Calculating the SIMS Relative Sensitivity Factor (RSF)
If you have a SIMS depth profile with at least two regions, you can calculate
the Relative Sensitivity Factor by selecting the SIMS Relative Sensitivity
Factor command from the Data menu.
The SIMS RSF dialog allows you to select which region will be the matrix and
the impurity. You must input the Implant Dose. The Sputter Rate is the rate
recorded for that profile, and the depth is the profile depth (by default, though
you will most likely change this value). Once you have selected your values,
click the Calculate button to display the RSF.
You may use the RSF for any external calculations you do on the data, or you
may wish to calculate the Atomic Density for this profile using AugerScan. To do
so, you will need to create a “.rsf” text file with the various sensitivity factors of interest for this matrix
region. Click here for more information on creating RSF files and calculating the SIMS Atomic
Density.