RBD TechSpot

A blog on the repair, operation and calibration of surface analysis systems and components including electron spectrometers, sputter ion guns and vacuum related hardware. Click on the Index tab below to see a list of all posts. Visit our website at http://www.rbdinstruments.com

Balzers Pfeiffer Turbo pump compatibility chart

Posted on May 6, 2025 by Randy

This Balzers / Pfeiffer Turbo pump and controller compatibility chart was given to me by Dick Hagen of HSD Engineering about 25 years ago. It comes in handy when you are scrounging for turbo pumps or controllers on Ebay.

RBD TechSpot

A blog on the repair, operation and calibration of surface analysis systems and components including electron spectrometers, sputter ion guns and vacuum related hardware. Click on the Index tab below to see a list of all posts. Visit our website at http://www.rbdinstruments.com

Balzers Pfeiffer Turbo pump compatibility chart

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