Category Archives: Operation and Calibration Procedures

Operation and calibration procedures for PHI (Physical Electronics) components

Planned power outage procedures for scanning Auger

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This planned power outage procedure is written for a Physical Electronics (PHI) 600 scanning Auger system, but it applies to all older PHI systems including the 5000 series X-ray photoelectron spectrometers.

At many companies and universities the facilities departments occasionally have planned power outages for maintenance purposes. The following procedures detail the steps that you need to take to safely shut down and then power up your PHI Auger, XPS or SIMS surface analysis system.

Shutdown procedure

Vacuum Console:

  1. Make sure that all valves are closed on the auto valve control remote.
  2. If necessary, use the manual valve control buttons on the AVC to close any open valves.
  3. Check that the auto valve control auto/manual switch is in the auto setting.
  4. Turn off the turbo pump(s) and mechanical pump(s)
  5. Turn off the auto valve control power.
  6. Make sure that the leak valve on the ion gun is closed (fully CW, do not over tighten)

Electronic Console:

  1. Turn off the electron gun units – 20-610, RBD110
  2. Turn off the analyzer units – 32-150, 32-100
  3. Turn off the 11-065 ion gun control
  4. Shutdown the PC and monitor
  5. Turn off the RBD147 PC interface unit
  6. Turn off the DIGIII ion gauge control
  7. Turn off the Boostivac ion pump control
  8. Turn off the main and interlock circuit breakers on the 18-030 power interlock

660 Scanning Auger and 5000 series XPS shutdown:

  1. Turn off units on vacuum console as per the above procedure
  2. On the electronics console, turn off the card rack power
  3. Turn off the PC and RBD147 PC interface unit
  4. Turn off the 11-065 ion gun control
  5. If an XPS system, turn off the x-ray source control and the HV power supply
  6. Turn off the DIGIII ion gauge control
  7. Turn off the Boostivac ion pump control
  8. On the EMO (emergency off) box, press the RED shutdown button

 

Power up procedure

Vacuum Console:

  1. Turn ON the auto valve control power
  2. Make sure that all valves on the AVC remote show red for closed
  3. Turn on the turbo pump(s) and rough pump(s)

Electronic Console:

  1. Turn ON the main and interlock circuit breakers on the 18-030 power interlock
  2. Turn the Boostivac ion pump meter to 10kV
  3. Turn the Boostivac power to Start and check that the high voltage comes up to 5kV or more. If the voltage does not come up the system may be partially up to air. If the high voltage does come up, set the Boostivac power switch to Run
  4. Turn on the DIGIII ion gauge control by setting the power switch to UHV, then press I/T3 to start the ion gauge. Normally the reading will be in the low 10-9 Torr range or lower.
  5. After 10 to 30 seconds the interlocked power on the 18-030 should turn on.
  6. The system is now under vacuum.  The rest of the units will be turned on by the operator of the system the next time the system is used.

660 Scanning Auger and 5000 series XPS power up:

  1. On the EMO box, press the yellow reset button
  2. On the EMO box, press the Vacuum console and Electronics console buttons.
  3. Turn ON units on vacuum console as per the above procedure
  4. Turn the Boostivac power to Start and check that the high voltage comes up to 5kV or more. If the voltage does not come up the system may be partially up to air. If the high voltage does come up, set the Boostivac power switch to Run
  5. Turn on the DIGIII ion gauge control by setting the power switch to UHV, then press I/T3 to start the ion gauge. Normally the reading will be in the low 10-9 Torr range or lower
  6. The system is now under vacuum. The rest of the units will be turned on by the operator of the system the next time the system is used

Additional Information:

Sometimes the Boostivac high voltage meter does not read properly. If it does not indicate 5kV when turned to Start, you can set it to Run and if the Boostivac does not shut off in a few seconds, then the meter circuit is defective and the high voltage is probably working properly. If the Boostivac shuts down after a few seconds when set to run, then the system probably leaked up to air and needs to be pumped down.

scanning-auger-electronic-console

scanning-auger-electronic-console

32-100 electron multiplier supply digital mode

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The model 32-100 electron multiplier supply is used on older Physical Electronics Auger electron spectroscopy and X-ray photoelectron spectroscopy surface analysis systems to control the electron multiplier voltage.

When using the 32-100 electron multiplier supply in the digital mode (the software automatically sets the electron multiplier voltage)  the auto-ems box in the Auger Scan software AES electron multiplier properties dialog box needs to be checked, and the CMA multiplier switch on the front panel of the 32-100 must be set to digital.

But what if the 32-100 still does not work in the digital mode?  In that case, there may be a problem with one of the digital ICs.  The following procedure explains how to try and repair this problem.

