{"id":1017,"date":"2014-03-17T18:14:10","date_gmt":"2014-03-18T01:14:10","guid":{"rendered":"http:\/\/www.rbdinstruments.com\/blog\/?p=1017"},"modified":"2014-11-06T09:00:07","modified_gmt":"2014-11-06T17:00:07","slug":"measuring-electron-beam-diameter","status":"publish","type":"post","link":"https:\/\/www.rbdinstruments.com\/blog\/measuring-electron-beam-diameter\/","title":{"rendered":"Measuring electron beam diameter"},"content":{"rendered":"

This procedure will allow you to determine the electron beam diameter diameter on scanning auger electron spectrometers using the line scan feature of AugerMap software and the magnification standard (or, a straight edged sample). Although written for scanning auger electron spectrometer systems, the principle is the same for SEMs – scanning electron microscopes – measure the slope across an edge at a known magnification.<\/p>\n

1. Insert the beam size standard into the system and perform an elastic peak alignment on the top surface of the sample to ensure that the sample is at the correct Z position with respect to the analyzer.\u00a0 Do not tilt the sample.<\/p>\n

\"set-elastic-peak\"

\n
Set elastic peak<\/dd>\n<\/dl>\n

\u00a02. Next, change the beam voltage to 10KV and adjust the electron gun parameters for a good image at 5000X or higher magnification.<\/p>\n

3. if so equipped, adjust the Condenser and Objective steering plates for minimum movement. (If an SEM, rock the lenses).<\/p>\n

4. Ensure that the image is in the best possible focus.<\/p>\n

5. Lower the magnification to the lowest possible setting and move the beam size standard to the center hole to find the grid and adjust the Z position until the grid is in focus.\u00a0 The sample is now at the correct focal point on the analyzer. This is a good trick that you can use on any scanning auger system – if you first set the elastic peak and then the focus, as long as you mechanically bring the sample back into focus after moving to a different location on the sample (and do not change the focus knob or settings in the software), the sample to analyzer distance is still correct.<\/p>\n

6. Set the magnification to 100KX and fine-tune the focus and stigmators as required. The sample can be moved on either the X or Y axis until you are able to line up on one grid line.<\/p>\n

7. Obtain an SED video map and use the quantization feature if necessary.<\/p>\n

8. Select the line scan feature in AugerMap and draw a line horizontally across the grid line.<\/p>\n

9. For AugerMap1, Add region \u2013 SED line.<\/p>\n

10. Select Video input; point one ms per step, number of sweeps one, and resolution 256 points per line. \u00a0\u00a0 For AugerMap II, select SED video map.<\/p>\n

\"auger-map-2-sed-dialog-box\"

 <\/p>\n

 <\/p>\n

 <\/p>\n

 <\/p>\n

 <\/p>\n

\"auger-map-sed-dialog-box\"

 <\/p>\n

 <\/p>\n

 <\/p>\n

 <\/p>\n

 <\/p>\n

 <\/p>\n

 <\/p>\n

 <\/p>\n

 <\/p>\n

 <\/p>\n

 <\/p>\n

11. Acquire the line scan.<\/p>\n

12. After the line scan is completed it will show a display of signal intensity on the Y-axis vs. distance scanned on the X-axis. At 100KX magnification, this distance is 1uM, or, 10,000 angstroms. By determining the slope of the beam diameter as it crosses the edge of the sample, the beam diameter can be determined.<\/p>\n

13. Print out the line scan and use a ruler to determine the top 20% and bottom 20% of the line scan. Draw a line across the top 20% and bottom 20% of the line scan.<\/p>\n

14. Next, draw a line on the slope of the beam diameter as it drops down or up between the 20% lines.<\/p>\n

15. Determine the distance between the slope of the line at the top of the scan and the bottom of the scan.\u00a0 This distance represents the beam diameter in relationship to the full scan (10,000 angstroms at 100KX).<\/p>\n

16. The example below shows in detail how this measurement is calculated.<\/p>\n

\"beam-size-measurement\"

 <\/p>\n

Perform this measurement anytime that you wish to know the size of the electron beam diameter for any given set of conditions.\u00a0 If the beam size is too large to see one grid line, you can reduce the magnification to 50KX, in which case full scale on the X-axis would be equal to 20,000 angstroms.<\/p>\n","protected":false},"excerpt":{"rendered":"

