CasaXPS – Data processing software for XPS

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X-ray Photoelectron Spectroscopy or XPS (also known as ESCA, an abbreviation for Electron Spectroscopy for Chemical Analysis), has become one of the most prevalent surface analysis techniques for the characterization of solid surfaces in vacuum.

XPS systems come with software. Frequently, however, the functionality isn’t sufficient to meet the needs of research scientists who routinely work with XPS spectra. CasaXPS (Computer Aided Surface Analysis for X-ray Photoelectron Spectroscopy) was created to provide the additional functionality that these scientists required.

The surface analysis system companies that currently sell CasaXPS include:


Hiden – SIMS

Kore Technology – SIMS




RBD Instruments –AES, refurbished XPS


VG Scienta/GammaData Scienta – XPS

PHI, Thermo, and JEOL(XPS) do not sell CasaXPS directly. However, many surface scientists who run PHI, Thermo, and JEOL XPS systems use CasaXPS for their XPS data processing. In fact, CasaXPS is so prevalent that Google Scholar identified about 900 papers that cited CasaXPS last year alone! For large companies that have surface analysis systems from multiple manufacturers, CasaXPS is a great way to compare data sets from different instruments. A site license for CasaXPS (whether for a company or a university) is very reasonably priced.

CasaXPS is also a data browser for VAMAS (ISO 14976) Surface Chemical Analysis Standard Data Transfer Format. Spectra presented in this ISO standard can be viewed, processed, and printed or exported as ASCII in products such as Word or Excel. CasaXPS also provides data processing for AES, SIMS, and image files.

For CasaXPS training and support, instruction manuals are available as printed or by this link:

Polymer fitting information is available at this link:

In the U.S. an annual training course on CasaXPS is provided by John Grant’s The 2013 Surface Analysis short course program in Dayton, Ohio, USA will be held at the Crowne Plaza Hotel, 8-12 April 2013.

The first 3 days of the course will be on X-ray Photoelectron Spectroscopy (XPS/ESCA) including Data Processing. It will cover these topics in detail (see the course description Examples of Data Processing will be given throughout the course and will illustrate processing with many different software programs, including PHI Multipak, Thermo Avantage, Service Physics ESCA 2007, QUASES Tougaard, and CasaXPS. This 3-day course is not designed to teach users how to use these software programs, but to illustrate their applications to various aspects of processing XPS/ESCA data. A comprehensive set of notes on XPS/ESCA will be provided for each course participant. Early-bird registrants may also order an optional copy of the 900-page book “Surface Analysis by Auger and X-ray Photoelectron Spectroscopy,” edited by D. Briggs and J.T. Grant, 2003.

The last 2 days of the course will be hands-on training with CasaXPS for the processing of XPS/ESCA data (see the course description A complete 30-day trial copy of CasaXPS and appropriate XPS/ESCA data will be provided to attendees so they can follow the examples on their own laptops. Electronic copies of “An Introduction to XPS and AES” by Neal Fairley and a user manual will be provided as well. Attendees are encouraged to bring their laptops to the course. The software runs in a Microsoft Windows™ environment.

For more information on CasaXPS (and to view a video demonstration) please visit the RBD Instruments website at

CasaXPS dialog box

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