Secondary Ion Mass Spectroscopy Tutorial


SIMS System

The following post is a Secondary Ion Mass Spectroscopy Spectroscopy (SIMS) Tutorial ( PowerPoint in PDF format) complements of Eric Krosche. Although a destructive technique, SIMS is also the most sensitive surface analysis technique with detection limits as low as parts per billion.





Additional SIMS tutorials:

Secondary Ion Mass Spectroscopy Wiki

Eagle Analytical Labs SIMS Theory

University of Western Ontario SIMS

SIMS workshop links –

Note that the SIMS workshop links list of SIMS systems providers is missing a few companies such as Hiden and Extrel

X-ray Photoelectron Spectroscopy Tutorial

X-ray photoelectron spectroscopy (also known as XPS and originally as ESCA), has become one of the most prevalent and useful techniques for surface analysis since the introduction of commercially available instrumentation beginning in the 1960s.  XPS is a UHV surface analysis technique that provides quantifiable elemental and chemical state information from the top 20 to 100 angstroms of surfaces.

Today’s modern XPS systems use monochromatic aluminum X-rays and include the ability to produce real time XPS elemental images with spatial resolution in the range of a few microns.  If you need an XPS system for your research or production testing and can’t afford the $500K to over $1M for a new XPS system, RBD Instruments is your headquarters for refurbished Physical Electronics XPS systems and components.  Contact us for more information.

Below I have listed a number of links to X-ray photoelectron spectroscopy tutorials. They are in no particular order. Collectively, these tutorials provide an in-depth overview of the history, theory and applications for X-ray photoelectron spectroscopy.

Here is new link to an XPS data knowledge base from Thermo



Physical Electronics XPS system

Physical Electronics XPS system


Auger Electron Spectroscopy Tutorial


The following post is an Auger Electron Spectroscopy Tutorial (In PowerPoint format) complements of Eric Krosche. I think it is an excellent overview of the technique.  Although AES is not as prevalent as it was back in the 70s and 80s, it is still a very useful surface analysis technique.


Additional Auger Electron Spectroscopy AES tutorials:

Auger Electron Spectroscopy Wikipedia

Eagle Analytical Labs AES Theory

Johns Hopkins University Principles of AES