Secondary Ion Mass Spectroscopy Tutorial

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SIMS System

The following post is a Secondary Ion Mass Spectroscopy Spectroscopy (SIMS) Tutorial ( PowerPoint in PDF format) complements of Eric Krosche. Although a destructive technique, SIMS is also the most sensitive surface analysis technique with detection limits as low as parts per billion.


Additional SIMS tutorials:

Secondary Ion Mass Spectroscopy Wiki

Eagle Analytical Labs SIMS Theory

Note that the SIMS workshop links list of SIMS systems providers is missing a few companies such as Hiden and Extrel

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