CASAXPS Scofield RSFs

Print Friendly, PDF & Email

Neal Fairley of CASA XPS has found that it is possible to quantify PHI (Physical Electronics) XPS data using Scofield cross-sections modified for escape depth and angular distribution. The Scofield-based library is then populated with universal RSFs applicable to PHI data. Videos on the CASAXPA website illustrate this point and how all XPS instruments can now use Scofield derived RSFs regardless of which instrument or manufacturer is involved.

Below you will find links to videos that show CASAXPS in action.   CASAXPS can help you quantify your XPS data and achieve accurate interpretation of the data. For more information on CASAXPS in the U.S. please contact RBD Instruments at sale@rbdinstruments.com or by calling 541 330 0723.

I hope that you enjoy the videos!

Simulating Spectra:

Start Video Click Here or Click Here for mp4 Mode

Quantification of XPS Spectra:

Transmission function, Escape Depth Correction and Relative Sensitivity Factors

Start Video Click Here or Click Here for mp4 Mode

Quantification and the Influence of Overlay Material on Substrate Information

Start Video Click Here or Click Here for mp4 Mode

Quantification of PHI Versa Probe Spectra

Start Video Click Here or Click Here for mp4 Mode

Thin Film Estimate by Hill Equation:

Start Video Click Here or Click Here for mp4 Mode

Step 1: Start Video Click Here or Click Here for mp4 Mode

Step 2: Start Video Click Here or Click Here for mp4 Mode

Step 3: Start Video Click Here or Click Here for mp4 Mode

Etch Time to Depth Calibration:

Start Video Click Here or Click Here for mp4 Mode

Linear Least Squares Depth Profile Analysis

Start Video Click Here or Click Here of mp4 Mode

 

Leave a Reply

Your email address will not be published. Required fields are marked *