V4 Differential Valve Problem

V4 Differential Valve Problem

This post describes how to fix the problem of the V4 differential valve not opening on an AVC when the DIFFY PUMP ION GUN button on the AVC remote box is depressed.  Look at the photos at the bottom of the post for additional information.

The AVC (Auto Valve Control) has two DV6M thermocouple gauge tubes which are used to monitor the vacuum levels in the load lock and at the turbo pump. In the case of systems that have two turbo pumps, the second thermocouple gauge tube monitors the ion gun differential pumping turbo. The load lock TC gauge tube is located on under the load lock or in some cases as shown below, under the table top.

The AVC displays the vacuum level of the load lock thermocouple gauge at all times with the exception of when the DIFFY PUMP ION GUN button on the AVC remote box is depressed. In that case the AVC will momentarily monitor and display the turbo pump thermocouple gauge tube. If the vacuum level is sufficient then V4 will open. Monitoring the turbo pump vacuum is a built in safety feature of the AVC to prevent the chamber from being dumped in case the DIFFY PUMP ION GUN button on the AVC remote box is depressed while the turbo pump is off or not up to speed.

A not uncommon problem with the AVC unit is that the V4 valve will not open when the DIFFY PUMP ION GUN button on the AVC remote box is depressed.

The most common solution to this problem is that the turbo pump thermocouple gauge tube is not working properly or is not matched closely enough to the load lock gauge tube. Here is how you can test the ion gun gauge tube –

  1. Press the PUMP INTRO button on the AVC remote and pump out the load lock until you have 5 bars displayed on the AVC remote.
  2. On the back of the AVC (located on the back of the vacuum console), remove the TC1 gauge cable. TC1 monitors the load lock.
  3. Unplug the TC2 cable and move it into the J1 connector where you just unplugged TC1.
  4. Look at the AVC remote box. If the turbo pump thermocouple gauge is working properly you will see 4 bars displayed. After 2 minutes you should see 5 bars displayed.   If only 3 bars are displayed you can adjust the AVC so that V4 will open by following the steps in this older blog post – https://www.rbdinstruments.com/blog/auto-valve-control-adjustment-procedure/

If only 2 bars are displayed then the next step would be to try replacing the DV6M thermocouple gauge tube. There is only one TC controller (Hastings T6 called the hockey puck because of its shape) inside the AVC and a relay switches between the two thermocouple gauge tubes when the DIFFY PUMP ION GUN button on the AVC remote box is depressed. If the two thermocouple gauge tubes do not have similar offset and gain properties then the only solution is to replace the turbo pump DV6M thermocouple gauge tube or the intro thermocouple gauge tube in order to get them to match more closely. If the AVC reads 1 bars all the time then the hockey puck may be defective.

Usually though, the problem is that the K3  thermocouple relay inside the AVC is not switching. Or the contacts on the relay may be dirty. In the case of the older Blue plastic relays it is common for the plastic switch throw to be cracked at the top in which case the relay may close but not all the way and so the turbo pump thermocouple gauge is not read at all.    The RBD Instruments part number for the blue/yellow K3 relay is PN K3AVC24RE.

If when you swapped TC1 and TC2 only one bar was displayed, then most likely the relay I broken or the contacts are dirty. Here is how to address that problem;

