80-365 analyzer control notes

Posted on October 18, 2021 by Randy

This blog post is a compilation of notes which are helpful when troubleshooting or calibrating the 80-365 (and 80-366) SCA analyzer control.

The 80-365 SCA analyzer control provides all of the voltages to the SCA (spherical capacitive analyzer) used on older PHI XPS (X-ray photoelectron spectroscopy) systems. Those include the retard voltage, the pass energy, the lens voltages and the electron multiplier voltage.

To troubleshoot or calibrate the 80-365, follow the calibration procedure in the 80-365 manual. Note that high voltages are present on the 80-365 boards, always refer these types of measurements to technicians who have been properly trained in working with high voltage!

If are unable to repair the 80-365 yourself, please contact RBD Instruments and we can repair the boards for you.

80-365/66 Lens Board DAC bit test

To test individual bits: Write out on DR11 A CSR 1

Note: Write the low order byte out first, then the high order byte. If you get out of sequence you need to turn off the card rack power to reset the board and start over.

Lens 2

Measure from the left side of R62 to the right side of R94/G4

Bit	Low byte	High byte	DAC voltage
0	1600	1600	0.0000
1	1602	1600	0.0012
2	1604	1600	0.0024
3	1606	1600	0.0049
4	1610	1600	0.0098
5	1620	1600	0.0195
6	1640	1600	0.0391
7	1680	1600	0.0781
8	1600	1601	0.1563
9	1600	1602	0.3125
10	1600	1604	0.6250
11	1600	1608	1.250
12	1600	1610	2.500
13	1600	1620	5.00
14	16FF	163F	10.00

Lens 3

Measure from the right side of R70 to the right side of R94/G4

Bit	Low byte	High byte	DAC voltage
0	1800	1800	0.0000
1	1802	1800	0.0012
2	1804	1800	0.0024
3	1806	1800	0.0049
4	1810	1800	0.0098
5	1820	1800	0.0195
6	1840	1800	0.0391
7	1880	1800	0.0781
8	1800	1801	0.1563
9	1800	1802	0.3125
10	1800	1804	0.6250
11	1800	1808	1.250
12	1800	1810	2.500
13	1800	1820	5.00
14	18FF	183F	10.00

80-365 Lens board calibration notes

For XPS and AES, the output voltages are positive, and the fine supplies are negative. Make sure that you set the polarity before programming on dual polarity boards.

1310 is + polarity for L3

1320 is + polarity for L2

Common data values

L2 Output C53/G5 Fine Supply – lead ground side R143 + lead right side R142/G5

1801,1800 – Adjust R45/A3 for -20V on fine supply

1800, 1808 – Adjust R77/B4 for – 20V on fine supply Adjust R67/G3 for +409.6V on C53

18D4, 1830 – Adjust R67/G3 for +2500.0 V on C 53 output. Readjust R77/B4 for -20V on fine supply

1800, 1800 – zero

L3 Output C41/E5 Fine supply – lead ground side R127/E5 + lead left side R120/E5

1601, 1600 – Adjust R52/C3 for -20V on fine supply

1600,1608 – Adjust R87/D4 for–20V on fine supply Adjust R59/E3 for +409.6V on C41

16D4, 1630 – Adjust R59/E3 for +2500.0V on C 41 output. Readjust R87/D4 for -20V on fine supply

1600,1600 – Zero

NOTE: If you have issues with the +5V supply dropping and voltages not loading properly, look at the local power supply board. You may need to replace the 3524 regulator on the local power supply board.

80-365/66 Pass Energy board DAC bit test

To test individual bits:

Pass energy range = is 0 to 10V on the DAC = 1920 or 2145 depending on the model number of your analyzer control.

Write out on DR11 A CSR 1

Note: Write the low order byte out first, then the high order byte. If you get out of sequence you need to turn off the card rack power to reset the board and start over.

