Optics Repair
RBD Instruments repairs most optics components and filaments for your PHI systems. If you don't see your component below, please contact us atus at 541 330 0723 X310 or email us at sales@rsbdinstruments.com.
Prices are for repair labor only. Charges for parts are typically less than $100.00.
Optics are burned-in under ultra-high vacuum conditions.
Analyzers
| Model # | Description | RBD Part # | Repair Labor $ |
|---|---|---|---|
| 10-150 | Thin Film Analyzer | 10150RP | $1,225.00 |
| 10-155 | Thin Film Analyzer | 10155RP | $1,225.00 |
| 10-234G | Thin Film Analyzer | 10234GRP | $1,225.00 |
| 15-110A | Scanning Auger | 15110ARP | $1,840.00 |
| 15-255G | Small Double Pass | 15255GRP | $1,840.00 |
| 25-110 | 590 SAM | 25110RP | $1,840.00 |
| 25-120 | 595 SAM | 25120RP | $1,840.00 |
| 25-120A | 600 SAM | 25120ARP | $1,840.00 |
| 25-250 | 550 XPS/AES (on-site only) | 25250RP | $2,450.00 |
| 25-260 | 560 XPS/AES (on-site only) | 25260RP | $2,450.00 |
| 25-270 | 570 XPS/AES (on-site only) | 25270RP | $2,450.00 |
Filaments: Electron Gun
| Model # | Description | RBD Part # | Repair Labor $ |
|---|---|---|---|
| C75-010 | Alignment of Tungsten filament used in 10-155, 15-255G, 15-110 and 25-260, 25-270 | C75010ALNRP | $60.00 |
| C75-010 | Tungsten filament used in 10-155, 15-255G, 15-110 and 25-260, 25-270 (Exchange only) | C75010RP | $185.00 |
| 04-090/04-085 | Tungsten filament used in 04-090 and 04-085 | 04090FRP | $160.00 |
| UTI Filament | UTI Filament (old style set screw type) | UTIFILOSRE | $86.00 |
| UTI Filament | UTI Filament Rebuild (new style welded filaments) | UTIFILNSRP | $175.00 |
Filaments: Ion Gun
| Model # | Description | RBD Part # | Repair Labor $ |
|---|---|---|---|
| A79084 | 04-303 ionizer assembly complete rebuild (w/ exchange) | 04303RERP | $495.00 |
| A79084 | 04-303 filament only (w/ exchange) | 04303FRP | $160.00 |
| N/A | 04-300 ionizer assembly complete rebuild (w/ exchange) | 04300RERP | $595.00 |
| N/A | 04-300 filament only (w/ exchange) | 04300FRP | $300.00 |
| N/A | 06-350 ionizer assembly complete rebuild (w/ exchange) | 06350RERP | $495.00 |
Filaments: X-ray Source
| Model # | Description | RBD Part # | Repair Labor $ |
|---|---|---|---|
| B78078 | 04-151/-152 Filament (w/ exchange) | 04151XRSTFRP | $495.00 |
Ion Guns
| Model # | Description | RBD Part # | Repair Labor $ |
|---|---|---|---|
| 04-161 | 2kV ion gun | 04161RP | $875.00 |
| 04-162 | 2kV ion gun | 04162RP | $875.00 |
| 04-172 | 3kV ion gun (Varian 981-2043) | 04172RP | $525.00 |
| 04-191 | 5kV ion gun | 04191RP | $1,750.00 |
| 04-192 | 5kV ion gun | 04192RP | $1,750.00 |
| 04-300 | 4kV Differential Ion gun | 04300RPIG | $3,675.00 |
| 614423 | 04-300 ionizer assembly rebuild (w/ exchange) | 04300RERP | $595.00 |
| 04-303 | 5kV Differential Ion gun | 04303RPIG | $3375.00 |
| 04-303 | 04-303 Ion Gun Aperture Insert ONLY (w/ exchange) | 04303APIN | $550.00 |
| A79084 | 04-303 ionizer assembly rebuild (w/exchange) | 04303RERP | $495.00 |
| 06-650 | Duoplasmatron Ion Gun | 06650RP | $2,975.00 |
Mechanical / Roughing Pumps
| Model # | Description | RBD Part # | Repair Labor $ |
|---|---|---|---|
| 3.5 cfm Rotary Vane Vacuum Pump with RBD PCU-1 (Pump Control Unit for Turbo Pump Stations) | 3.5 cfm | RVP3.5RE | $1,785.00 |
| Balzer/Pfeiffer – Duo 1.5 repair | Duo 1.5 | DUO15RP | $1,070.00 |
| Balzer/Pfeiffer – Duo 1.5A repair | Duo 1.5A | DUO15ARP | $1,070.00 |
| Balzer/Pfeiffer - Duo 2.5 repair | Duo 2.5 | DUO2.5RP | $1,070.00 |
| Balzer/Pfeiffer – new Duo 2.5 for exchange Duo 1.5 | Duo 2.5 | DUO2.5RE | $2,400.00 |
| Balzer/Pfeiffer – new Duo 2.5 | Duo 2.5 | DUO2.5NRE | $2,500.00 |
| New Oil Mist Filter | Same | 995512RE | $115.00 |
| Oil for mechanical pump, 16 oz. | Same | PumpOilRE | $15.00 |
Specimen Stages
| Model # | Description | RBD Part # | Repair Labor $ |
|---|---|---|---|
| 10-540 | Manipulator | 10540RP | $700.00 |
| 10-320 | XPS stage | 10320RP | $1,575.00 |
| 10-322 | XPS stage | 10322RP | $1,575.00 |
| 10-323 | XPS stage | 10323RP | $1,575.00 |
| 15-600 | AES stage | 15600RP | $1,050.00 |
| 15-610 | AES stage | 15610RP | $1,050.00 |
| 15-620 | 560/595 stage | 15620RP | $1,050.00 |
| 15-630 | 15-630600/610/650/660 stage | 15630RP | $1,400.00 |
Turbo Pumps
| Model # | Description | RBD Part # | Repair Labor $ |
|---|---|---|---|
| All | Please call RBD for pricing info. | All | Varies |
X-Ray Anode Source Recoatings
| Model # | Description | RBD Part # | Repair Labor $ |
|---|---|---|---|
| 04-151 | 10kV source anode | 04151ANODWEXCRE | Call for Pricing |
| 04-500 | 15kV dual anode | 04500ANODWEXRE | $1,500.00 |
| 04-548 | 15kV dual anode | 04548ANODWEXRE | $1,500.00 |
X-Ray Sources
| Model # | Description | RBD Part # | Repair Labor $ |
|---|---|---|---|
| 04-151 | 10kV single anode source rebuild | 04151XRSRP | $700.00 |
| 04-500 | 15kV dual anode source rebuild | 04500XRSRP | $1,490.00 |
| 04-548 | 15kV dual anode source rebuild | 04548XRSRP | $1,490.00 |
*Please drain all of the water out of your x-ray source before shipping it to RBD for repair. This is to prevent freezing that can damage your x-ray source.

