{"id":237,"date":"2020-01-25T05:27:29","date_gmt":"2020-01-25T13:27:29","guid":{"rendered":"http:\/\/rbdinstruments.com\/blog\/?p=237"},"modified":"2022-08-30T15:43:11","modified_gmt":"2022-08-30T22:43:11","slug":"auger-electron-spectroscopy-tutorial","status":"publish","type":"post","link":"https:\/\/www.rbdinstruments.com\/blog\/auger-electron-spectroscopy-tutorial\/","title":{"rendered":"Auger Spectroscopy"},"content":{"rendered":"\n<p>Auger Spectroscopy&nbsp;(AES) is a nondestructive and semi-quantitative surface analysis technique that works well for elemental analysis of surfaces on UHV compatible conductive and semi-conductive materials.&nbsp; It is well suited for the analysis of thin films and coatings.<\/p>\n\n\n\n<p>This ultra-high vacuum technique has high surface sensitivity (&lt;100 \u00c5) and a low detection limit.&nbsp;&nbsp;It can detect all elements except hydrogen and helium.<\/p>\n\n\n\n<p>Following are links to a variety of Auger Electron Spectroscopy tutorials which explain in detail the principles of AES, the instrumentation, and the applications:<\/p>\n\n\n\n<p><a href=\"https:\/\/www.wellesley.edu\/sites\/default\/files\/assets\/departments\/chemistry\/files\/2006_auger.pdf\" target=\"_blank\" rel=\"noopener noreferrer\">Wellesley College AES&nbsp; (pdf)<\/a><\/p>\n\n\n\n<p><a href=\"http:\/\/www.cityu.edu.hk\/phy\/appkchu\/ap5301\/Lecture-10-AES.pdf\" target=\"_blank\" rel=\"noopener noreferrer\">Hong Kong City EDU AES (pdf)<\/a><\/p>\n\n\n\n<p><a href=\"https:\/\/www1.udel.edu\/pchem\/C444\/info\/AES_XPS.pdf\" target=\"_blank\" rel=\"noopener noreferrer\">University of Delaware AES (pdf)<\/a><\/p>\n\n\n\n<p><a href=\"http:\/\/www.jhu.edu\/chem\/fairbr\/surfacelab\/aes.html\" target=\"_blank\" rel=\"noopener noreferrer\" class=\"broken_link\">Johns Hopkins University Principles of AES<\/a><\/p>\n\n\n\n<p><a rel=\"noopener noreferrer\" href=\"http:\/\/rbdinstruments.com\/blog\/wp-content\/uploads\/2012\/12\/244308_Auger_Electron_Spectroscopy_Powerpoint.ppt\" target=\"_blank\">Auger_Electron Spectroscopy <\/a>( Power point download)<\/p>\n\n\n\n<p><\/p>\n\n\n\n<p>RBD Instruments&#8217; microCMA is an affordable compact Auger Electron Spectroscopy (AES) cylindrical mirror analyzer package which is small enough to add to existing vacuum chambers.&nbsp;&nbsp;For applications which require elemental information on the top most mono layers of specimens, AES can be the perfect solution. <a href=\"https:\/\/www.rbdinstruments.com\/products\/microcma.html\" target=\"_blank\" rel=\"noreferrer noopener\" aria-label=\" (opens in a new tab)\">More information&#8230;<\/a><\/p>\n\n\n\n<p><a href=\"https:\/\/www.youtube.com\/watch?v=lhCIDSDUga0\" target=\"_blank\" rel=\"noreferrer noopener\" aria-label=\"\ufffc (opens in a new tab)\"><img data-attachment-id=\"3160\" data-permalink=\"https:\/\/www.rbdinstruments.com\/blog\/auger-electron-spectroscopy-tutorial\/microcma\/\" data-orig-file=\"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2020\/01\/microCMA.jpg?fit=500%2C308&amp;ssl=1\" data-orig-size=\"500,308\" data-comments-opened=\"1\" data-image-meta=\"{&quot;aperture&quot;:&quot;0&quot;,&quot;credit&quot;:&quot;&quot;,&quot;camera&quot;:&quot;&quot;,&quot;caption&quot;:&quot;&quot;,&quot;created_timestamp&quot;:&quot;0&quot;,&quot;copyright&quot;:&quot;&quot;,&quot;focal_length&quot;:&quot;0&quot;,&quot;iso&quot;:&quot;0&quot;,&quot;shutter_speed&quot;:&quot;0&quot;,&quot;title&quot;:&quot;&quot;,&quot;orientation&quot;:&quot;0&quot;}\" data-image-title=\"microCMA\" data-image-description=\"&lt;p&gt;RBD Instrument&#8217;s