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In-House Repair Services
RBD Instruments repairs most optics components, and electronics components, and filaments for your PHI systems. If you don't see your component below, please contact us at sales@rbdinstruments.com for a quote.
Prices are for repair labor only. Charges for parts are typically less than $100.00
Optics Repair Prices
Optics are burned-in under ultra-high vacuum conditions. Click on the applicable tab below for optics repair pricing information.
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| 10-150 | Thin Film Analyzer | 10150RP | $1,225.00 |
| 10-155 | Thin Film Analyzer | 10155RP | $1,225.00 |
| 10-234G | Thin Film Analyzer | 10234GRP | $1,225.00 |
| 15-110A | Scanning Auger | 15110ARP | $1,840.00 |
| 15-255G | Small Double Pass | 15255GRP | $1,840.00 |
| 25-110 | 590 SAM | 25110RP | $1,840.00 |
| 25-120 | 595 SAM | 25120RP | $1,840.00 |
| 25-120A | 600 SAM | 25120ARP | $1,840.00 |
| 25-250 | 550 XPS/AES (on-site only) | 25250RP | $2,450.00 |
| 25-260 | 560 XPS/AES (on-site only) | 25260RP | $2,450.00 |
| 25-270 | 570 XPS/AES (on-site only) | 25270RP | $2,450.00 |
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| C75-010 | Alignment of Tungsten filament used in 10-155, 15-255G, 15-110 and 25-260, 25-270 | C75010ALNRP | $60.00 |
| C75-010 | Tungsten filament used in 10-155, 15-255G, 15-110 and 25-260, 25-270 (Exchange only) | C75010RP | $160.00 |
| 04-090/04-085 | Tungsten filament used in 04-090 and 04-085 | 04090FRP | $160.00 |
| UTI Filament | UTI Filament (old style set screw type) | UTIFILOSRE | $50.00 |
| UTI Filament | UTI Filament Rebuild (new style welded filaments) | UTIFILNSRP | $175.00 |
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| A79084 | 04-303 ionizer assembly complete rebuild (w/ exchange) | 04303RERP | $495.00 |
| A79084 | 04-303 filament only (w/ exchange) | 04303FRP | $160.00 |
| N/A | 04-300 ionizer assembly complete rebuild (w/ exchange) | 04300RERP | $595.00 |
| N/A | 06-350 ionizer assembly complete rebuild (w/ exchange) | 06350RERP | $495.00 |
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| B78078 | 04-151/-152 Filament (w/ exchange) | 04151XRSTFRP | $495.00 |
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| 04-161 | 2kV ion gun | 04161RP | $875.00 |
| 04-162 | 2kV ion gun | 04162RP | $875.00 |
| 04-172 | 3kV ion gun (Varian 981-2043) | 04172RP | $525.00 |
| 04-191 | 5kV ion gun | 04191RP | $1,750.00 |
| 04-192 | 5kV ion gun | 04192RP | $1,750.00 |
| 04-300 | 4kV Differential Ion gun | 04300RPIG | $3,675.00 |
| 614423 | 04-300 ionizer assembly rebuild (w/ exchange) | 04300RERP | $595.00 |
| 04-303 | 5kV Differential Ion gun | 04303RPIG | $2,975.00 |
| A79084 | 04-303 ionizer assembly rebuild w/exchange | 04303RERP | $495.00 |
| 06-650 | Duoplasmatron Ion Gun | 06650RP | $2,975.00 |
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| 3.5 cfm Rotary Vane Vacuum Pump with RBD PCU-1 (Pump Control Unit for Turbo Pump Stations) | 3.5 cfm | RVP3.5RE | $1,785.00 |
| Balzer/Pfeiffer – Duo 1.5 repair | Duo 1.5 | DUO15RP | $1,070.00 |
| Balzer/Pfeiffer – Duo 1.5A repair | Duo 1.5A | DUO15ARP | $1,070.00 |
