Neal Fairley of CASA XPS has found that it is possible to quantify PHI (Physical Electronics) XPS data using Scofield cross-sections modified for escape depth and angular distribution. The Scofield-based library is then populated with universal RSFs applicable to PHI data. Videos on the CASAXPA website illustrate this point and how all XPS instruments can now use Scofield derived RSFs regardless of which instrument or manufacturer is involved.
Below you will find links to videos that show CASAXPS in action. CASAXPS can help you quantify your XPS data and achieve accurate interpretation of the data. For more information on CASAXPS in the U.S. please contact RBD Instruments at sale@rbdinstruments.com or by calling 541 330 0723.
I hope that you enjoy the videos!
Simulating Spectra:
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Quantification of XPS Spectra:
Transmission function, Escape Depth Correction and Relative Sensitivity Factors
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Quantification and the Influence of Overlay Material on Substrate Information
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Quantification of PHI Versa Probe Spectra
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Thin Film Estimate by Hill Equation:
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Step 1: Start Video Click Here or Click Here for mp4 Mode
Step 2: Start Video Click Here or Click Here for mp4 Mode
Step 3: Start Video Click Here or Click Here for mp4 Mode
Etch Time to Depth Calibration:
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Linear Least Squares Depth Profile Analysis
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