{"id":1553,"date":"2015-08-12T15:34:40","date_gmt":"2015-08-12T22:34:40","guid":{"rendered":"http:\/\/www.rbdinstruments.com\/blog\/?p=1553"},"modified":"2015-08-12T15:34:40","modified_gmt":"2015-08-12T22:34:40","slug":"xps-pm-procedure","status":"publish","type":"post","link":"https:\/\/www.rbdinstruments.com\/blog\/xps-pm-procedure\/","title":{"rendered":"XPS PM Procedure"},"content":{"rendered":"<h1>5400\/5500\/5600 System XPS PM procedure Preventive Maintenance Guide<\/h1>\n<p>This post lists the common tasks that are completed as part of a preventative maintenance on a PHI 5400\/5500\/5600 XPS X-ray photo electron spectrometer.<\/p>\n<h2>XPS PM Procedure &#8211; OPTICS<\/h2>\n<ol>\n<li>*Discuss System performance and issues with system operator prior to servicing.<\/li>\n<li>*Inspect system, note base vacuum. Test TSP filaments.<\/li>\n<li>*Make sure that you have all necessary parts for the maintenance. If you are missing anything, order it before proceeding. For maximum efficiency, you will perform vacuum maintenance first as you can inspect and clean the electronics during the system bake out and cool down.<\/li>\n<li>*Prepare to vent the system by shutting down all filaments and voltages to the ion guns, X-ray sources and neutralizer.<\/li>\n<li>*Turn off the DIGIII and Boostivac. Let the system cool for 10 minutes.<\/li>\n<li>*While the system is cooling, prepare a work area for optics maintenance.<\/li>\n<li>*Vent the system (make sure that the turbo pump(s) are on to prevent oil vapors from backfilling during the vent process). After the system is up to air, turn off the turbo pump(s).<\/li>\n<li>*Remove the X-ray source(s) from the chamber and inspect the filaments, window, football ceramic and anode. Replace parts as needed.<\/li>\n<li>*Remove the ionizer from the Ion gun and inspect the ionizer. Replace if needed.<\/li>\n<li>*Remove the Ion Gauge and inspect the filaments. Replace if needed.<\/li>\n<li>*Replace TSP filaments as needed.<\/li>\n<li>* If the 04-085\/090 Neutralizer filament needs to be replaced, remove the neutralizer and replace the filament. It should be replaced every 4 years of normal usage.<\/li>\n<li>*If channel plates or electron multiplier needs to be replaced, remove the 6&#8243; flange on the SCA and replace the multiplier. This typically is replaced every 3 to 5 years depending on usage.<\/li>\n<li>*Pump down the system.<\/li>\n<li>*Start the ion pumps.<\/li>\n<li>*Prepare the system for bake out \u2013 <strong>NOTE<\/strong>: Remove the microscope by unscrewing the locking screw. Do not remove the lower portion to make it easier to re-align the microscope after the bake out.<\/li>\n<li>*Once the system reaches at least the mid 10-7 Torr range, then the system can be baked for 12 to 24 hours.<\/li>\n<\/ol>\n<p>&nbsp;<\/p>\n<h2>XPS PM Procedure &#8211; ELECTRONICS<\/h2>\n<p>&nbsp;<\/p>\n<ol>\n<li>*Make sure the card rack power is off and visually inspect all electronic cards and units.<\/li>\n<li>*Clean all edge connectors with alcohol and q tips (not an eraser).<\/li>\n<li>*Replace as needed any marginal capacitors, resistors or transistors.<\/li>\n<li>*Replace all neon bulbs.<\/li>\n<li>*Replace CM85 bulbs in EMU unit as needed. Note that if the Vacuum Console bulb needs to be replaced that the entire system needs to be shut down first.<\/li>\n<li>*Clean electronic card rack filters.<\/li>\n<\/ol>\n<p>&nbsp;<\/p>\n<h2>System Outgas Procedure<\/h2>\n<ol>\n<li>*With the card rack power off and all electronic units off as well (except for the ion pumps, DIGIII and turbo pumps), re-connect all system cables.<\/li>\n<li>*Reconnect the microscope.<\/li>\n<li>*Load the slotted silver sample into the system.<\/li>\n<li>*Turn on the card rack power and the power to the Ion gun control and X-ray source control.<\/li>\n<li>*Load AugerScan software.<\/li>\n<li>*Turn on the ion gun control and outgas the filament slowly to 25mA and 2 to 3kV. Do not sputter the slotted silver sample at this time.<\/li>\n<li>*Out gas the X-ray source filaments and condition the anodes to 16.5kV slowly.<\/li>\n<li>*Lightly sputter the slotted silver sample.<\/li>\n<li>*Find the focal point of the SCA using the slotted silver sample and align the microscope to that point.<\/li>\n<li>*Load a piece of Cu and AU side by side an calibrate the XPS linearity.<\/li>\n<\/ol>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<h2>Calibration<\/h2>\n<p>Calibration sequence:<\/p>\n<ol>\n<li>*Calibrate Small Spot on Slotted Silver Sample<\/li>\n<li>Calibrate Au and Cu peak linearity:\n<ul>\n<li>* Pass Energy Tracking<\/li>\n<li>* Au 84.0<\/li>\n<li>* Cu 932.67<\/li>\n<\/ul>\n<\/li>\n<li>*Align ion gun to focal point. \u2013 Load a piece of TaO5 with an X scribed into it. Put the X at the focal point of the microscope and then burn a hole into the TaO5 with no raster. Adjust the ion source as needed to center the sputter crater in the middle of the X.