Ultra High-Vacuum (UHV) Equipment Replacement Parts


RBD Instruments provides replacement parts and consumables for most PHI / Physical Electronics X-ray photoelectron and Auger spectrometer vacuum equipment at great prices.


More information...
or call us at 541 550 5016

 


 

Gaskets

Ion Gauges and Filaments

Ion Pump Elements and TSPs

Phosphor Screens

Sample Intro Parts

Sample Mounts

Solenoid Valves

Sputter rate Standards

Miscellaneous Vacuum Parts


Gaskets


Model Description RBD Part #
268-0750 Copper Gasket for 1.33 OD mini CF Flange, Pack of 10
(Use part# 133ODGRE for singles)
133ODGPKRE
268-1500 Copper Gasket for 2-3/4" OD flange, Pack of 10
(Use part# 275ODGRE for singles)
275ODGPKRE
603700 Copper Gasket for Large ID 2-3/4" OD flange, Pack of 10
This gasket is used for improved X-Y range of motion for ion sources and X-ray sources.
(Use part# 275XLIDGRE for singles)
275XLIDGPKRE
268-2000 Copper gasket for 3.375 inch O.D. CF flange
This gasket is used on the sublimator flange on most PHI systems.
3375ODGRE
268-2500 Copper Gasket for 4.5" OD flange, Pack of 10
(Use part# 45ODGRE for singles)
45ODGPKRE
268-4000 Copper Gasket for 6" OD flange, Pack of 10
(Use part# 6ODGRE for singles)
6ODGPKRE
1001986 Copper gasket for 6.75 inch O.D. flange
This flange is used for the SIMSII energy analyzer to quad flange on PHI systems
675ODGRE
268-6000 Copper Gasket for 8" OD flange, Pack of 10
(Use part# 8ODGRE for singles)
8ODGPKRE
268-8000 Copper gasket for 10.00 inch O.D. CF flange 10ODGRE
268-9129 12.995 inch Copper wire TNBX gasket 12995CWGRE
608141 XPS 10-360 Hemisphere Gasket 608141RE
618550 XPS 10-410/420 Monochromator Gasket 618550RE
A041186 XPS LS Bonnet Gasket A041186RE
1ea-V75029RE & V75033RE Rebuild Kit for High Vacuum Apparatus 122-0150 1220150GKRE
IN-GV
Indium gasket
2.75 inch Indium Torrvac / Innotec Gate Valve Gasket
(V1 on older PHI systems
IN-GVRE
11120-0400 Viton Gate & Copper Bonnet Seal Kit KSB40MRE
Innotec Gate Valve Gasket Kit
(V1 on older PHI systems)
Indium gasket o-ring
Indium Gasket and Viton O-ring Torrvac V1VGKitRE

 


Ion Gauges and Filaments


Model Description RBD Part #
6057671 Redesigned dual tungsten filament for DIG III 6057671V2RE
6057671 Dual tungsten filament 6057671RE
6057672
Ion gauge
Ion Gauge with dual Ir filaments 6057672RE
6057673
Ion gauge
Ion Gauge, nude, with dual tungsten filament 6057673RE
6057676 Dual Iridium filament set 6057676RE
DV-6M Thermocouple Gauge Tube for most PHI systems DST06MRE
DV-6M Matching Set: (2) Thermocouple Gauge Tubes for most PHI Systms DST06MSRE
G-75-IR
Ion gauge tube with Thoria Coated Iridium Filament
Bayard Alpert Glass Ionization Gauge 3/4" Diameter Tube with Thoria Coated Iridium Filament.
Also Available in 1.0" Diameter Tube (PN G100IRRE) and Pyrex Tubulation.
G75IRRE
G-75-TT
Ion gauge tube with tungsten filament
Bayard Alpert Glass Ionization Gauge 3/4" Diameter Tube with Twin Tungsten Filaments.
Also Available in 1.0" Diameter Tube (PN G100TTRE) and Pyrex Tubulation.
G75TTRE
G-75-KIR
Bayard Alpert Glass Ionization Gauge with a 3/4" Diameter Kovar Metal Side Tubulation and a Hairpin Thoria Coated Iridium Filament
Bayard Alpert Glass Ionization Gauge with a 3/4" Diameter Kovar Metal Side Tubulation and a Hairpin Thoria Coated Iridium Filament G75KIRRE
G-100-KIR
Bayard Alpert Glass Ionization Gauge with a 1.0 " Diameter Kovar Metal Side Tubulation and a Hairpin Thoria Coated Iridium Filament. Also available with Welded 2.75" CF, ISO NW25 or NW40 Flange (Please call).
Bayard Alpert Glass Ionization Gauge with a 1.0 " Diameter Kovar Metal Side Tubulation and a Hairpin Thoria Coated Iridium Filament. Also available with Welded 2.75" CF, ISO NW25 or NW40 Flange (Please call). G100KIRRE
G-75-KTT
Bayard Alpert Glass Ionization Gauge with a 3/4" Diameter Kovar Metal Side Tubulation and Twin Tungsten Filaments.
Bayard Alpert Glass Ionization Gauge with a 3/4" Diameter Kovar Metal Side Tubulation and Twin Tungsten Filaments. G75KTTRE
G-100-KTT
Bayard Alpert Glass Ionization Gauge with 1.0" Diameter Kovar Metal Side Tubulation and Twin Tungsten Filaments. Also available with Welded 2.75" CF, ISO NW25 or NW40 Flange (Please call).
Bayard Alpert Glass Ionization Gauge with 1.0" Diameter Kovar Metal Side Tubulation and Twin Tungsten Filaments. Also available with Welded 2.75" CF, ISO NW25 or NW40 Flange (Please call). G100KTTRE
G-100-KIRPT
Bayard Alpert Glass Ionization Gauge with 1.0" Diameter Kovar Metal Side Tubulation and a Hairpin Thoria Coated Iridum Filament
Bayard Alpert Glass Ionization Gauge with 1.0" Diameter Kovar Metal Side Tubulation and a Hairpin Thoria Coated Iridum Filament. The Kovar Tubulation is Weldable and Suitable for adding a flange. It also has an internal platinum coating to dissipate any internal static charge. Also available with 3/4" tube. G100KIRPTRE
RFA-1A
Twin tungsten Filaments with a Temporary Wire Support for all Nude Bayard Alpert Gauges
Twin tungsten Filaments with a Temporary Wire Support for all Nude Bayard Alpert Gauges RFA1ARE
RFA-2A
A Thoria Coated Iridium Hairpin Filament with a Temporary Wire Support for all Nude Bayard Alpert Gauges. RFA2ARE
RFA-3A, 4A
Twin Tungsten Filaments with a loose foot support for all Nude UHV gauges
Twin Tungsten Filament with a loose foot support for all Nude UHV gauges. RFA4A is 1.75" in length and may be used in place of the RFA3A, which is no longer available.(for Varian Ion Gauges) RFA4ARE
RFA-580I
A Thoria Coated Iridium Hairpin Filament used on Nude Broadrange Gauges
A Thoria Coated Iridium Hairpin Filament used on Nude Broadrange Gauges RFA580IRE
RFA-ASM-10
n Alcatel Helium Leak Detector Replacement Filament
An Alcatel Helium Leak Detector Replacement Filament RFAASM10RE

