{"id":231,"date":"2012-11-29T13:55:06","date_gmt":"2012-11-29T21:55:06","guid":{"rendered":"http:\/\/rbdinstruments.com\/blog\/?p=231"},"modified":"2021-02-22T10:29:47","modified_gmt":"2021-02-22T18:29:47","slug":"how-to-align-the-04-303-ion-gun","status":"publish","type":"post","link":"https:\/\/www.rbdinstruments.com\/blog\/how-to-align-the-04-303-ion-gun\/","title":{"rendered":"How to align the 04-303 ion gun"},"content":{"rendered":"<p>This post explains how to align the Physical Electronics 04-303 ion gun typically found on PHI Auger electron spectroscopy and X-ray photoelectron spectroscopy systems. The alignment principles explained here will apply to just about any surface analysis ion source.<\/p>\n<p>First, here is a video that explains all of the alignment methods:<\/p>\n<p><iframe loading=\"lazy\" src=\"https:\/\/www.youtube.com\/embed\/uKg9GLkXT3s\" width=\"560\" height=\"315\" frameborder=\"0\" allowfullscreen=\"allowfullscreen\"><\/iframe><\/p>\n<p>Next, here is a link to a tech tip that explains the theory and operation of the 04-303 ion gun: <a href=\"http:\/\/rbdinstruments.com\/blog\/wp-content\/uploads\/2012\/11\/04-303-Ion-Source-Theory-and-Alignment.pdf\">04-303 Ion Source Theory and Alignment<\/a><\/p>\n<p>Finally, here is the basic operation and alignment taken from the tech tip:<\/p>\n<p align=\"center\"><strong>04-303 Ion Gun Operation <\/strong><\/p>\n<p><strong><em>Basic Operation: <\/em><\/strong><\/p>\n<p>1. On the 11-065, set the Emission\/Pressure meter switch to Emission. Make sure that the scale switch is in the X1 (times one) position.<\/p>\n<p>2. Press the Diff Pump Ion Gun button on the AVC remote, or manually pump the ion gun.<\/p>\n<p>3. Slowly turn up the Emission knob until you have 25mA of emission current (X1 position).<\/p>\n<p>4. Switch the Emission\/Pressure meter switch to Pressure.<\/p>\n<p>5. Slowly open the argon leak valve on the 04-303 ion gun until you have 15 mPa of pressure on the meter. This corresponds to approximately 2 x 10-8 torr when differentially pumped, and 2 x 10-7 torr when not differentially pumped.<\/p>\n<p>You are now ready to sputter. When you turn the ion beam voltage on, the ion gun will be sputtering.<\/p>\n<p><strong><em>Alignment: Visual Method <\/em><\/strong><\/p>\n<p>This works in both ABS and SED image modes. SED mode is sometimes easier to work with.<\/p>\n<p>1. Insert a SiO2 sample and position it to the focal point of the analyzer. Use 30o to 60o of tilt.<\/p>\n<p>2. Get a low magnification image of the SiO2. Use a low electron beam voltage, such as 1.5kV in order to get the largest possible image size (the lowest possible magnification).<\/p>\n<p>3. Set up the ion gun as discussed above. Set the condenser to 5.00 (the smallest spot size) and the objective to 3.40.<\/p>\n<p>4. Turn on the ion gun beam voltage. If the electron beam current and the ion beam current are approximately the same value, the ion beam spot should be visible on the TV monitor.<\/p>\n<p>5. Mechanically adjust the position of the ion gun (turn the thumb screws) to center the ion beam spot on the TV monitor. Adjust the OBJ for the smallest spot size.<\/p>\n<p>For more information or to order a replacement ionizer for your 04-303 ion gun, visit our website at www dot rbdinstruments dot com<\/p>\n","protected":false},"excerpt":{"rendered":"<p>This post explains how to align the Physical Electronics 04-303 ion gun typically found on PHI Auger electron spectroscopy and X-ray photoelectron spectroscopy systems. The alignment principles explained here will apply to just about any surface analysis ion source. First, &hellip; <a href=\"https:\/\/www.rbdinstruments.com\/blog\/how-to-align-the-04-303-ion-gun\/\">Continue reading <span class=\"meta-nav\">&rarr;<\/span><\/a><\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"jetpack_post_was_ever_published":false,"_jetpack_newsletter_access":"","footnotes":"","jetpack_publicize_message":"","jetpack_is_tweetstorm":false,"jetpack_publicize_feature_enabled":true,"jetpack_social_post_already_shared":true,"jetpack_social_options":{"image_generator_settings":{"template":"highway","enabled":false}}},"categories":[161],"tags":[22,37,38,24,36],"jetpack_publicize_connections":[],"jetpack_featured_media_url":"","jetpack_shortlink":"https:\/\/wp.me\/p2DEXo-3J","jetpack_sharing_enabled":true,"jetpack_likes_enabled":true,"jetpack-related-posts":[{"id":371,"url":"https:\/\/www.rbdinstruments.com\/blog\/faraday-cup-procedure-to-align-ion-beam-current\/","url_meta":{"origin":231,"position":0},"title":"Faraday cup procedure to align ion beam current","author":"Randy","date":"March 11, 2013","format":false,"excerpt":"Using Ta2O5 or SiO2 works well for aligning an ion beam to the focal point of an X-ray photoelectron or scanning Auger electron spectrometer. But, in order to optimize the ion beam focus at larger beam sizes, a Faraday cup is required. The Faraday cup used on many Physical Electronics\/PHI\u2026","rel":"","context":"In &quot;Ion Sources&quot;","block_context":{"text":"Ion Sources","link":"https:\/\/www.rbdinstruments.com\/blog\/category\/ion-sources\/"},"img":{"alt_text":"faraday cup","src":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2013\/03\/faraday-cup-254x300.jpg?resize=350%2C200&ssl=1","width":350,"height":200},"classes":[]},{"id":3769,"url":"https:\/\/www.rbdinstruments.com\/blog\/11-065-filament-current-test\/","url_meta":{"origin":231,"position":1},"title":"11-065 