Ion source filament assembly for PHI 04-303 and 06-350

RBD Instruments’ proprietary technique for rebuilding the PHI 04-303 ion gun and 06-350 ion source filament assembly results in more stable sputter rates and longer filament lifetimes than other ionizers. The pictures below are actual 04-303 ion source filament assemblies which show the visible light emitting from the filaments. Note that the 3 post RBD ionizers have a much larger and more uniform hot spot than the 5 post PHI filament. In terms of performance, a more uniform hot spot results in a more uniform beam shape. In addition, even with the additional two unnecessary posts, the PHI filaments will still slightly warp out of position over time. That in turn changes the sputter rate of the ion gun, which can result in inaccurate depth profile data unless you re-calibrate your sputter rate frequently.

In short, the RBD ion source filament assemblies outperform the PHI filaments, last longer, and the cost 75% less than a new ionizer. So the next time your 04-303 or 06-350 ion gun needs a new ion source filament assembly, send it to RBD for a rebuild!  You will save $$ and get the benefits of a longer lifetime ion source filament assembly and more stable sputter rates.

RBD carries exchange ion source filament assemblies so we can send you a rebuilt one and then you return your old one to us after you install the rebuilt ion source filament assembly.

Contact us for more information at RBDinstruments dot com

Leave a Reply

Your email address will not be published. Required fields are marked *

You may use these HTML tags and attributes: <a href="" title=""> <abbr title=""> <acronym title=""> <b> <blockquote cite=""> <cite> <code> <del datetime=""> <em> <i> <q cite=""> <strike> <strong>