  1. The easiest way to get to the back of the AVC is to come in through the top. So, remove the wooden table tops and the aluminum ones that are towards the back of the vacuum console.
  2. Close all valves on the AVC and also turn off the turbo pump (s).
  3. Turn off the AVC control power.
  4. Remove cables from the back of the AVC, including the power cord.
  5. Unplug the air manifold cable and remove the gas manifold from the AVC (2 to 4 screws) The air-lines stay connected to the manifold and the compressed air that is connected the back of the vacuum chamber stays on..
  6. Remove the AVC control and unplug the 40 pin remote box ribbon cable.
  7. Place the AVC control on a work bench or table and remove the cover.
  8. Inspect the TC relay K3 (on older AVCs there are only 2 relays and the thermocouple gauge relay is the left one). If you have a newer AVC with 3 relays, the TC relay is the far left one. The far right one is the up to air relay. If it is the old blue relay you can remove the two mounting screws on the back of the AVC to make the relay more accessible.
  9. If the TC relay is the old Blue plastic type(RBD part number PN -K3AVC24RE),  then most likely the relay contact pull piece is broken at the top. If you remove the cover you can inspect the top part of the pull piece and if it is cracked then the relay needs to be replaced. (You can also just move a new pull piece over from a new relay rather than unsolder the relay).
  10. If the TC relay is the newer style then most likely the contacts are oxidized and you will need to clean the contact with some fine sand paper or emery cloth followed by paper soaked in isopropanol to remove the residual small particles. (Or you can replace the relay with a new one).
  11. To clean the contacts, unplug the relay from the socket and remove it from the AVC.
  12. Remove the plastic cover from the relay (it snaps on so use small screwdriver to un snap it) then clean the contacts.
  13. You can measure the resistance on the contacts with an ohm meter and manually move the relay throw to switch between the two sets of contacts.
  14. Reinstall the relay.
  15. Reinstall the AVC control and reconnect the gas manifold and all the cables.

That should do it!   If not then please contact RBD Instruments Inc. for more assistance. We can repair your AVC controller and also provide DV6M thermocouple gauge tubes.

RBD Instruments Inc. www.rbdinstruments.com 541 330 0723

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20-327 Beam Voltage Adjustment

This post is about how to adjust the 20- 327 2kV beam voltage for the elastic peak.

Click on the link below to go to the .PDF

20-327 beam voltage adjustment

The 20-327 electron gun control is used on the Physical Electronics 610 series scanning auger electron systems.  The 20-327 is also a replacement for the obsolete 18-080 and 18-085 electron gun controls.

20-327 front panel

20-327 front panel

Once you have adjusted your elastic peak for best shape with max counts you will need to adjust your 20-327 R47 for proper alignment of the beam voltage calibration. Please read all of procedure before proceeding.

1)    Place a piece of clean copper in your system, Run an alignment and adjust your Z axis until you get good counts with good shape. Not one or the other but both.

2)    NOTE: DO NOT MOVE STAGE FROM THIS POINT ON.

3)    You will not care about the position of the peak we will adjust this in the 20-327.

4)    Acquire a survey and adjust the AES scale factor located in hardware properties until your copper peak is at 920 differentiated. Remember in the scale factor adjustment higher value lowers the peak and lower values raise the peak

5)    Next run an alignment and see where your elastic peak is located. If peak is not at 2K move on to steps 6,7and 8.

6)     Turn the gun off in the software. Turn off the 20-327 drop down the front panel of the 20-327 and extend the bottom board (if you do not have an extender it will take you longer but can be adjusted.

7)    Adjust R47 located toward the back of the board located in diagram 1

8)    Adjust half a turn; replace the board and power up the 20-327 and Augermap software.   Run an alignment determine the direction the pot moves the peak. Adjust accordingly until your alignment is right on 2KV and then run a survey and make sure your Cu1 peak is 920 diff. If peak is not perfect run procedure (step 3 to 8 until elastic peak and Cu1 are in proper positional alignment).

DGC IV calibration

 

Years ago RBD Instruments had our DGC IV manufactured by JC Controls.  The DGC IV is basically the same thing as a IG4500.
Although we no longer produce the DGC IV, there are still a few of them in the field.  The calibration procedure is listed below.

 POTENTIOMETERS LIST

PR7(VREF)Reference Voltage Adjust                                                          Direction are with the front

PR4(TC1 Z)TC1 Zero Adjust                                                             of the IG4500 facing you.