Filament Current Test","author":"Randy","date":"July 7, 2023","format":false,"excerpt":"Procedure to test the filament current on an 11-065 ion gun controller when it is connected to the 04-303 ion gun.","rel":"","context":"In &quot;Ion Sources&quot;","block_context":{"text":"Ion Sources","link":"https:\/\/www.rbdinstruments.com\/blog\/category\/ion-sources\/"},"img":{"alt_text":"11-065 filament current output","src":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2023\/07\/20230707_082047_resized.jpg?fit=1200%2C1200&ssl=1&resize=350%2C200","width":350,"height":200,"srcset":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2023\/07\/20230707_082047_resized.jpg?fit=1200%2C1200&ssl=1&resize=350%2C200 1x, https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2023\/07\/20230707_082047_resized.jpg?fit=1200%2C1200&ssl=1&resize=700%2C400 2x, https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2023\/07\/20230707_082047_resized.jpg?fit=1200%2C1200&ssl=1&resize=1050%2C600 3x"},"classes":[]},{"id":1069,"url":"https:\/\/www.rbdinstruments.com\/blog\/ion-source-filament-assembly-phi-04-303-06-350\/","url_meta":{"origin":231,"position":2},"title":"Ion source filament assembly for PHI 04-303, 06-350 and FIG 5 ion sources","author":"Randy","date":"May 23, 2014","format":false,"excerpt":"RBD Instruments\u2019 proprietary technique for rebuilding the PHI 04-303 ion gun and 06-350 ion source filament assembly results in more stable sputter rates and longer filament lifetimes than other ionizers. The pictures below are actual 04-303 ion source filament assemblies which show the visible light emitting from the filaments. Note\u2026","rel":"","context":"In &quot;Ion Sources&quot;","block_context":{"text":"Ion Sources","link":"https:\/\/www.rbdinstruments.com\/blog\/category\/ion-sources\/"},"img":{"alt_text":"ion-source-filament","src":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2014\/05\/3-post-ionizer.jpg?fit=640%2C480&ssl=1&resize=350%2C200","width":350,"height":200},"classes":[]},{"id":345,"url":"https:\/\/www.rbdinstruments.com\/blog\/ion-beam-induced-low-energy-electrons\/","url_meta":{"origin":231,"position":3},"title":"Ion Beam Induced Low Energy Electrons","author":"Randy","date":"February 6, 2013","format":false,"excerpt":"For the purpose of checking the performance of a surface analysis spectrometer such as a cylindrical mirror analyzer (CMA) or spherical capacitive analyzer (SCA), looking at an ion induced low energy electron peak can be extremely helpful. The peak typically occurs at about 20 to 50 eV and the size\u2026","rel":"","context":"In &quot;Operation and Calibration Procedures&quot;","block_context":{"text":"Operation and Calibration Procedures","link":"https:\/\/www.rbdinstruments.com\/blog\/category\/operation-and-calibration-procedures\/"},"img":{"alt_text":"ion gun noise","src":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2013\/02\/Ion-gun-noise.png?resize=350%2C200&ssl=1","width":350,"height":200},"classes":[]},{"id":100,"url":"https:\/\/www.rbdinstruments.com\/blog\/ionizer-replacement-procedure-video\/","url_meta":{"origin":231,"position":4},"title":"04-303 or 06-350 Ionizer replacement procedure video","author":"Randy","date":"September 13, 2012","format":false,"excerpt":"The procedure to replace the ionizer on a 04-303 or 06-350\u00a0 ion gun is one of those things that once you see it done, you know how to do it. You can expect to replace your ionizer anywhere from once every few years to once every few months, depending on\u2026","rel":"","context":"In &quot;Ion Sources&quot;","block_context":{"text":"Ion Sources","link":"https:\/\/www.rbdinstruments.com\/blog\/category\/ion-sources\/"},"img":{"alt_text":"","src":"https:\/\/i0.wp.com\/rbdinstruments.com\/blog\/wp-content\/uploads\/2012\/09\/04303-feedthrough-pins1-300x225.png?resize=350%2C200","width":350,"height":200},"classes":[]},{"id":1823,"url":"https:\/\/www.rbdinstruments.com\/blog\/longer-lifetime-ionizer\/","url_meta":{"origin":231,"position":5},"title":"Longer lifetime ionizer","author":"Randy","date":"October 10, 2016","format":false,"excerpt":"Longer lifetime ionizer for the 04-303 and 06-350 ion source. As many of you know, RBD Instruments\u2019 04-303 and 06-350 ionizer rebuilds last for an average of 1100 hours of run time. Depending on how much sputtering you do, that can translate into anywhere from 2 months to 3 years\u2026","rel":"","context":"In &quot;Ion Sources&quot;","block_context":{"text":"Ion Sources","link":"https:\/\/www.rbdinstruments.com\/blog\/category\/ion-sources\/"},"img":{"alt_text":"","src":"","width":0,"height":0},"classes":[]}],"_links":{"self":[{"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/posts\/231"}],"collection":[{"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/comments?post=231"}],"version-history":[{"count":2,"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/posts\/231\/revisions"}],"predecessor-version":[{"id":3169,"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/posts\/231\/revisions\/3169"}],"wp:attachment":[{"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/media?parent=231"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/categories?post=231"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/tags?post=231"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}