microCMA&lt;\/p&gt;\n\" data-image-caption=\"\" data-medium-file=\"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2020\/01\/microCMA.jpg?fit=300%2C185&amp;ssl=1\" data-large-file=\"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2020\/01\/microCMA.jpg?fit=500%2C308&amp;ssl=1\" decoding=\"async\" loading=\"lazy\" width=\"500\" height=\"308\" class=\"lazy wp-image-3160\" style=\"width: 250px;\" src=\"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/plugins\/jquery-image-lazy-loading\/images\/grey.gif?resize=500%2C308&#038;ssl=1\" data-original=\"https:\/\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2020\/01\/microCMA.jpg\" alt=\"microCMA\" srcset=\"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2020\/01\/microCMA.jpg?w=500&amp;ssl=1 500w, https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2020\/01\/microCMA.jpg?resize=300%2C185&amp;ssl=1 300w, https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2020\/01\/microCMA.jpg?resize=487%2C300&amp;ssl=1 487w\" sizes=\"(max-width: 500px) 100vw, 500px\" data-recalc-dims=\"1\" \/><noscript><img data-attachment-id=\"3160\" data-permalink=\"https:\/\/www.rbdinstruments.com\/blog\/auger-electron-spectroscopy-tutorial\/microcma\/\" data-orig-file=\"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2020\/01\/microCMA.jpg?fit=500%2C308&amp;ssl=1\" data-orig-size=\"500,308\" data-comments-opened=\"1\" data-image-meta=\"{&quot;aperture&quot;:&quot;0&quot;,&quot;credit&quot;:&quot;&quot;,&quot;camera&quot;:&quot;&quot;,&quot;caption&quot;:&quot;&quot;,&quot;created_timestamp&quot;:&quot;0&quot;,&quot;copyright&quot;:&quot;&quot;,&quot;focal_length&quot;:&quot;0&quot;,&quot;iso&quot;:&quot;0&quot;,&quot;shutter_speed&quot;:&quot;0&quot;,&quot;title&quot;:&quot;&quot;,&quot;orientation&quot;:&quot;0&quot;}\" data-image-title=\"microCMA\" data-image-description=\"&lt;p&gt;RBD Instrument&#8217;s microCMA&lt;\/p&gt;\n\" data-image-caption=\"\" data-medium-file=\"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2020\/01\/microCMA.jpg?fit=300%2C185&amp;ssl=1\" data-large-file=\"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2020\/01\/microCMA.jpg?fit=500%2C308&amp;ssl=1\" decoding=\"async\" loading=\"lazy\" width=\"500\" height=\"308\" class=\"wp-image-3160\" style=\"width: 250px;\" src=\"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2020\/01\/microCMA.jpg?resize=500%2C308&#038;ssl=1\" alt=\"microCMA\" srcset=\"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2020\/01\/microCMA.jpg?w=500&amp;ssl=1 500w, https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2020\/01\/microCMA.jpg?resize=300%2C185&amp;ssl=1 300w, https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2020\/01\/microCMA.jpg?resize=487%2C300&amp;ssl=1 487w\" sizes=\"(max-width: 500px) 100vw, 500px\" data-recalc-dims=\"1\" \/><\/noscript><\/a><\/p>\n\n\n\n<p>Click on the above image for a short video demo about the microCMA<\/p>\n","protected":false},"excerpt":{"rendered":"<p>A list of Auger Electron Spectroscopy tutorials <a href=\"https:\/\/www.rbdinstruments.com\/blog\/auger-electron-spectroscopy-tutorial\/\">Continue reading <span class=\"meta-nav\">&rarr;<\/span><\/a><\/p>\n","protected":false},"author":1,"featured_media":3160,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"jetpack_post_was_ever_published":false,"_jetpack_newsletter_access":"","footnotes":"","jetpack_publicize_message":"","jetpack_is_tweetstorm":false,"jetpack_publicize_feature_enabled":true,"jetpack_social_post_already_shared":true,"jetpack_social_options":{"image_generator_settings":{"template":"highway","enabled":false}}},"categories":[164],"tags":[39,18,350],"jetpack_publicize_connections":[],"jetpack_featured_media_url":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2020\/01\/microCMA.jpg?fit=500%2C308&ssl=1","jetpack_shortlink":"https:\/\/wp.me\/p2DEXo-3P","jetpack_sharing_enabled":true,"jetpack_likes_enabled":true,"jetpack-related-posts":[{"id":3027,"url":"https:\/\/www.rbdinstruments.com\/blog\/microcma-length-the-long-and-short-of-it\/","url_meta":{"origin":237,"position":0},"title":"microCMA