Testing the fuses on the Card Rack power supply outputs

Print Friendly, PDF & Email

The fuse strip located near the hinge on the OEM supply door routes the +5, +15, and -15 voltages from the OEM supply to the card rack unit motherboards.

Each card rack unit has a dedicated section of fuse strip and specific fuse values.

When troubleshooting problems with card rack units it may be necessary to test the fuses in the fuse strip. With the card rack power OFF you can visually inspect each fuse to see if any of them look like they are blown. You can also use an ohmmeter to measure the resistance of the fuses (typically one ohm or less). In some cases it is helpful to measure the actual voltage on the fuses. It is possible that a fuse that looks good is actually blown. Or the voltage on the fuse may be loading down on the output side.

Since the +5, +15, and -15V OEM supply outputs are floating with respect to ground, you need to reference your meter to the correct place in order to measure the voltage. The card rack power needs to be ON when measuring the voltages on both sides of the fuses. The voltage should be very close to the same value on both sides of the fuses. One side is voltage in, the other side is voltage out to the card rack unit.

Fuses and reference points

The picture below shows the correct OEM supply reference point for the +5V, -15V, and +15V fuses.

For example, to measure the middle section -15V fuse you would need to put your DVM red lead on the left side of the middle fuse, and the black lead of your DVM to the CH3 white wires on the OEM supply. Then also measure the other side of the same fuse. The voltage on both sides of the fuse should be very close (within a few millivolts). Note that you may need to remove the protective plastic cover on the fuses in order to be able to measure the fuses.

Section number and fuse locations

There are up to 13 sections on the fuse strip and each section is typically dedicated to a particular card rack unit motherboard. Keep in mind though that the fuse locations are not written in stone and so units on your system may be plugged into other fuse sections. Also, some units are removed when an RBD software upgrade is installed. When in doubt, trace the power cables from the back of the motherboard to the fuse strip.

The fuse values (in Amps) and locations are shown below:

5400 XPS                                                                                                                                 

Section Unit Top +5V Middle -15V Bottom +15V
1 72-488 10
2 71-205 5 5 2
3 72-250 3 1 1
4 72-490 10 5 5
5 72-030 1 1 5
6 Not used      
7 Not used      
8 80-360 5 5 5
9 77-067 2 2 10
10 72-360 1 1
11 Terminator 1
12 Not used      
13 Not used      

5600 XPS

Section Unit Top +5V Middle -15V Bottom +15V
1 72-366 1 1 1
2 80-365/366 5 5 5
3 72-030 1 1 5
4 71-205 1 2 1
5 72-488 10
6 74-500 10
7 MCD Preamp 1 1
8 81-175 or 73-080 10 2 2
9 74-062 10
10 97 or 72-100 1 2 5
11 73-070 or 73-080 5 2 2
12 73-057 3 3 3
13 72-700 1 1 1

650 / 660 AES

Section Unit Top +5V Middle -15V Bottom +15V
1 79-170 or 81-175 10 2 2
2 74-062 10
3 72-150 / 96A 5 5 5
4 74-500 / Term 10 0 0
5 Not used      
6 Not used      
7 AES 72-100 / Term 3 2 5
8 97 SED / 72-100 1 2 5
9 Not used      
10 72-105 1 2 1
11 72-600 2 1 1
12 73-057 / Term 3 3 3
13 77-072 5 2 2

Here is an example: Lets say you want to measure the voltage on the 80-365 fuses on a 5600 XPS system. You would first locate the correct fuse section, in this case that is section 2. The top fuse in section 2 is the +5V supply and so you would measure from the left side of the top fuse in section 2 to the white ground wire on Channel 1 (the big lugs) on the OEM supply. Then you would also check the other side of the same fuse to make sure that you have the same voltage on both sides of the fuse. The middle fuse in section 2 is the – 15V fuse and it is referenced to the white wires on Channel 3 on the OEM supply. Finally, the bottom fuse is the +15V and it is referenced to the white wires on Channel 2 of the OEM supply.

By using the correct reference point you can easily measure the voltages on both sides of the card rack fuses when troubleshooting electronic problems with your older PHI XPS or AES system. As always, refer servicing to qualified personnel. The OEM fuse voltages are considered low voltage. However, most of the card rack units themselves generate high voltages and should be only worked on by technicians with the proper training to work safely with high voltage. If you need help troubleshooting a problem with your XPS or AES system, contact RBD Instruments for assistance.