 


Ion Pump Elements and TSPs


Model Description RBD Part #
N/A
Ceramic Insulators used with ion pump elements
Ceramic Insulators used with ion pump elements. See this RBD TechSPot blog post for the rebuild procedure

RBD TechSpot Ion Pump Rebuild Procedure
IONCERRE
TSP-12-PE
TSP Filaments TSP12PEFILRE
TSP-12-PE TSP Filament Package (12 per pack) TSP12PEPKGRE
N/A New Ion Pump Element NEWDIF0250RE
N/A New Ion Pump Element strap Kit - Includes Band & Nuts IPRKRE
N/A TSP Assembly (with exchange, includes 4 new filaments) TSPASWEXRE
N/A TSP Assembly (no exchange, includes 4 new filaments) TSPASNEXRE

 


Phosphor Screens


Model Description RBD Part #
N/A 0.5 inch diameter screen on 0.7 inch square, UHV compatible PHOSSCR0.7RE
N/A 1.5 inch diameter screen on 2.0 inch square, UHV compatible PHOSSCR2.0RE
N/A 3.0 inch x 3.0 inch phosphor target, UHV compatible PHOST3.0RE

 


Sample Intro Parts


Model Description RBD Part #
A78168 Sample Intro Seal Set, (2) 1 1/8 in. seals (For Intro Model 15-720) 99907LSRE
B79035 Drive Chain (For Intro Model 15-720) 15720SICRE
B79047 Threaded Brass Insert (For Intro Model 15-720) B79047RE
611484 Sample Intro Spacer Set, (2) inch spacers (For Intro Model 04-725) 99908SPRE
620025 Sample Intro Seal Set, (2) inch seals (For Intro Model 04-725) 99909SRE
613174 Cu/Be Intro Switch Clip (For Intro Model 04-725) 613174RE
601488 Sample Intro Spacer Set, (2) 3/8 inch spacers (For Old-style 04-725) 601488RE
601551 Sample Intro Seal Set, (2) 3/8 inch seals (For Old-style 04-725) 601551RE

 


Sample Mounts


Model Description RBD Part #
606266 Model 190 flat   -new 606266PR
606266M Model 190 flat made out of Molybdenum   -new 606266MPR
606266 Model 190 flat  -refurbished 606266PRE
606142 Model 191 recessed 606142RE
N/A Sample Clips Cu/Be SampleClipPR

 


Solenoid Valves


Model Description RBD Part #
179088
T062E1-3-10-35
V2 24V Solenoid/Auto Valve Control T062E1-3-10-35RE
179087
T062-4E2
V1 24V Solenoid/Auto Valve Control T062-4E2RE
179086
T062-4E1
V4,V3,V5,V6 24V Solenoid/Auto Valve Control T062-4E1RE

 


Sputter Rate Calibration Standards


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Model Description RBD Part #
N/A 1000 Ta2O51 inch x 6 inch TA2O5RE
N/A
sio2 standards
NEW PRODUCT:

1000 Angstrom SiO2 calibration standards. Sold in packs of 2. Irregular shapes approximately square. We use a thermal gas-phase oxidation process that ensures accuracy within a few angstroms. Bonus both sides of the wafer pieces have the oxide so once you are done with a standard you can flip it over and use it again! Sold in packs of 2.
SI02CALRE

 


Miscellaneous Vacuum Parts


Model Description RBD Part #
N/A V1 Gate Valve 600, and 660 (Not recommended for 590 and 560 systems) V1VALVERE