This procedure will allow you to determine the electron beam diameter diameter on scanning auger electron spectrometers using the line scan feature of AugerMap software and the magnification standard (or, a straight edged sample). Although written for scanning auger electron … Continue reading →<\/span><\/a><\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"jetpack_post_was_ever_published":false,"_jetpack_newsletter_access":"","footnotes":"","jetpack_publicize_message":"","jetpack_is_tweetstorm":false,"jetpack_publicize_feature_enabled":true,"jetpack_social_post_already_shared":true,"jetpack_social_options":{"image_generator_settings":{"template":"highway","enabled":false}}},"categories":[162],"tags":[130,81],"jetpack_publicize_connections":[],"jetpack_featured_media_url":"","jetpack_shortlink":"https:\/\/wp.me\/p2DEXo-gp","jetpack_sharing_enabled":true,"jetpack_likes_enabled":true,"jetpack-related-posts":[{"id":1597,"url":"https:\/\/www.rbdinstruments.com\/blog\/pm-sequence-on-xps-and-aes-systems\/","url_meta":{"origin":1017,"position":0},"title":"PM sequence on XPS and AES systems","author":"Randy","date":"December 6, 2015","format":false,"excerpt":"Performing regular Preventive Maintenance on surface analysis systems such as X-ray Photo Electron spectrometers (XPS) and Auger Electron spectrometers (AES) is a very important step in keeping the systems functioning properly and reliably. But performing the necessary steps in the correct PM sequence will make sure that you maximize the\u2026","rel":"","context":"In "Operation and Calibration Procedures"","block_context":{"text":"Operation and Calibration Procedures","link":"https:\/\/www.rbdinstruments.com\/blog\/category\/operation-and-calibration-procedures\/"},"img":{"alt_text":"electronics console air filters","src":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2012\/11\/GMBH-filters.jpg?fit=704%2C470&ssl=1&resize=350%2C200","width":350,"height":200,"srcset":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2012\/11\/GMBH-filters.jpg?fit=704%2C470&ssl=1&resize=350%2C200 1x, https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2012\/11\/GMBH-filters.jpg?fit=704%2C470&ssl=1&resize=700%2C400 2x"},"classes":[]},{"id":345,"url":"https:\/\/www.rbdinstruments.com\/blog\/ion-beam-induced-low-energy-electrons\/","url_meta":{"origin":1017,"position":1},"title":"Ion Beam Induced Low Energy Electrons","author":"Randy","date":"February 6, 2013","format":false,"excerpt":"For the purpose of checking the performance of a surface analysis spectrometer such as a cylindrical mirror analyzer (CMA) or spherical capacitive analyzer (SCA), looking at an ion induced low energy electron peak can be extremely helpful. The peak typically occurs at about 20 to 50 eV and the size\u2026","rel":"","context":"In "Operation and Calibration Procedures"","block_context":{"text":"Operation and Calibration Procedures","link":"https:\/\/www.rbdinstruments.com\/blog\/category\/operation-and-calibration-procedures\/"},"img":{"alt_text":"ion gun noise","src":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2013\/02\/Ion-gun-noise.png?resize=350%2C200&ssl=1","width":350,"height":200},"classes":[]},{"id":3106,"url":"https:\/\/www.rbdinstruments.com\/blog\/cmapp-new-features\/","url_meta":{"origin":1017,"position":2},"title":"CMapp New Features","author":"Randy","date":"January 26, 2021","format":false,"excerpt":"A list of new features in CMapp, the RBD Instruments' microCMA data acquisition and data massage software.","rel":"","context":"In "microCMA"","block_context":{"text":"microCMA","link":"https:\/\/www.rbdinstruments.com\/blog\/category\/microcma\/"},"img":{"alt_text":"estimate target current","src":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2021\/01\/target-current-9103-or-estimate.jpg?fit=364%2C566&ssl=1&resize=350%2C200","width":350,"height":200},"classes":[]},{"id":371,"url":"https:\/\/www.rbdinstruments.com\/blog\/faraday-cup-procedure-to-align-ion-beam-current\/","url_meta":{"origin":1017,"position":3},"title":"Faraday cup procedure to align ion beam current","author":"Randy","date":"March 11, 2013","format":false,"excerpt":"Using Ta2O5 or SiO2 works well for aligning an ion beam to the focal point of an X-ray photoelectron or scanning Auger electron spectrometer. But, in order to optimize the ion beam focus at larger beam sizes, a Faraday cup is required. The Faraday cup used on many Physical Electronics\/PHI\u2026","rel":"","context":"In "Ion Sources"","block_context":{"text":"Ion Sources","link":"https:\/\/www.rbdinstruments.com\/blog\/category\/ion-sources\/"},"img":{"alt_text":"faraday cup","src":"https:\/\/i0.wp.com\/www.rbdinstruments.com\/blog\/wp-content\/uploads\/2013\/03\/faraday-cup-254x300.jpg?resize=350%2C200&ssl=1","width":350,"height":200},"classes":[]},{"id":54,"url":"https:\/\/www.rbdinstruments.com\/blog\/imaging-on-a-scanning-auger-electron-microprobe\/","url_meta":{"origin":1017,"position":4},"title":"Imaging on a PHI scanning auger electron microprobe","author":"Randy","date":"August 20, 2012","format":false,"excerpt":"This topic is something that we still get regular requests for information about. 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