{"id":345,"date":"2013-02-06T13:10:39","date_gmt":"2013-02-06T21:10:39","guid":{"rendered":"http:\/\/www.rbdinstruments.com\/blog\/?p=345"},"modified":"2014-11-06T09:02:40","modified_gmt":"2014-11-06T17:02:40","slug":"ion-beam-induced-low-energy-electrons","status":"publish","type":"post","link":"https:\/\/www.rbdinstruments.com\/blog\/ion-beam-induced-low-energy-electrons\/","title":{"rendered":"Ion Beam Induced Low Energy Electrons"},"content":{"rendered":"

For the purpose of checking the performance of a surface analysis spectrometer such as a cylindrical mirror analyzer (CMA) or spherical capacitive analyzer (SCA), looking at an ion induced low energy electron peak can be extremely helpful. The peak typically occurs at about 20 to 50 eV and the size if the peak is directly related to both the alignment of the ion beam to the analyzer as well as the amount of ion current.<\/p>\n

Checking XPS Performance<\/strong><\/h1>\n

Set up an alignment for a range of zero to 100 eV kinetic. The eV range in binding energy depends on which anode energy you have selected in the software. See the table below.\u00a0 Most systems use an Al anode, so the energy would be 1480 to 1380 eV (which is about 0 to 100 eV kinetic).<\/p>\n

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  1. Using a blank sample mount, position a sample to the focal point of the analyzer.<\/li>\n
  2. Look under the Hardware Properties Menu for XPS and note the X-ray Anode type.<\/li>\n
  3. Set up an alignment with the following parameters:<\/li>\n<\/ol>\n