PR6(TC2 Z)TC2 Zero Adjust                                                                            N

PR3            TC1 Gain Adjust                                                                                    W –+– E

PR5            TC2 Gain Adjust                                                                                         S

R1(EMIS)    Emission Adjust

PR2(ELEC)Electrometer Adjust

 

Power Supply Tests ( Ground)

  1. Attach Tester box to controller and check voltages on computer or do steps B,C,D,E
  2. Test -15,+15,+5 from 8 Pin Power Connector Pins   2,3,4.
  3. Turn on Ion Gauge
  4. Test +180 V From Grid Pin (Outside) of tube to Ground.
  5. Test +150 V from Grid Pin to Fil Pin (Outside to Inside) of tube.
  6. Check Degas

(1) Reference Voltage Adjustment

  1. Connect DC DVM from R14{E} to ground R31{E}
  2. Turn on IG4500 while holding down the SELECT switch,.
  3. While holding down the SELECT Switch, adjust PR7 (VREF) until the DC voltage is 10.000 ( +/- .001 )
  4. Release Select Switch and Check off Recorder output box
  5. Turn Power off and on, check that all the LED light up, if so check off Digit(LED) Test

(2) TC1 & TC2 Zero Adjustment

  1. Connect TC Cable to TC1 Input on back of IG4500.
  2. Connect a TC tube that is at Atmosphere to the cable.
  3. Connect DC DVM from R26{E} to ground (R31{E})
  4. Adjust PR4(TC1 Z) until DC Voltage is .133 VDC. (+/- .005 )
  5. Do the same with TC2, Using TC2 Input, R33{E} & PR6(TC2 Z).

(3) TC1 & TC2 Gain Adjustment

  1. Connect TC Cable to TC1 Input on Back of IG4500.
  2. Adjust PR3 through the back panel until the main display is the same vacuum as the Test Tube. Because TC Tubes work by Heat, give the tubes time to readjust after the pot is turned.
  3. Do then same with TC2, Using TC2 Input, Bar Graph & PR5.

 

(4) Emission Adjustment

  1. Use tester box or connect a current meter in series with Pin 3 of J1 ( Power Connector ).
  2. Connect IG cable to unit and a IG Test Tube. Connect the current source to the BNC on the unit.
  3. Turn on power and turn on ion gauge tube. Use current source to get to 10 mA range
  4. Adjust PR1 (EMIS) until you get 10.0 mA (+/- .05) on current meter.
  5. Use current source to switch down to 1 mA range, emission should be 1.00mA on current meter, Record current.

(5) Electrometer Adjustment

A. Connect current source to IG4500, set to 1uA. Turn on Ion Gauge.

B. Adjust PR2 (ELEC) so IG4500 displays 1.0-04.

C. Repeat Step B for 1nA=1.0-08, 100pA=1.0-09.

D. Also record for 10pA, it should be 1.0-10. (+/- 2.0)

 

(6) Setpoint & EEPROM

A. Check that the relay turn on and off by listening for them to click

B. Use the computer to set the serial number.

C. Turn unit off and on, Check serial number in “Edit Window” by entering =R#

 

Technical Modes of IG4500

* Enable Adjust Mode

This mode is for turning the System Enables on and off. It is entered by pressing and holding down the [ION] & [SELECT] buttons while turning on the main power . The display will show The Enable Name followed by either On or Off.

IGS Enables

Enable Name Description
F Filament Enable ( Display Mode )
Fd Full Duplex RS-232 Communication
C1 Code 1 enabled – Filament Overdrive
C2 Code 2 enabled – Under Vacuum, No Collector
C3 Code 3 enabled – Over Vacuum
A Averaging Enabled
E Emission Ranging Enabled

 

To Adjust the enables press the [ION] switch to select the different enables and the [DEGAS] switch to change from on to off. The Default for the IG4500 is All enables on.

** Timer and Control Mode

This Mode displays the timer value from the electrometer circuit. The value is a 6 digit Hexadecimal number. To put it on the 5 digit display either the lower 5 or the upper 5 digits will be displayed depending on if the high digit is a 0 or not. The Units LED’s are used as status LED’s

 

Display Unit LED’s

LED Name Status
Torr 25’th Bit of timer
Min Averaging On
mA Full Emission On

 

Mode 8 is entered by turning the Display switch to Emis. , then press the [ION] & [DEGAS] at the same time. The [ION] button will turn the Averaging on & off, you should make sure Averaging is disabled before adjusting it manually or else the controller will probably switch it back. The [DEGAS] button will switch between Full and 1/10 Emission Current.