 04-303 ion source. Connect the main power cable to the back of the 11-065.
Make sure that the Emission adjust potentiometer is fully CCW and that the emission scale switch is in the X1 position,and then turn on the 11-065 main power. The emission current should be zero.
When the 11-065 is turned on the emission current should be zero.
Slowly turn up the emission current (turn CW) until you get 25 mA of emission current.
Emission current set to 25mA with the emission scale set to X 1.
The DC current meter should read approximately 2.7 amps DC current at 25 mA of emission current on the 11-065 emission meter.
2.7 amps DC current with the emission current set to 25mA
If your emission current shoots up to 50mA when the 11-065 is first turned on or when the emission current is turned up then there is a problem with the 11-065 filament current circuit or the emission feedback circuit.
If you do not get any filament current then there is a problem with the 11-065 filament circuit or the ionizer in the 11-065.
For help with repairing your 11-065 controller please contact RBD Instruments for assistance.
The differential aperture in the PHI 04-303 5kV ion source provides two functions:
It helps to shape the ion beam.
It restricts the gas in the ionizer, which is at a higher pressure, from entering the vacuum chamber.
The differential aperture is made from stainless steel and after years of normal use the aperture becomes sputtered away, resulting in a misshaped ion beam and higher system pressure.
RBD has designed an insert aperture that is made out of tungsten and which will last for many years.
The pictures below show a worn-out aperture and our new insert aperture.
Old worn out 04-303 apertureNew 04-303 aperture
Our 04-303 ion source rebuild service now includes this aperture as part of our rebuilding procedure.
So, when your 04-303 needs to be serviced, please contact us for more information about how our rebuild service improves the shape of the ion beam, reduces the pressure in the system for years to come, and saves you money.