Length, the Long and Short of It","author":"Randy","date":"October 6, 2020","format":false,"excerpt":"RBD Instruments'' microCMA compact Auger electron spectrometer fits on a standard 2.75\" \/ 70 mm CF flange and the length can be customized as needed.","rel":"","context":"In &quot;microCMA&quot;","block_context":{"text":"microCMA","link":"https:\/\/www.rbdinstruments.com\/blog\/category\/microcma\/"},"img":{"alt_text":"microCMA","src":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2020\/09\/microCMA-long-and-short.jpg?fit=1200%2C667&ssl=1&resize=350%2C200","width":350,"height":200,"srcset":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2020\/09\/microCMA-long-and-short.jpg?fit=1200%2C667&ssl=1&resize=350%2C200 1x, https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2020\/09\/microCMA-long-and-short.jpg?fit=1200%2C667&ssl=1&resize=700%2C400 2x, https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2020\/09\/microCMA-long-and-short.jpg?fit=1200%2C667&ssl=1&resize=1050%2C600 3x"},"classes":[]},{"id":1389,"url":"https:\/\/www.rbdinstruments.com\/blog\/bcf-database-aes\/","url_meta":{"origin":237,"position":1},"title":"BCF Database for AES","author":"Randy","date":"February 23, 2015","format":false,"excerpt":"Version 1.0 of the Backscattering-Correction-Factor Database for Auger Electron Spectroscopy program provided by NIST provides BSFs of homogeneous materials. From the NIST website: This database provides values of backscattering correction factors (BCF) of homogeneous materials for quantitative surface analyses by Auger electron spectroscopy (AES). These BCFs are obtained from Monte\u2026","rel":"","context":"In &quot;Software for Surface Analysis Systems&quot;","block_context":{"text":"Software for Surface Analysis Systems","link":"https:\/\/www.rbdinstruments.com\/blog\/category\/software-for-surface-analysis\/"},"img":{"alt_text":"","src":"","width":0,"height":0},"classes":[]},{"id":54,"url":"https:\/\/www.rbdinstruments.com\/blog\/imaging-on-a-scanning-auger-electron-microprobe\/","url_meta":{"origin":237,"position":2},"title":"Imaging on a PHI scanning auger electron microprobe","author":"Randy","date":"August 20, 2012","format":false,"excerpt":"This topic is something that we still get regular requests for information about. I first wrote this tech tip back in 2004 to summarize the training that we perform when installing a PHI 660 scanning auger electron microprobe.\u00a0 It still comes in handy today, especially in university labs where the\u2026","rel":"","context":"In &quot;Theory&quot;","block_context":{"text":"Theory","link":"https:\/\/www.rbdinstruments.com\/blog\/category\/theory\/"},"img":{"alt_text":"","src":"","width":0,"height":0},"classes":[]},{"id":113,"url":"https:\/\/www.rbdinstruments.com\/blog\/surface-analysis-techniques\/","url_meta":{"origin":237,"position":3},"title":"Resources for Surface Analysis Techniques","author":"Randy","date":"September 18, 2012","format":false,"excerpt":"ASTM International, formerly known as the American Society for Testing and Materials (ASTM), is a fantastic resource for Surface Analysis techniques including Auger Electron spectroscopy, X-ray photoelectron spectroscopy, Secondary ion mass spectroscopy, and Energy-dispersive-ray spectroscopy. Using the search tool on the ASTM website you can easily find standards for anything\u2026","rel":"","context":"In &quot;Theory&quot;","block_context":{"text":"Theory","link":"https:\/\/www.rbdinstruments.com\/blog\/category\/theory\/"},"img":{"alt_text":"","src":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2012\/09\/lab-directory.png?fit=836%2C585&ssl=1&resize=350%2C200","width":350,"height":200,"srcset":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2012\/09\/lab-directory.png?fit=836%2C585&ssl=1&resize=350%2C200 1x, https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2012\/09\/lab-directory.png?fit=836%2C585&ssl=1&resize=700%2C400 2x"},"classes":[]},{"id":2839,"url":"https:\/\/www.rbdinstruments.com\/blog\/putting-together-a-compact-uhv-ultra-high-vacuum-chamber-for-spectroscopy\/","url_meta":{"origin":237,"position":4},"title":"Putting Together a Compact UHV (Ultra-high Vacuum) Chamber for Spectroscopy","author":"Joe Caterinicchio","date":"May 22, 2020","format":false,"excerpt":"Small, inexpensive UHV chambers have been the backbone of many commercial labs and universities for decades. The cost of larger, feature-rich systems has gone up dramatically in recent years, making compact, DIY chambers even more cost-effective for specialized applications and education. RBD has a range of products available to add\u2026","rel":"","context":"In &quot;General Optics and Vacuum&quot;","block_context":{"text":"General Optics and Vacuum","link":"https:\/\/www.rbdinstruments.com\/blog\/category\/general-optics-and-vacuum\/"},"img":{"alt_text":"small vacuum chamber","src":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2020\/05\/chamber-1-bw-cut.png?fit=900%2C1100&ssl=1&resize=350%2C200","width":350,"height":200,"srcset":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2020\/05\/chamber-1-bw-cut.png?fit=900%2C1100&ssl=1&resize=350%2C200 1x, https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2020\/05\/chamber-1-bw-cut.png?fit=900%2C1100&ssl=1&resize=700%2C400 2x"},"classes":[]},{"id":879,"url":"https:\/\/www.rbdinstruments.com\/blog\/32-100-electron-multiplier-supply-digital-mode\/","url_meta":{"origin":237,"position":5},"title":"32-100 electron multiplier supply digital mode","author":"Randy","date":"November 26, 2013","format":false,"excerpt":"The model 32-100 electron multiplier supply is used on older Physical Electronics Auger electron spectroscopy and X-ray photoelectron spectroscopy surface analysis systems to control the electron multiplier voltage. When using the 32-100 electron multiplier supply in the digital mode (the software automatically sets the electron multiplier voltage)\u00a0 the auto-ems box\u2026","rel":"","context":"In &quot;Operation and Calibration Procedures&quot;","block_context":{"text":"Operation and Calibration Procedures","link":"https:\/\/www.rbdinstruments.com\/blog\/category\/operation-and-calibration-procedures\/"},"img":{"alt_text":"32100-switch-positions","src":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2013\/11\/32100-switch-positions.jpg?fit=546%2C564&ssl=1&resize=350%2C200","width":350,"height":200},"classes":[]}],"_links":{"self":[{"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/posts\/237"}],"collection":[{"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/comments?post=237"}],"version-history":[{"count":2,"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/posts\/237\/revisions"}],"predecessor-version":[{"id":3612,"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/posts\/237\/revisions\/3612"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/media\/3160"}],"wp:attachment":[{"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/media?parent=237"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/categories?post=237"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/tags?post=237"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}