XPS PM Procedure

5400/5500/5600 System XPS PM procedure Preventive Maintenance Guide

This post lists the common tasks that are completed as part of a preventative maintenance on a PHI 5400/5500/5600 XPS X-ray photo electron spectrometer.

XPS PM Procedure – OPTICS

  1. *Discuss System performance and issues with system operator prior to servicing.
  2. *Inspect system, note base vacuum. Test TSP filaments.
  3. *Make sure that you have all necessary parts for the maintenance. If you are missing anything, order it before proceeding. For maximum efficiency, you will perform vacuum maintenance first as you can inspect and clean the electronics during the system bake out and cool down.
  4. *Prepare to vent the system by shutting down all filaments and voltages to the ion guns, X-ray sources and neutralizer.
  5. *Turn off the DIGIII and Boostivac. Let the system cool for 10 minutes.
  6. *While the system is cooling, prepare a work area for optics maintenance.
  7. *Vent the system (make sure that the turbo pump(s) are on to prevent oil vapors from backfilling during the vent process). After the system is up to air, turn off the turbo pump(s).
  8. *Remove the X-ray source(s) from the chamber and inspect the filaments, window, football ceramic and anode. Replace parts as needed.
  9. *Remove the ionizer from the Ion gun and inspect the ionizer. Replace if needed.
  10. *Remove the Ion Gauge and inspect the filaments. Replace if needed.
  11. *Replace TSP filaments as needed.
  12. * If the 04-085/090 Neutralizer filament needs to be replaced, remove the neutralizer and replace the filament. It should be replaced every 4 years of normal usage.
  13. *If channel plates or electron multiplier needs to be replaced, remove the 6″ flange on the SCA and replace the multiplier. This typically is replaced every 3 to 5 years depending on usage.
  14. *Pump down the system.
  15. *Start the ion pumps.
  16. *Prepare the system for bake out – NOTE: Remove the microscope by unscrewing the locking screw. Do not remove the lower portion to make it easier to re-align the microscope after the bake out.
  17. *Once the system reaches at least the mid 10-7 Torr range, then the system can be baked for 12 to 24 hours.




  1. *Make sure the card rack power is off and visually inspect all electronic cards and units.
  2. *Clean all edge connectors with alcohol and q tips (not an eraser).
  3. *Replace as needed any marginal capacitors, resistors or transistors.
  4. *Replace all neon bulbs.
  5. *Replace CM85 bulbs in EMU unit as needed. Note that if the Vacuum Console bulb needs to be replaced that the entire system needs to be shut down first.
  6. *Clean electronic card rack filters.


System Outgas Procedure

  1. *With the card rack power off and all electronic units off as well (except for the ion pumps, DIGIII and turbo pumps), re-connect all system cables.
  2. *Reconnect the microscope.
  3. *Load the slotted silver sample into the system.
  4. *Turn on the card rack power and the power to the Ion gun control and X-ray source control.
  5. *Load AugerScan software.
  6. *Turn on the ion gun control and outgas the filament slowly to 25mA and 2 to 3kV. Do not sputter the slotted silver sample at this time.
  7. *Out gas the X-ray source filaments and condition the anodes to 16.5kV slowly.
  8. *Lightly sputter the slotted silver sample.
  9. *Find the focal point of the SCA using the slotted silver sample and align the microscope to that point.
  10. *Load a piece of Cu and AU side by side an calibrate the XPS linearity.





Calibration sequence:

  1. *Calibrate Small Spot on Slotted Silver Sample
  2. Calibrate Au and Cu peak linearity:
    • * Pass Energy Tracking
    • * Au 84.0
    • * Cu 932.67
  3. *Align ion gun to focal point. – Load a piece of TaO5 with an X scribed into it. Put the X at the focal point of the microscope and then burn a hole into the TaO5 with no raster. Adjust the ion source as needed to center the sputter crater in the middle of the X.



Refer to the counts/resolution Specifications for the specific system type that you are testing. In general, if the resolution spec (less than .8eV FWHM on clean silver) can be met then the system will be performing properly in all pass energies.

RBD TechSpot has procedures for all of the above tasks. Simply search for the keyword in the search box at the top of this bog.  For example – XPS alignment