To set the DAC back to zero between bits, write out 1a00 twice

The following table shows the voltage on the DAC measured from TP24 / C2 to TP24B /C2

0000 0000 0000 0001

bit 0

0.022 V

1a01, 1a00 = .0001525 V on the DAC

0000 00000000 0010

bit 1

.044 V

1a02, 1a00 = .0003052 V on DAC

00000 0000 000 0100

bit 2

.088 V

1a04, 1a00 = .000 6V on DAC

0000 0000 0000 1000

bit 3

.019 V

1a08, 1a00 = .00122 V on DAC

0000 0000 0001 0000

bit 4

0.35 V

1a10, 1a00 = .00244 V on DAC

0000 0000 0010 0000

bit 5

0.7 V

1a20, 1a00 =.00488 V on DAC

0000 0000 0100 0000

bit 6

1.4 V

1a40, 1a00 = .0097 V on DAC

0000 0000 1000 0000

bit 7

2.8 V

1a80, 1a00 =.019 V on DAC

0000 0001 0000 0000

bit 8

5.63 V

1a00, 1a01 =.039 V on DAC

0000 0010 0000 0000

bit 9

11.25 V

1a00 ,1a02 = .078 V on DAC

0000 0100 0000 0000

bit 10

22.5 V

1a00 ,1a04 = .156 V on DAC

0000 1000 0000 0000

bit 11

45 V

1a00 ,1a08 = .3125 V on DAC

0001 0000 0000 0000

bit 12

90.02 V

1a00 ,1a10 = .625 V on DAC

0010 0000 0000 0000

bit 13

180.03 V

1a00,1a20 =1.25 V on DAC

0100 0000 0000 0000

bit 14

360.06 V

1a00 ,1a40 = 2.5 V on DAC

1000 0000 0000 0000

bit 15

720.13 V

1a00 ,1a80 = 5.0 V on DAC

All Bits:

1A00, ,1aFF = 10 V on DAC

1920 or 2145 VDC on the output across C56

80-365 / 366 Pass energy board range note

The 80-365 and 80-366 pass energies have different maximums.

The 80-365 is 1920V

The 80-366 is 2145V

Make sure that you have the correct procedure when you calibrate the board.

Measuring the Pass Energy output voltages

There are some scale factors involved when measuring the pass energy voltages.

If you are measuring the pass energy voltage across C56 on the pass energy board, the scale factor is approximately X 1.34. For example, if you set the pass energy to 187.85, the output voltage across C56 is 187.85 X 1.34 = 251.8 VDC. You can calculate any pass energy actual voltage value by multiplying the pass energy in the software (set up an alignment or survey) by 1.34.

If you are measuring the test points in the filter box, the scale factor is to divide by 1.7. For example, a pass energy of 187.5 divided by 1.7 = 110.3 VDC. If you set up the pass energy to 187.5 in the software, you will see approximately 110.3 VDC between the IC and OC test points in the filter box. The resistors in the filter box divide the voltages so that they are correct on the IC, OC and MR contacts in the analyzer.

To summarize –

C56 output on pass energy board = Pass Energy X 1.34

Test points in filter box = Pass Energy divided by 1.7

80-365 Local Power supply board notes

Capacitor	Voltage	Comments
C33	22V +/1 1.5V adjust R27	Transformer output before regulator
C35	+15	Pass energy board power
C36	-15	Pass energy board power
C34	+5V	Pass energy board power

C9	22V +/1 1.5V adjust R3	Transformer output before regulator
C10	+15	Lens board power
C7	-15V	Lens board power
C12	+5V	Lens board power

CR35 cathode to CR36 anode	+225V	Pass energy board power
CR 37 anode to CR36 anode	-225V	Pass energy board power

CR17 cathode to CR17 anode	+150V
CR18 anode to CR17 anode	-150

TIP: If the voltages are low when the pass energy or lens boards are installed, most likely the issue is a weak 3524 regulator. Replace it with a new SG3524N

80-365 Retard supply bytes

bit	low byte (hex)	hi byte (hex)	DAC V
0	1100	1200	0
1	1101	1200	0.00015259
2	1102	1200	0.00030518
3	1104	1200	0.00061035
4	1108	1200	0.0012207
5	1110	1200	0.00244141
6	1120	1200	0.00488281
7	1140	1200	0.00976563
8	1180	1200	0.01953125
9	1100	1201	0.0390625
10	1100	1202	0.078125
11	1100	1204	0.15625
12	1100	1208	0.3125
13	1100	1210	0.625
14	1100	1220	1.25
15	1100	1240	2.5
16	1100	1280	5
All	11FF	12FF	10

80-365 Lens Board Single Polarity modification

The dual polarity lens board high voltage switching relays can breakdown at voltages above 1kV and cause a variety of intermittent problems. Since most systems do not use the negative polarity, removing the high voltage switching relays and converting the lens board to a the single (positive) polarity can solve the breakdown problem and make the board more reliable.

