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In-House Repair Services
RBD Instruments repairs most optics components, and electronics components, and filaments for your PHI systems. If you don't see your component below, please contact us at sales@rbdinstruments.com for a quote.
Prices are for repair labor only. Charges for parts are typically less than $100.00
Optics Repair Prices
Optics are burned-in under ultra-high vacuum conditions. Click on the applicable tab below for optics repair pricing information.
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| 10-150 | Thin Film Analyzer | 10150RP | $1,225.00 |
| 10-155 | Thin Film Analyzer | 10155RP | $1,225.00 |
| 10-234G | Thin Film Analyzer | 10234GRP | $1,225.00 |
| 15-110A | Scanning Auger | 15110ARP | $1,840.00 |
| 15-255G | Small Double Pass | 15255GRP | $1,840.00 |
| 25-110 | 590 SAM | 25110RP | $1,840.00 |
| 25-120 | 595 SAM | 25120RP | $1,840.00 |
| 25-120A | 600 SAM | 25120ARP | $1,840.00 |
| 25-250 | 550 XPS/AES (on-site only) | 25250RP | $2,450.00 |
| 25-260 | 560 XPS/AES (on-site only) | 25260RP | $2,450.00 |
| 25-270 | 570 XPS/AES (on-site only) | 25270RP | $2,450.00 |
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| C75-010 | Alignment of Tungsten filament used in 10-155, 15-255G, 15-110 and 25-260, 25-270 | C75010ALNRP | $60.00 |
| C75-010 | Tungsten filament used in 10-155, 15-255G, 15-110 and 25-260, 25-270 (Exchange only) | C75010RP | $160.00 |
| 04-090/04-085 | Tungsten filament used in 04-090 and 04-085 | 04090FRP | $160.00 |
| UTI Filament | UTI Filament (old style set screw type) | UTIFILOSRE | $50.00 |
| UTI Filament | UTI Filament Rebuild (new style welded filaments) | UTIFILNSRP | $175.00 |
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| A79084 | 04-303 ionizer assembly complete rebuild (w/ exchange) | 04303RERP | $495.00 |
| A79084 | 04-303 filament only (w/ exchange) | 04303FRP | $160.00 |
| N/A | 04-300 ionizer assembly complete rebuild (w/ exchange) | 04300RERP | $595.00 |
| N/A | 06-350 ionizer assembly complete rebuild (w/ exchange) | 06350RERP | $495.00 |
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| B78078 | 04-151/-152 Filament (w/ exchange) | 04151XRSTFRP | $495.00 |
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| 04-161 | 2kV ion gun | 04161RP | $875.00 |
| 04-162 | 2kV ion gun | 04162RP | $875.00 |
| 04-172 | 3kV ion gun (Varian 981-2043) | 04172RP | $525.00 |
| 04-191 | 5kV ion gun | 04191RP | $1,750.00 |
| 04-192 | 5kV ion gun | 04192RP | $1,750.00 |
| 04-300 | 4kV Differential Ion gun | 04300RPIG | $3,675.00 |
| 614423 | 04-300 ionizer assembly rebuild (w/ exchange) | 04300RERP | $595.00 |
| 04-303 | 5kV Differential Ion gun | 04303RPIG | $2,975.00 |
| A79084 | 04-303 ionizer assembly rebuild w/exchange | 04303RERP | $495.00 |
| 06-650 | Duoplasmatron Ion Gun | 06650RP | $2,975.00 |
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| 3.5 cfm Rotary Vane Vacuum Pump with RBD PCU-1 (Pump Control Unit for Turbo Pump Stations) | 3.5 cfm | RVP3.5RE | $1,785.00 |
| Balzer/Pfeiffer – Duo 1.5 repair | Duo 1.5 | DUO15RP | $1,070.00 |
| Balzer/Pfeiffer – Duo 1.5A repair | Duo 1.5A | DUO15ARP | $1,070.00 |
| Balzer/Pfeiffer - Duo 2.5 repair | Duo 2.5 | DUO2.5RP | $1,070.00 |
| Balzer/Pfeiffer – new Duo 2.5 for exchange Duo 1.5 | Duo 2.5 | DUO2.5RE | $2,400.00 |
| Balzer/Pfeiffer – new Duo 2.5 | Duo 2.5 | DUO2.5NRE | $2,500.00 |
| New Oil Mist Filter | Same | 995512RE | $115.00 |
| Oil for mechanical pump, 16 oz. | Same | PumpOilRE | $15.00 |
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| Manipulator | 10-540 | 10540RP | $700.00 |
| XPS stage | 10-320 | 10320RP | $1,575.00 |
| XPS stage | 10-322 | 10322RP | $1,575.00 |
| XPS stage | 10-323 | 10323RP | $1,575.00 |
| AES stage | 15-600 | 15600RP | $1,050.00 |
| AES stage | 15-610 | 15610RP | $1,050.00 |
| 560/595 stage | 15-620 | 15620RP | $1,050.00 |
| 600/610/650/660 stage | 15-630 | 15630RP | $1,400.00 |
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| All | Call for quote or recommended repair service provider | All | Varies |
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| 04-151 | 10kV source anode | 04151ANODWEXCRE | Call for Pricing |
| 04-500 | 15kV dual anode | 04500ANODWEXRE | $1,500.00 |
| 04-548 | 15kV dual anode | 04548ANODWEXRE | $1,500.00 |
| Model Number | Description | RBD Part # | Repair Labor |
|---|---|---|---|
| 04-151 | 10kV single anode source rebuild | 04151XRSRP | $700.00 |
| 04-500 | 15kV dual anode source rebuild | 04500XRSRP |