<\/li>\n<\/ol>\n<p>&nbsp;<\/p>\n<h2>Specifications<\/h2>\n<p>Refer to the counts\/resolution Specifications for the specific system type that you are testing. In general, if the resolution spec (less than .8eV FWHM on clean silver) can be met then the system will be performing properly in all pass energies.<\/p>\n<p>RBD TechSpot has procedures for all of the above tasks. Simply search for the keyword in the search box at the top of this bog.\u00a0 For example &#8211; XPS alignment<\/p>\n","protected":false},"excerpt":{"rendered":"<p>5400\/5500\/5600 System XPS PM procedure Preventive Maintenance Guide This post lists the common tasks that are completed as part of a preventative maintenance on a PHI 5400\/5500\/5600 XPS X-ray photo electron spectrometer. XPS PM Procedure &#8211; OPTICS *Discuss System performance &hellip; <a href=\"https:\/\/www.rbdinstruments.com\/blog\/xps-pm-procedure\/\">Continue reading <span class=\"meta-nav\">&rarr;<\/span><\/a><\/p>\n","protected":false},"author":1,"featured_media":465,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"jetpack_post_was_ever_published":false,"_jetpack_newsletter_access":"","footnotes":"","jetpack_publicize_message":"","jetpack_is_tweetstorm":false,"jetpack_publicize_feature_enabled":true,"jetpack_social_post_already_shared":true,"jetpack_social_options":{"image_generator_settings":{"template":"highway","enabled":false}}},"categories":[162],"tags":[195,32,95],"jetpack_publicize_connections":[],"jetpack_featured_media_url":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2013\/04\/5600-XPS-system-with-monochromator.jpg?fit=500%2C333&ssl=1","jetpack_shortlink":"https:\/\/wp.me\/p2DEXo-p3","jetpack_sharing_enabled":true,"jetpack_likes_enabled":true,"jetpack-related-posts":[{"id":1597,"url":"https:\/\/www.rbdinstruments.com\/blog\/pm-sequence-on-xps-and-aes-systems\/","url_meta":{"origin":1553,"position":0},"title":"PM sequence on XPS and AES systems","author":"Randy","date":"December 6, 2015","format":false,"excerpt":"Performing regular Preventive Maintenance on surface analysis systems such as X-ray Photo Electron spectrometers (XPS) and Auger Electron spectrometers (AES) is a very important step in keeping the systems functioning properly and reliably. But performing the necessary steps in the correct PM sequence will make sure that you maximize the\u2026","rel":"","context":"In &quot;Operation and Calibration Procedures&quot;","block_context":{"text":"Operation and Calibration Procedures","link":"https:\/\/www.rbdinstruments.com\/blog\/category\/operation-and-calibration-procedures\/"},"img":{"alt_text":"electronics console air filters","src":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2012\/11\/GMBH-filters.jpg?fit=704%2C470&ssl=1&resize=350%2C200","width":350,"height":200,"srcset":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2012\/11\/GMBH-filters.jpg?fit=704%2C470&ssl=1&resize=350%2C200 1x, https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2012\/11\/GMBH-filters.jpg?fit=704%2C470&ssl=1&resize=700%2C400 2x"},"classes":[]},{"id":684,"url":"https:\/\/www.rbdinstruments.com\/blog\/xps-analyzer-focal-point\/","url_meta":{"origin":1553,"position":1},"title":"XPS analyzer focal point","author":"Randy","date":"July 16, 2013","format":false,"excerpt":"This post will explain how to find the analyzer focal point on a PHI 5000 series XPS system and then align the system microscope to that point. The general idea is that the lens on the SCA (spherical capacitive analyzer) has a very specific focal point where the highest counts,\u2026","rel":"","context":"In &quot;Operation and Calibration Procedures&quot;","block_context":{"text":"Operation and Calibration Procedures","link":"https:\/\/www.rbdinstruments.com\/blog\/category\/operation-and-calibration-procedures\/"},"img":{"alt_text":"slotted-silver-specimen","src":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2013\/07\/slotted-silver-specimen-mounted-on-recessed-sample-mount.jpg?fit=664%2C565&ssl=1&resize=350%2C200","width":350,"height":200},"classes":[]},{"id":4154,"url":"https:\/\/www.rbdinstruments.com\/blog\/contact-issue-with-mcd-ceramic-on-phi-5600-xps-system\/","url_meta":{"origin":1553,"position":2},"title":"Contact issue with MCD ceramic on PHI 5600 XPS system","author":"Randy","date":"January 21, 2025","format":false,"excerpt":"This blog post shows how to repair an open POS connector on a 16 channel MCD anode ceramic used in the MCD detector on PHI 5600 thru 5800 XPS systems.","rel":"","context":"In &quot;General Optics and Vacuum&quot;","block_context":{"text":"General Optics and