Modification Procedure:

Remove the red cover (3 screws) that shields the high voltage components.
Unsolder and remove the two Kilovac high voltage relays (K1, K2)
Jumper the relays as shown in the pictures below.

Solder a jumper on the back of the board on IC 22 between pins 2 and 3.
Solder a jumper on the back of the board on IC 21 pins 6 and 7.

Remove ICs U13, U21 and U22 (Note that some boards do not have sockets in which case you need to un-solder the ICs before putting the jumper in).
Cover the open sockets on U13, U21 and U22 with electrical tape. That will make it easier if the board ever needs to be repaired again as it will indicate that those IC sockets are not used.
Check the Single Polarity box on the upper left-hand side of the board.

You can also remove these components as they are no longer used –

R54 (pot) 1k ohm

R64

R67 (pot) 1k ohm

R65

Q1, Q2 2N3704

Q10, Q10A 2N3725

Testing the fuses on the Card Rack power supply outputs

Posted on May 10, 2021 by Randy

The fuse strip located near the hinge on the OEM supply door routes the +5, +15, and -15 voltages from the OEM supply to the card rack unit motherboards.

Each card rack unit has a dedicated section of fuse strip and specific fuse values.

When troubleshooting problems with card rack units it may be necessary to test the fuses in the fuse strip. With the card rack power OFF you can visually inspect each fuse to see if any of them look like they are blown. You can also use an ohmmeter to measure the resistance of the fuses (typically one ohm or less). In some cases it is helpful to measure the actual voltage on the fuses. It is possible that a fuse that looks good is actually blown. Or the voltage on the fuse may be loading down on the output side.

Since the +5, +15, and -15V OEM supply outputs are floating with respect to ground, you need to reference your meter to the correct place in order to measure the voltage. The card rack power needs to be ON when measuring the voltages on both sides of the fuses. The voltage should be very close to the same value on both sides of the fuses. One side is voltage in, the other side is voltage out to the card rack unit.

The picture below shows the correct OEM supply reference point for the +5V, -15V, and +15V fuses.

For example, to measure the middle section -15V fuse you would need to put your DVM red lead on the left side of the middle fuse, and the black lead of your DVM to the CH3 white wires on the OEM supply. Then also measure the other side of the same fuse. The voltage on both sides of the fuse should be very close (within a few millivolts). Note that you may need to remove the protective plastic cover on the fuses in order to be able to measure the fuses.

There are up to 13 sections on the fuse strip and each section is typically dedicated to a particular card rack unit motherboard. Keep in mind though that the fuse locations are not written in stone and so units on your system may be plugged into other fuse sections. Also, some units are removed when an RBD software upgrade is installed. When in doubt, trace the power cables from the back of the motherboard to the fuse strip.

The fuse values (in Amps) and locations are shown below:

5400 XPS

Section	Unit	Top +5V	Middle -15V	Bottom +15V
1	72-488	10	–	–
2	71-205	5	5	2
3	72-250	3	1	1
4	72-490	10	5	5
5	72-030	1	1	5
6	Not used
7	Not used
8	80-360	5	5	5
9	77-067	2	2	10
10	72-360	1	–	1
11	Terminator	1	–	–
12	Not used
13	Not used

5600 XPS

Section	Unit	Top +5V	Middle -15V	Bottom +15V
1	72-366	1	1	1
2	80-365/366	5	5	5
3	72-030	1	1	5
4	71-205	1	2	1
5	72-488	10	–	–
6	74-500	10	–	–
7	MCD Preamp	1	–	1
8	81-175 or 73-080	10	2	2
9	74-062	10	–	–
10	97 or 72-100	1	2	5
11	73-070 or 73-080	5	2	2
12	73-057	3	3	3
13	72-700	1	1	1