11-065 Ion Gun Controller Emission Switch Operation

Print Friendly, PDF & Email

The emission scale switch on the 11-065 ion gun control is used to change the scale of the emission to three levels: 100% (X1), 10%(X.1) and 1%(X.01).  The effect of changing the emission switch is to reduce the emission current, which in turn reduces the ionization (pressure reading) and ion (target) current proportionally.

Initially, the emission needs to be set to 25mA in the X 1 scale and the leak valve is adjusted to achieve 15 to 25 mpA of pressure.

25 mA of emission current
Adjust Argon to get 15 t0 25 mPa of gas pressure

 The graph below shows the target current vs. time and the effect of changing the emission current from X 1 to the X.1 and X.01 scales.

Ion current in uA

When changing the emission scale switch, the emission reading on the 11-065 front panel meter will not change, but the actual emission current will be reduced by a factor of 10 (X.1 scale ) or 100 (X .01 scale). So for example if the emission is set to 25 and the emission scale switch is changed to X .1, the meter still indicates 25mA but the actual emission is 25mA X .1 = 2.5mA.   The pressure display will be reduced by a factor of 10 as well since the number of ions being generated are reduced proportionally to the emission current.  Ideally, the target current will also be reduced by to 10% of the X1 value when the emission scale switch is changed to X.1.  In the graph above we see that the target current drops from about 4.25uA to .8uA as the emission drops from 25mA to 2.5mA.  As expected, the target current drops a factor of 10ish to 70 nA as the emission scale switch is changed to the X .01 position.    

The picture below shows that the pressure drops to about 2mPa as the emission scale is changed to X.1

Emission scale x .1

This picture shows the pressure dropping to .2mPa as the emission scale switch is changed to the X.01 position.    

Emission scale x .01

The emission scale switch is an easy way to reduce the ion target current by a factor of 10 or 100 in order to achieve lower sputter rates.

Note that Balzers RVG 050 thermovalve controllers cannot be used on older 11-065s  in the X .1 or X .01 emission scale positions since they depend on the pressure reading for feedback.  Newer 11-065s have a circuit that compensates so that the pressure output is correct at each emission scale setting.

72-030 Neutralizer Current limit procedure

Print Friendly, PDF & Email

After you replace the filament in the 04-085 or 04-090 neutralizer you may need to readjust the current limit on the 72-030 neutralizer board. The 72-030 provides the filament current and bias voltage to the neutralizer. This procedure shows you how to set the current limit on the 72-030 so that you generate enough electrons to neutralize the sample and also maximize the filament lifetime.

Tools Needed:

HV card rack extender board

Voltmeter with 2 clip leads

Potentiometer adjustment tool

72-030 Calibration procedure

  1. Turn off the card rack power
  2. Extend the 72-030 neutralizer card (located in the card rack)
  3. Connect the DVM across R59 / E6
  4. Make sure that the filament cable is connected to the neutralizer on the system
  5. Turn on the card rack power
  6. Turn on the 147 PC Interface unit
  7. Open AugerScan software
  8. Turn on the neutralizer in AugerScan
  9. Monitor the target current with a picoammeter and a +90V bias
  10. Turn up the Emission in the Augerscan Neutralizer dialog box to 20 to 23 mA while monitoring the DC voltage in millivolts across R59 / E6.
  11. There should be approximately 34 mV across R59 / E6 and you should also be able to see the end of the neutralizer glowing orange to white in the vacuum chamber.
  12. Set the Emission to 25 mA and if necessary adjust R48 / B6 so that you have 2 to 3 uA of target current.   Do not adjust R48 / B6 to exceed 36mV across R59 / E6. 36mV corresponds to 3.6 amps of filament current. The lower the filament current, the longer the filament lifetime.
  13. Turn off the card rack power and reinstall the 72-030 neutralizer card in the card rack.

Ideally, adjusting R48 for a value that provides a few uA of target current and with less than 36mV across R59 / E6 will result in the longest filament lifetime.

72-030 board extended
R59 current sense resistor
Measure voltage across R59 34mV corresponds to 3.4 amps of filament current



72-030 Neutralizer bias voltage notes

There are two revisions of 72-030 neutralizer boards.  The older original 72-030 has a bias voltage range of 0 to -12V.   The newer 72-030s have a bias voltage range of 0 to -24V.

You can tell the difference by two things.  First of all, U6 is a OP07 op amp on the older 72-030s, and it is a LM344H high voltage op amp on the newer 72-030s.  Secondly, there is a 5V to 15V power convertor on the newer boards, the older 72-030s do not have that power converter.



12V bias 72-030
24V bias 72-030