| Balzer/Pfeiffer - Duo 2.5 repair | Duo 2.5 | DUO2.5RP | $1,070.00 |
| Balzer/Pfeiffer – new Duo 2.5 for exchange Duo 1.5 | Duo 2.5 | DUO2.5RE | $2,400.00 |
| Balzer/Pfeiffer – new Duo 2.5 | Duo 2.5 | DUO2.5NRE | $2,500.00 |
| New Oil Mist Filter | Same | 995512RE | $72.00 |
| Oil for mechanical pump, 16 oz. | Same | PumpOilRE | $15.00 |
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| Manipulator | 10-540 | 10540RP | $700.00 |
| XPS stage | 10-320 | 10320RP | $1,575.00 |
| XPS stage | 10-322 | 10322RP | $1,575.00 |
| XPS stage | 10-323 | 10323RP | $1,575.00 |
| AES stage | 15-600 | 15600RP | $1,050.00 |
| AES stage | 15-610 | 15610RP | $1,050.00 |
| 560/595 stage | 15-620 | 15620RP | $1,050.00 |
| 600/610/650/660 stage | 15-630 | 15630RP | $1,400.00 |
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| All | Call for quote or recommended repair service provider | All | Varies |
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| 04-151 | 10kV source anode | 04151ANODWEXCRE | Call for Pricing |
| 04-500 | 15kV dual anode | 04500ANODWEXRE | $1,500.00 |
| 04-548 | 15kV dual anode | 04548ANODWEXRE | $1,500.00 |
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| 04-151 | 10kV single anode source rebuild | 04151XRSRP | $700.00 |
| 04-500 | 15kV dual anode source rebuild | 04500XRSRP | $1,490.00 |
| 04-548 | 15kV dual anode source rebuild | 04548XRSRP | $1,490.00 |
Electronics
Electronics are burned-in for 24 hours after repair and calibration, which helps ensure reliable operation.
Click on the applicable tab below for electronics repair pricing information.
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| 11-055 | Analyzer Control | 11055RP | $1,225.00 |
| 11-500A | Auger Analyzer Control | 11500ARP | $1,050.00 |
| 18-600 | Balzers Quad. Control | 18600RP | $1,750.00 |
| 20-805 | AES/XPS Analyzer Control | 20805RP | $875.00 |
| 20-810 | Digital AES/XPS Control | 20810RP | $1,400.00 |
| 32-055 | SIMSII Control | 32055RP | $1,400.00 |
| 32-150 | Digital AES Analyzer Control | 32150RP | $875.00 |
| 72-150 | Digital AES Analyzer Control | 72150RP | $875.00 |
| 80-360 | XPS Analyzer Control | 80360RP | $1,750.00 |
| 80-365 | XPS Analyzer Control | 80365RP | $1,750.00 |
| Balzers RF Gen | Balzers RF Generator | RFGENRP | $2,100.00 |
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| 11-010 | 5kV Electron gun control | 11010RP | $1,400.00 |
| 11-020 | 5kV LEED Control | 11020RP | $875.00 |
| 06-190 | 10kV Electron gun control | 06190RP | $875.00 |
| 11-045 | 10kV Electron gun control | 11045RP | $600.00 |
| 18-080 | 10kV Digital EGC | 18080RP | $1,400.00 |
| 18-085 | 10kV Digital EGC | 18085RP | $1,400.00 |
| 20-320 | 10kV Digital EGC | 20320RP | $1,750.00 |
| 20-320A | 10kV Analog EGC | 20320ARP | $1,750.00 |
| 20-325A | 10kV Analog EGC | 20325ARP | $1,750.00 |
| 20-327 | 10kV Digital EGC | 20327RP | $1,750.00 |
| 20-330 | 10kV LEED Control | 20330RP | $1,750.00 |
| 20-610 | 30kV Digital EGC | 20610RP | $1,975.00 |
| 20-620 | 595 System EGC | 20620RP | $1,400.00 |
| 20-620A | 600 System EGC | 20620ARP | $1,400.00 |
| 20-622 | 660 System EGC | 20622RP | $1,400.00 |
