the ZCUVE
(Zero Clearence UV Emitter Water Vapor Desorption System)
The ZCUVE represents the most recent advance in water vapor desorption technology. The unique design is scalable from 2.75” to 8” flange sizes with a proportionally higher UV power factor with larger flange sizes.
The ZCUVE was designed to desorb water from large deposition chambers where it is not practicable to have an exposed UV emitter inside the vacuum chamber. Standard off-the-shelf shutters can be used to prevent the ZCUVE from being coated during deposition processes.
This process works best on o-ring (Viton) sealed vacuum chambers that do not have any other way to bake out, and also for smaller sized load-locks.
Datasheet (pdf)
Specifications
| Model Number | Flange Size |
|---|---|
| Z275 | 2.75" / 40 CF |
| Z450 | 4.5" / 63 CF |
| Z600 | 6.0” / 100 CF |
| Z800 | 8.0” / 160 CF |
How it Works
An external assembly houses the UV emitter, which is situated just behind a high UV transmission, ultra-high vacuum window. A mirror on the back side of the emitter further improves the transmission of 185 nm UV radiation through the window and into the vacuum chamber. The ZCUVE housing is backfilled with an inert gas to prevent ozone production within the housing. Finally, the emitter leads are connected via MHV high voltage connectors to the control.
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ZCUVE - Shutter Closed |
ZCUVE - Shutter Open |
For more information please contact us at 541 330 0723 X 304 or email us at technicalsales@rbdinstruments.com