Vacuum","link":"https:\/\/www.rbdinstruments.com\/blog\/category\/general-optics-and-vacuum\/"},"img":{"alt_text":"","src":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2025\/01\/Missing-gold-on-contact.jpg?fit=1200%2C1004&ssl=1&resize=350%2C200","width":350,"height":200,"srcset":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2025\/01\/Missing-gold-on-contact.jpg?fit=1200%2C1004&ssl=1&resize=350%2C200 1x, https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2025\/01\/Missing-gold-on-contact.jpg?fit=1200%2C1004&ssl=1&resize=700%2C400 2x, https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2025\/01\/Missing-gold-on-contact.jpg?fit=1200%2C1004&ssl=1&resize=1050%2C600 3x"},"classes":[]},{"id":3760,"url":"https:\/\/www.rbdinstruments.com\/blog\/electron-multipliers-for-older-phi-aes-and-xps-systems\/","url_meta":{"origin":1553,"position":3},"title":"Electron multipliers for older PHI AES and XPS systems","author":"Randy","date":"June 15, 2023","format":false,"excerpt":"Part numbers for electron multipliers for older Physical Electronics Auger and X-ray photoelectron analyzers.","rel":"","context":"In &quot;General Optics and Vacuum&quot;","block_context":{"text":"General Optics and Vacuum","link":"https:\/\/www.rbdinstruments.com\/blog\/category\/general-optics-and-vacuum\/"},"img":{"alt_text":"","src":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2023\/06\/image.png?fit=775%2C507&ssl=1&resize=350%2C200","width":350,"height":200,"srcset":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2023\/06\/image.png?fit=775%2C507&ssl=1&resize=350%2C200 1x, https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2023\/06\/image.png?fit=775%2C507&ssl=1&resize=700%2C400 2x"},"classes":[]},{"id":406,"url":"https:\/\/www.rbdinstruments.com\/blog\/bake-out-procedure-to-improve-base-vacuum\/","url_meta":{"origin":1553,"position":4},"title":"PHI 5600 XPS system Bakeout procedure to improve base vacuum","author":"Randy","date":"August 30, 2019","format":"gallery","excerpt":"Updated 8-30-19 This post explains the bakeout procedure to improve base vacuum in a PHI 5600 X-ray photoelectron spectrometer. The procedure is basically the same for most of the older PHI (Physical Electronics) Spherical Capacitive Analyzer XPS surface analysis systems. PHI X-ray photoelectron spectrometers generally have built-in radiant heaters as\u2026","rel":"","context":"In &quot;General Optics and Vacuum&quot;","block_context":{"text":"General Optics and Vacuum","link":"https:\/\/www.rbdinstruments.com\/blog\/category\/general-optics-and-vacuum\/"},"img":{"alt_text":"bakeout blankets on chamber","src":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2013\/04\/bakeout-blankets-on-chamber.jpg?fit=500%2C333&ssl=1&resize=350%2C200","width":350,"height":200},"classes":[]},{"id":1420,"url":"https:\/\/www.rbdinstruments.com\/blog\/5600-xps-analyzer-voltages\/","url_meta":{"origin":1553,"position":5},"title":"5600 XPS analyzer voltages","author":"Randy","date":"April 22, 2015","format":false,"excerpt":"One of the more common questions that we get when a PHI 5500 or 5600 XPS system loses the ability to collect data, is -\u00a0 \"how can we test the analyzer voltages?\"\u00a0\u00a0 This post will explain the procedure in detail. First though, the disclaimers - #1 This procedure involves measuring\u2026","rel":"","context":"In &quot;General Optics and Vacuum&quot;","block_context":{"text":"General Optics and Vacuum","link":"https:\/\/www.rbdinstruments.com\/blog\/category\/general-optics-and-vacuum\/"},"img":{"alt_text":"5600 SCA filter box","src":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2015\/04\/5600-SCA-filter-box.jpg?fit=972%2C648&ssl=1&resize=350%2C200","width":350,"height":200,"srcset":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2015\/04\/5600-SCA-filter-box.jpg?fit=972%2C648&ssl=1&resize=350%2C200 1x, https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2015\/04\/5600-SCA-filter-box.jpg?fit=972%2C648&ssl=1&resize=700%2C400 2x"},"classes":[]}],"_links":{"self":[{"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/posts\/1553"}],"collection":[{"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/comments?post=1553"}],"version-history":[{"count":1,"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/posts\/1553\/revisions"}],"predecessor-version":[{"id":1554,"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/posts\/1553\/revisions\/1554"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/media\/465"}],"wp:attachment":[{"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/media?parent=1553"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/categories?post=1553"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.rbdinstruments.com\/blog\/wp-json\/wp\/v2\/tags?post=1553"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}