Please note: RBD Instruments is closed beginning December 19, 2025, reopening on January 5, 2026, to give our team members time to enjoy the holiday season. Due to this closure, we will not be able to receive any shipments between these dates. If you ship a package to RBD, please make sure that it will not arrive until January 5th or later. Otherwise, there is a chance that UPS or FedEx will return your package as non-deliverable.

PHI Ultra-High Vacuum Parts

UHV parts and consumables for many older PHI / PerkinElmer Auger, XPS, and SIMS systems.

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Gaskets

  • Copper gaskets for 1.33" OD to 10" OD flanges
  • 12.995" Copper wire TNBX gasket
  • XPS 10-360 hemisphere, 10-410/420 monochromator, LS bonnet gaskets
  • 122-0150 rebuild kit for high vacuum apparatus
  • 2.75" Indium Torrvac / Innotec gate valve gasket
  • Viton gate & copper bonnet seal kit
  • Innotec gate valve gasket kit (V1 on older PHI systems)
  • Indium gasket and Viton O-ring torrvac

 

Sample Intro Parts

  • Sample Intro Seal Set (for intros 15-720, 04-725, old-style 04-725)
  • Drive Chain (for intro 15-720)
  • Threaded brass insert (for intro 15-720
  • Sample intro spacer set (for intro 04-725 and old-style 04-725
  • Cu/Be intro switch clip (for intro 04-725)

 

Sample Mounts

  • Model 190 flat (new and refurbished)
  • Model 191 recessed
  • Sample clips Cu/Be

CAMECA

 

Phosphor Screens

  • 0.8" x 0.8" phosphor target, UHV compatible
  • 2.5" x 2.5" phosphor target, UHV compatible

 

Vacuum Chamber Lights

 

Ion Gauges and Filaments

  • Dual tungsten filament (for DIG III)
  • Dual iridium filament set
  • Ion gauges (dual tungsten / iridium)
  • Thermocouple gauge tubes
  • Bayard Alpert glass ionization gauges (thoria coated iridium / twin tungsten)
  • Twin tungsten / iridium Filaments for nude Bayard Alpert gauges
  • An Alcatel Helium leak detector replacement filament

 

Ion Pump Elements and TSPs

  • Ceramic Insulators used with ion pump elements. Ion Pump Rebuild Procedure
  • TSP filaments
  • Ion pump element and strap kit
  • TSP Assembly (with exchange, includes 4 new filaments

 

Sputter Rate Calibration Standards

Part Number Description
SIO2CAL-230-100mRE 230Å SiO2 calibration standards, - 4 inch (100 mm) wafers
SIO2CAL-230-13mRE 230Å SiO2 calibration standards - approximately .5 inch (13 mm) square pieces
SIOCALRE 1000Å SiO2 calibration standards - regular shapes .75 x .5 inch . We use a thermal gas-phase oxidation process that ensures accuracy within a few angstroms. Both sides of the wafer pieces have the oxide. Sold in packs of 2.
TA2O5RE 1000Å Tantalum calibration standards -75 x .50 inch, double sided

 

Miscellaneous Vacuum Parts

  • V1 Gate Valve 600, and 660 (Not recommended for 590 and 560 systems)