650 / 660 AES

Section	Unit	Top +5V	Middle -15V	Bottom +15V
1	79-170 or 81-175	10	2	2
2	74-062	10	–	–
3	72-150 / 96A	5	5	5
4	74-500 / Term	10	0	0
5	Not used
6	Not used
7	AES 72-100 / Term	3	2	5
8	97 SED / 72-100	1	2	5
9	Not used
10	72-105	1	2	1
11	72-600	2	1	1
12	73-057 / Term	3	3	3
13	77-072	5	2	2

Here is an example: Lets say you want to measure the voltage on the 80-365 fuses on a 5600 XPS system. You would first locate the correct fuse section, in this case that is section 2. The top fuse in section 2 is the +5V supply and so you would measure from the left side of the top fuse in section 2 to the white ground wire on Channel 1 (the big lugs) on the OEM supply. Then you would also check the other side of the same fuse to make sure that you have the same voltage on both sides of the fuse. The middle fuse in section 2 is the – 15V fuse and it is referenced to the white wires on Channel 3 on the OEM supply. Finally, the bottom fuse is the +15V and it is referenced to the white wires on Channel 2 of the OEM supply.

By using the correct reference point you can easily measure the voltages on both sides of the card rack fuses when troubleshooting electronic problems with your older PHI XPS or AES system. As always, refer servicing to qualified personnel. The OEM fuse voltages are considered low voltage. However, most of the card rack units themselves generate high voltages and should be only worked on by technicians with the proper training to work safely with high voltage. If you need help troubleshooting a problem with your XPS or AES system, contact RBD Instruments for assistance.

11-065 Ion Gun Controller Emission Switch Operation

Posted on May 6, 2021 by Randy

The emission scale switch on the 11-065 ion gun control is used to change the scale of the emission to three levels: 100% (X1), 10%(X.1) and 1%(X.01). The effect of changing the emission switch is to reduce the emission current, which in turn reduces the ionization (pressure reading) and ion (target) current proportionally.

Initially, the emission needs to be set to 25mA in the X 1 scale and the leak valve is adjusted to achieve 15 to 25 mpA of pressure.

Adjust Argon to get 15 t0 25 mPa of gas pressure

The graph below shows the target current vs. time and the effect of changing the emission current from X 1 to the X.1 and X.01 scales.

When changing the emission scale switch, the emission reading on the 11-065 front panel meter will not change, but the actual emission current will be reduced by a factor of 10 (X.1 scale ) or 100 (X .01 scale). So for example if the emission is set to 25 and the emission scale switch is changed to X .1, the meter still indicates 25mA but the actual emission is 25mA X .1 = 2.5mA. The pressure display will be reduced by a factor of 10 as well since the number of ions being generated are reduced proportionally to the emission current. Ideally, the target current will also be reduced by to 10% of the X1 value when the emission scale switch is changed to X.1. In the graph above we see that the target current drops from about 4.25uA to .8uA as the emission drops from 25mA to 2.5mA. As expected, the target current drops a factor of 10ish to 70 nA as the emission scale switch is changed to the X .01 position.

The picture below shows that the pressure drops to about 2mPa as the emission scale is changed to X.1

This picture shows the pressure dropping to .2mPa as the emission scale switch is changed to the X.01 position.

The emission scale switch is an easy way to reduce the ion target current by a factor of 10 or 100 in order to achieve lower sputter rates.

Note that Balzers RVG 050 thermovalve controllers cannot be used on older 11-065s in the X .1 or X .01 emission scale positions since they depend on the pressure reading for feedback. Newer 11-065s have a circuit that compensates so that the pressure output is correct at each emission scale setting.

11-065 LAS1515 regulator note.

The +15V LAS1515 regulator that is on the heatsink (second from the front) can be marginal. The symptom is that the emission current is unstable, or it becomes stable after the 11-065 warms up.

The SCC brand of LAS1515 regulators has inconsistencies. When measuring the waveforms between the two pins using the Huntron Tracker, 50% of the LAS1515s presented like a diode, the other 50% presented like a Z. The Z is correct. In addition, even the Z pattern SSC brand LAS1515 regulators did not perform properly. Either the emission instability happened right away, or it would happen once the 11-065 warmed up.

The solution was to replace the SSC brand LAS1515s with the NTE equivalent NTE1916 regulator. That worked fine.

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Category Archives: Operation and Calibration Procedures