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| 20-075 | Analog multiplier supply | 20075RP | $615.00 |
| 32-100 | Digital multiplier supply | 32100RP | $875.00 |
| 72-100 | Digital multiplier supply | 72100RP | $1,050.00 |
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| 11-065 | 04-303 5kV ion gun control | 11065RP | $1,225.00 |
| 11-067 | 04-300 5kV ion gun control | 11067RP | $1,050.00 |
| 11-069 | Ion gun scan control | 11069RP | $1,050.00 |
| 11-085 | 06-350 5kV ion gun control | 11085RP | $1,575.00 |
| 20-005 | 04-161/2 2kV ion gun control | 20005RP | $875.00 |
| 20-045 | 04-161/2 2kV ion gun control | 20045RP | $875.00 |
| 20-115 | 04-191 5kV ion gun control | 20115RP | $1,050.00 |
| 20-520 | DP gun control | 20520RP | $1,050.00 |
| 20-520A | Analog DP gun control | 20520ARP | $1,050.00 |
| 20-530 | DP source control | 20530RP | $1,050.00 |
| 20-540 | DP Cesium source control | 20540RP | $1,050.00 |
| 77-067 | 04-300 5kV ion gun control | 77067RP | $1,400.00 |
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| 11-155 | Scan Control Power Supply | 11155RP | $525.00 |
| 18-030 | Power Interlock | 18030RP | $525.00 |
| 18-040 | 10kV Power Supply | 18040RP | $1,750.00 |
| 20-070 | Scanning System Control | 20070RP | $1,050.00 |
| 20-150 | Signal Processor | 20150RP | $1,400.00 |
| 20-250 | Signal Processor | 20250RP | $1,400.00 |
| 32-070 | Deflection Amplifier | 32070RP | $700.00 |
| 32-075 | Stigmator Control | 32075RP | $875.00 |
| 74-500 | DASH Interface Board | 74-500 | $1,050.00 |
| AVC | Auto Valve Control | AVCRP | $875.00 |
| AVC | Hockey Puck replacement for Auto Valve Control | AVCHPRE | $350.00 |
| AVC | Hockey Puck Potentiometer Modification for Auto Valve Control | AVCTCRE | $100.00 |
| AVC | Auto Valve Control Hockey Puck with digital readout - RBD Install | AVCMODRE | $600.00 |
| AVC | Auto Valve Control Hockey Puck with digital readout - self install | AVCMODSRE | $400.00 |
| Boostivac | Bootivac Ion Pump & TSP Control | BoostivacRP | $790.00 |
| DGC III | Digital Ion Gauge Control | DIGIIIRP | $750.00 |
| DGC IV | Digital Ion Gauge Control (RBD) | DGCIVRP | $500.00 |
| Digitel 100 | Digitel 100 Ion Pump Control | Digitel100RP | $790.00 |
| Digitel 500 | Digitel 500 Ion Pump Control | Digitel500RP | $790.00 |
| All | Card Rack Power Supply | OEMRP | $875.00 |
| All | Card Rack Power Supply Board | OEMSBRP | $525.00 |
| PC137A | PC Interface Board | 137RP | $1,050.00 |
| RBD147 | PC Interface Unit (Exchange Only) | 147RP | $1,250.00 |
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| All | Call for price of your controller. | All | Usually $500.00, including parts |
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| 96 | V/F Pre-amp, 100 kHz freq. | 96RP | $875.00 |
| 96A | V/F Pre-amp, 1 MHz freq. | 96ARP | $875.00 |
| 96B | V/F Pre-amp, 1 MHz freq. | 96BRP | $875.00 |
| 97 | SED pre-amp | 97SEDRP | $1,050.00 |
| V/F-4 | V/F Pre-amp, 4 MHz freq. | VF4RP | $700.00 |
| 21-V | V/F converter, TV video | 21VRP | $350.00 |
| 21-L | V/F converter, Lock-in Rec. | 21LRP | $350.00 |
| 1120 | 1120 Amplifier/Discriminator | 1120RP | $525.00 |