This post explains how to align the Physical Electronics 04-303 ion gun typically found on PHI Auger electron spectroscopy and X-ray photoelectron spectroscopy systems. The alignment principles explained here will apply to just about any surface analysis ion source.
First, here is a video that explains all of the alignment methods:
Next, here is a link to a tech tip that explains the theory and operation of the 04-303 ion gun: 04-303 Ion Source Theory and Alignment
Finally, here is the basic operation and alignment taken from the tech tip:
04-303 Ion Gun Operation
1. On the 11-065, set the Emission/Pressure meter switch to Emission. Make sure that the scale switch is in the X1 (times one) position.
2. Press the Diff Pump Ion Gun button on the AVC remote, or manually pump the ion gun.
3. Slowly turn up the Emission knob until you have 25mA of emission current (X1 position).
4. Switch the Emission/Pressure meter switch to Pressure.
5. Slowly open the argon leak valve on the 04-303 ion gun until you have 15 mPa of pressure on the meter. This corresponds to approximately 2 x 10-8 torr when differentially pumped, and 2 x 10-7 torr when not differentially pumped.
You are now ready to sputter. When you turn the ion beam voltage on, the ion gun will be sputtering.
Alignment: Visual Method
This works in both ABS and SED image modes. SED mode is sometimes easier to work with.
1. Insert a SiO2 sample and position it to the focal point of the analyzer. Use 30o to 60o of tilt.
2. Get a low magnification image of the SiO2. Use a low electron beam voltage, such as 1.5kV in order to get the largest possible image size (the lowest possible magnification).
3. Set up the ion gun as discussed above. Set the condenser to 5.00 (the smallest spot size) and the objective to 3.40.
4. Turn on the ion gun beam voltage. If the electron beam current and the ion beam current are approximately the same value, the ion beam spot should be visible on the TV monitor.
5. Mechanically adjust the position of the ion gun (turn the thumb screws) to center the ion beam spot on the TV monitor. Adjust the OBJ for the smallest spot size.
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