Category Archives: Operation and Calibration Procedures

Operation and calibration procedures for PHI (Physical Electronics) components

XPS PM Procedure

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5400/5500/5600 System XPS PM procedure Preventive Maintenance Guide

This post lists the common tasks that are completed as part of a preventative maintenance on a PHI 5400/5500/5600 XPS X-ray photo electron spectrometer.

XPS PM Procedure – OPTICS

  1. *Discuss System performance and issues with system operator prior to servicing.
  2. *Inspect system, note base vacuum. Test TSP filaments.
  3. *Make sure that you have all necessary parts for the maintenance. If you are missing anything, order it before proceeding. For maximum efficiency, you will perform vacuum maintenance first as you can inspect and clean the electronics during the system bake out and cool down.
  4. *Prepare to vent the system by shutting down all filaments and voltages to the ion guns, X-ray sources and neutralizer.
  5. *Turn off the DIGIII and Boostivac. Let the system cool for 10 minutes.
  6. *While the system is cooling, prepare a work area for optics maintenance.
  7. *Vent the system (make sure that the turbo pump(s) are on to prevent oil vapors from backfilling during the vent process). After the system is up to air, turn off the turbo pump(s).
  8. *Remove the X-ray source(s) from the chamber and inspect the filaments, window, football ceramic and anode. Replace parts as needed.
  9. *Remove the ionizer from the Ion gun and inspect the ionizer. Replace if needed.
  10. *Remove the Ion Gauge and inspect the filaments. Replace if needed.
  11. *Replace TSP filaments as needed.
  12. * If the 04-085/090 Neutralizer filament needs to be replaced, remove the neutralizer and replace the filament. It should be replaced every 4 years of normal usage.
  13. *If channel plates or electron multiplier needs to be replaced, remove the 6″ flange on the SCA and replace the multiplier. This typically is replaced every 3 to 5 years depending on usage.
  14. *Pump down the system.
  15. *Start the ion pumps.
  16. *Prepare the system for bake out – NOTE: Remove the microscope by unscrewing the locking screw. Do not remove the lower portion to make it easier to re-align the microscope after the bake out.
  17. *Once the system reaches at least the mid 10-7 Torr range, then the system can be baked for 12 to 24 hours.

 

XPS PM Procedure – ELECTRONICS

 

  1. *Make sure the card rack power is off and visually inspect all electronic cards and units.
  2. *Clean all edge connectors with alcohol and q tips (not an eraser).
  3. *Replace as needed any marginal capacitors, resistors or transistors.
  4. *Replace all neon bulbs.
  5. *Replace CM85 bulbs in EMU unit as needed. Note that if the Vacuum Console bulb needs to be replaced that the entire system needs to be shut down first.
  6. *Clean electronic card rack filters.

 

System Outgas Procedure

  1. *With the card rack power off and all electronic units off as well (except for the ion pumps, DIGIII and turbo pumps), re-connect all system cables.
  2. *Reconnect the microscope.
  3. *Load the slotted silver sample into the system.
  4. *Turn on the card rack power and the power to the Ion gun control and X-ray source control.
  5. *Load AugerScan software.
  6. *Turn on the ion gun control and outgas the filament slowly to 25mA and 2 to 3kV. Do not sputter the slotted silver sample at this time.
  7. *Out gas the X-ray source filaments and condition the anodes to 16.5kV slowly.
  8. *Lightly sputter the slotted silver sample.
  9. *Find the focal point of the SCA using the slotted silver sample and align the microscope to that point.
  10. *Load a piece of Cu and AU side by side an calibrate the XPS linearity.

 

 

 

Calibration

Calibration sequence:

  1. *Calibrate Small Spot on Slotted Silver Sample
  2. Calibrate Au and Cu peak linearity:
    • * Pass Energy Tracking
    • * Au 84.0
    • * Cu 932.67
  3. *Align ion gun to focal point. – Load a piece of TaO5 with an X scribed into it. Put the X at the focal point of the microscope and then burn a hole into the TaO5 with no raster. Adjust the ion source as needed to center the sputter crater in the middle of the X.

