10-360 SCA resistance and capacitance tests

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Turn off the card rack power before proceeding.


SCA HV connector-

Remove the large SCA filter box (that has the big black cable going into it) and check for the following resistances –
Pin 1 to 3 = 7.4 Meg ohms
Pin 1 to 2 = 4.5 Meg ohms
Pin 2 to 3 = 2.9 Meg ohms

All SCA HV pins should be open to ground

Remove the POS and NEG filter boxes.
POS to NEG on the SCA should be about 15 meg ohms.

Capacitance tests –
POS to chamber should be about 850 pF (.850 nF)
NEG to chamber should be about 200 pF (.200 nF)
MCD connector
All pins should be about 300 pF (.300 nF) from the pins to the chamber, except for the 4 center pins which should be about 100 pF (.100 nF).
All MCD pins should be open to the chamber

New controller for IG2 sputter ion source package

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The RBD Instrument’s IG2 sputter ion source package is a very simple, low cost sputtering package that is based on the old Physical Electronics 04-161/162 ion source and 20-045 ion source controller. The beam voltage can be varied from 500 volts (lower on request) to 2kV.

There are quite a few of these packages in the field where users do not need anything other than simply sputter cleaning an area off the surface of their specimen. More powerful ion source packages have a variety of performance options and can cost as much as $300K.

Some of the parts needed to build the 32-165 IG2 2 kV ion source controller are no longer available. As a result, we have redesigned the 32-165 and are now providing its replacement, the 32-175. The 32-175 functionality will be the same as the 32-165 with one exception: we have removed the anode monitor feature and replaced it with an emission current meter. The new emission current meter makes it possible for the user to set the amount of filament current needed to obtain the highest possible ion current and to monitor the thermal stability of the ionizer. Just like the 32-165, the new 32-175 will be compatible with the PHI 04-161 and 04-162 ion sources in addition to the RBD 04-165 2 kV ion source.

If you need a low cost sputter ion source visit the RBD Instruments website for more information – RBD Instruments IG2