  1. Turn off the 32-100 and remove the cover.
  2. Most 32-100s have three ICs for the SED digital side of the control which are not used. You can move those ICs over to the CMA side of the control and see if that solves the problem.
  3. Remove ICs U2, U4 and U6. These are the CMA digital ICs. Then, move over U3, U5 and U7 from the SED side if those chips are available. If they are missing, then you will need to order some of those ICs from Digikey, Newark or RBD Instruments. U2 and U4 are 74LS174s and U6 is an AD7521.
  4. If you did have those ICs and that did not solve the problem, then it most likely means that one of the encoder circuit ICs are defective. Those are U16 (74123) and U1 (AM25LS2538). RBD Instruments provides these parts.
  5. You do not need to replace the SED digital ICs as they are not used.

It is assumed that the 32-100 is working in the analog mode. If the 32-100 is not working in the analog mode it will not work in the digital mode either.

Refer to the pictures below for the locations of the ICs on the 32-100 motherboard.

Note that the switch positions need to be set as shown below.

 

32100-switch-positions

32100-switch-positions

 

If you need further help troubleshooting your 32-100 electron multiplier supply please contact RBD Instruments dot com

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How to test a 97 SED preamplifier

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Older PHI scanning auger systems use the model 97 SED preamplifier to obtain secondary electron images. Occasionally you will not be able to get a TV image on your scanning auger system but are not sure what the problem is. This post will explain how to test the 97 SED preamplifier to determine if it is working properly or not.

For purposes of this test, we will run the J3 video output from the 97 SED preamplifier directly to the TV monitor video input. If you have a 660 or 4300 scanning auger system where the image is displayed directly on the PC monitor you can leave the J3 cable connected.

  1. Turn off the 32-100 electron multiplier supply main power. For 660 and 4300 systems, turn off the card rack power.
  2. Disconnect the J1 NEG and J2 POS cables from the 97 SED preamplifier. That will remove the high voltage from the preamplifier and ensure that there is no risk if electrical shock.
  3. Carefully remove the 97 SED preamplifier from the SED feedthrough flange. Hold the 97 SED preamplifier firmly when loosening the screws and lift the preamplifier straight up and off of the SED flange so that you do not risk breaking the ceramic feedthroughs on the SED flange.
  4. Remove the J3 video out cable and connect a BNC cable from J3 video out on the 97 SED preamplifier to the Video In on the back of the TV monitor. If you have a 660 or 4300 scanning auger system, disregard this step.
  5. Note the position of the COL tab on the 97 SED preamplifier as shown in the pictures below.
  6. Turn on the 32-100 electron multiplier supply or card rack power supply.
  7. Make sure that the 32-100 SED voltage is turned to OFF and the SED voltage knob is fully CCW. On 660 or 4300 systems, after going through the turn on sequence set the SED voltage to Zero in the scanning dialog box.
  8. Use a wire or screwdriver and “tickle” the COL tab on the 97 SED preamplifier.
  9. When tickling the 97 SED COL tab you should see a significant amount of noise on the TV monitor. If so, then the 97 SED preamplifier is working properly. There could be contrast or gain issues with the preamplifier that may not show up with this test, but essentially you can rule out the 97 SED preamplifier as the reason that you are not getting a TV image.

 

Additional information:

On 660 and 4300 systems this test may be inconclusive as the 79-170 or 81-175 scanning electronics may have a problem on the video board.  If you do not see noise in the TV dialog box when performing this test then you can monitor the J3 video output on the 97 SED preamplifier and except to see what appears as high frequency noise in the range of 0 to +2V DC when the 97 SED preamplifier COL lead is being tickled.

If the 97 SED preamplifier test passes but you are not getting a TV image there are a few other possibilities.

  1. No TV raster. An easy way to test that is to acquire an elastic peak in the point mode and then turn on the TV with a low magnification. The elastic peak should become jagged if the TV raster is working properly. You can also use an oscilloscope and measure the waveforms on the end of the CMA deflection cable.
  2. No SED voltage. You can use a high voltage probe and measure the voltage between the NEG and POS cables that connect to the 97 SED preamplifier.  CAUTION – high voltage is present! Refer this test to qualified personnel who are trained to work with high voltage. 
  3. A defective or worn out electron multiplier. If you have a megohmmeter that can measure over 100 Meg ohms (many meters can only measure resistance to 20 Meg ohms) you can measure the resistance between the NEG and POS feedthrough on the SED flange. Typical resistance for a good electron multiplier is 80 to 120 Meg ohms.  If the resistance is 150 Meg ohms or higher the electron multiplier should be replaced.
  4. Use care when remounting the 97 SED preamplifier to the SED flange as the SED feedthroughs can be easily broken. Make sure the 32-100 or card rack power supply is OFF when reinstalling the 97 SED preamplifier or cables.

RBD Instruments provides repair services and loaners for the 97 SED preamplifier, and we also provide the electron multipliers. If you need help diagnosing problems your system or parts, please visit our website at rbdinstruments dot com.

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