 

Specifications

Refer to the counts/resolution Specifications for the specific system type that you are testing. In general, if the resolution spec (less than .8eV FWHM on clean silver) can be met then the system will be performing properly in all pass energies.

RBD TechSpot has procedures for all of the above tasks. Simply search for the keyword in the search box at the top of this bog.  For example – XPS alignment

11-155 power supply test

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This 11-155 Voltage Testing PDF shows the test points to measure the voltages in the 11-155 power supply which is used on the older PHI 595 and 600 scanning auger systems.

Procedure:

 Slide the 11-155 power supply  out so that the front of the unit is resting on the floor, and the back of the unit is still in the rack. Remove the top cover.

Turn on the RBD110 main power and measure the voltages as shown in the above drawing. The 5 volt supply usually is between 5 and 5.4 volts DC. The plus and minis 20 volts supplies are usually between 19.5 and 20.5 volts DC. All supplies should have less than 10 mV AC ripple.

If you have a bad 20V or 5V power supply, RBD Instruments has replacement units in stock.

Bonus – here are the 11-155 Scanning System Power Supply Schematics

20-622 Steering Voltage Adjustment Procedure

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Overview:

The condenser and objective steering voltages in the 20-622 electron gun control used on the PHI 660 scanning auger systems  need to be adjusted periodically (check it as part of   preventive maintenance service) for optimal image stability.

If your image is stigmatic and moves a lot when you change your objective lens, you may want to check the condenser and objective steering voltages. A small amount of image movement is normal.

Following this procedure will ensure that the steering voltages are operating properly and also that they are properly balanced.

Summary Table:

J3 Pin Description Offset Pot Gain Pot Deflection Bd. Pin Lens Bd. Pin

A

 COND X

R 27

R 25

 Defl 1 pin 8 58
C COND X R 27 R 25 Defl 1 pin 10 58
B COND Y

R 23

R 22

 Defl 1 pin 62 50
D COND Y R 23 R 22 Defl 1 pin 64 50
E OBJ X

R 36

R 35

 Defl II pin 7 66
G OBJ X R36 R 35 Defl II pin 9 66
F OBJ Y

R 34

R 33

 Defl II pin 61 56
H OBJ Y R 34 R 33 Defl II pin 63 56

 

    Procedure:

  1. Turn OFF the 20-610 30kV High Voltage Supply.
  2. Remove the 20-622 from the electronic console and extend the Lens control card (second board from the top). Support the board so that it is level with a non-conductive object. Remove all cables going to the 20-622 except for the power and the 40 pin ribbon cable between the PC147.
  3. Connect a DVM between pins A and C on the J3 COND & OBJ Steering connector on the back of the 20-622.
  4. Turn on the 20-622 and in AugerMap set the Beam voltage to 10kV and also set the COND X steering to 50% (mid-range).
  5. Adjust R 27 on the lens control board for zero volts on the DVM.
  6. Set the COND X steering to 100% and adjust R 25 for 205.0 volts DC.
  7. Connect the DVM between pins B & D on J3.
  8. Set the COND Y steering to 50% and adjust R 23 for zero volts.
  9. Set the COND Y steering to 100% and adjust R 22 for 205.0 volts DC.
  10. Connect the DVM between pins E & G on J3.
  11. Set the OBJ X steering to 50% and adjust R 36 for zero volts.
  12. Set the OBJ X steering to 100% and adjust R 35 for 205.0 volts DC.
  13. Connect the DVM between pins F and H on J3.
  14. Set the OBJ Y steering to 50% and adjust R 34 for zero volts.
  15. Set the OBJ Y steering to 100% and adjust R33 for 205.0 volts DC.
  16. Set the COND X, COND Y, OBJ X and OBJ Y steering to 50%.
  17. Set the Beam Voltage to 3kV.
  18. Check each pin again with respect to the chassis. They should all be zero volts with-in 50 mV DC and be stable. If they are not stable, the 7541 Dacs or 208H opamps on the error control board are usually the problem.

Calibration Complete.

Cond and Obj Steering

20-622 COND and OBJ Steering connector