Replacement Parts
RBD Instruments sells replacement parts (also referred to as "consumables") for various PHI optics and vacuum equipment. If you don't see the part you need below, please contact us at sales@rbdinstruments.com for additional assistance.
Note: To view this page page correctly in Internet Explorer, you will need to "Allow Blocked Content" if prompted by an error message at the top of your browser window.
- Optics Replacement Parts
- Electronics Replacement Parts
- Vacuum Equipment Replacement Parts
Optics Replacement Parts
Click on the applicable tab below for optics replacement parts pricing information.
| Model Number | Description | RBD Part # | Price |
|---|---|---|---|
| 627542 | Aperture condenser blanking | 627542RE | $150.00 |
| 627540 | Aperture condenser | 627540RE | $60.00 |
| 622213 | Aperture plate | 622213RE | $300.00 |
| 630377 | Beam stop (new type) | 630377RE | $90.00 |
| 621748 | DP Anode aperture | 621748RE | $155.00 |
| 610049 | DP Intermediate | 610049RE | $480.00 |
| 610043 | DP Cathode | 610043RE | $390.00 |
| 629828 | Extractor lens ceramic | 629828RE | $560.00 |
| 641778 | Extractor trap | 641778RE | $160.00 |
| 628050 | Source trap – housing | 628050RE | $310.00 |
| 628051 | Source trap – aperture | 628051RE | $105.00 |
| Model Number | Description | RBD Part # | Price |
|---|---|---|---|
| C75-010 | Tungsten filament used with 10-150, 10-155, 15-110, and 15-255G analyzers. Exchange price. | C75010RP | $160.00 |
| C79037 | LaB6 for 25-120, 25-120A (595) analyzer. Exchange price. | LAB6595RE | $1,595.00 |
| C79037A | LaB6 for 25-120, 25-120A (600 or 660) analyzer. Exchange price. | LAB6600RE | $1,595.00 |
| D76129 | LaB6 for 25-110 (590) analyzer. Exchange price. | LAB6590RE | $1,595.00 |
| N/A | LaB6 for 25-110A, 25-130 (610) analyzer. Exchange price. | LAB6610RE | $1,595.00 |
| Model Number | Description | RBD Part # | Price |
|---|---|---|---|
| 602914 | Channeltron used with 15-255, 25-120, 25-120A, 25-255, 25-260, and 25-270 CMAs, and 06-600 SIMS | 4831GRE | $1,023.00 |
| 608144 | Channeltron used with 10-360 SCD detector | 4821GRE | Please call |
| 609206 | Channel Plates used with 10-360 PSD detector | 10360PSDRE | Please call |
| 616530 | Channeltron used with 10-150 and 10-155 CMAs | 4839RE | $1,023.00 |
| 619091 | Channel Plates used with 10-360 MCD detector | 10360MCDIGRE | Please call |
| 61525X | Channeltron used with 15-110 and 25-110 CMAs | 4731GRE | $2,100.00 |
Note to All Customers:
A hazardous materials fee of $65.00 will be charged for all gas bottle shipments.
Important: When returning an empty bottle to RBD to be refilled, the valve must be left in the open position. If the valve isn't left open, fees and penalties may be incurred. Any and all such fees will be charged back to the company that shipped the bottle to RBD.
Note to International Customers:
25cc bottles cannot be shipped to locations outside of the USA. If you have a 25cc bottle you would like to refill, you may send it to RBD for a credit towards the purchase of a 50cc bottle. Please contact sales@rbdinstruments.com for details.
| Model Number | Description | RBD Part # | Price |
|---|---|---|---|
| Grade: 99.999+% | 25cc Argon Refill | Argon25RP | $75.00 |
| Grade: 99.999+% | 25cc Oxygen Refill | Oxygen25RP | $75.00 |
| Grade: 99.999+% | 25cc Xenon Refill | Xenon25RP | $150.00 |
| Grade: 99.999+% | 50cc Argon Refill | Argon50RP | $100.00 |
| Grade: 99.999+% | 50cc Oxygen Refill | Oxygen50RP | $100.00 |
| Grade: 99.999+% | 50cc Xenon Refill | Xenon50RP | $175.00 |
| Call for Availability | 25cc Bottle w/ O2 or Ar 1.0" diameter, 6.2" long |
Bottle25ccRE | $650.00 |
| Call for Availability | 25cc Bottle w/ Xe 1.0" diameter, 6.2" long |
XeBottle 25ccRE | $750.00 |
| n/a | 50cc Bottle w/ O2 or Ar 1.5" diameter, 7.0" long |
Bottle50ccRE | $900.00 |
| n/a | 50cc Bottle w/ Xe 1.5" diameter, 7.0" long |
XeBottle50ccRE | $795.00 |
| n/a | Larger bottles than those listed here | Call for details | Call for price |
| Model Number | Description | RBD Part # | Price |
|---|---|---|---|
| D71-029 | Tungsten filament used in 04-161/162 2kV Ion Gun | 04161FRP | $37.00 |
| 981-2044 | Tungsten filament used in RBD 04-172 & Varian 981-2043 3kV Ion Gun | 04172FPR | $137.00 |
| B75025 | Tungsten filament used in 04-191/192 5kV Ion Gun | 04191FRP | $37.00 |
| N/A | 04-303 Grid for self-install | 04303GRDRE | $126.00 |
| 04-165 | IG2 Ionizer Assembly | 04165IAPR | $565.00 |
| Model Number | Description | RBD Part # | Price |
|---|---|---|---|
| 603569 | Deionizer Cartridge (12”) | 603569RE | $180.00 |
| 620913 | Particle Filter (1mm, 10”) | 620913RE | $95.00 |
| 620914 | Deionizer Cartridge (10”) | 620914RE | $125.00 |
| C01604X | Water Pump for 16-020 Chiller, Stainless Steel, 100 gpm, 170 psi | C01604XRE | $290.00 |
| CB1304XH | Water Pump for 16-020 Chiller, Brass, 100 gpm, 99 psi | CB1304XHRE | $217.00 |
| N/A | Flow Switch (1.5gpm) | FLOWSWITCHRE | $255.00 |
| N/A | Crydom Relay for 16-050 and 16-020 | CRYDRE | $70.00 |
| Model Number | Description | RBD Part # | Price |
|---|---|---|---|
| 602229 | 04-500/548 Football ceramic | 602229PR | $1,255.00 |
| 602501 | Old style 04-500/548 Filament (no exchange) | 04-5XXOLDPR | $174.00 |
| 602504 | X-ray source retainer ring | 602504RE | $44.00 |
| 602508 | Al x-ray source window | 602508PR | $121.00 |
| 606468 | X-ray source collimator | 606468RE | $223.00 |
| 622275 | New style 04-500/548 Filament Datasheet |
622275RE | $750.00 |
| N/A | 5/16” Teflon tubing for x-ray source | XRAYPARTS | $14.00/foot |
| N/A | 04-500/548 Notched ceramic | XRSNCRE | $37.00 |
| Model Number | Description | RBD Part # | Price |
|---|---|---|---|
| 615838 | 04-085 Neutralizer Ceramic | 615838PR | $260.00 |
| N/A | USB Camera for System Microscope (can be used with existing PHI system microscope) | SYSMCRE | $700.00 |
| N/A | System Microscope with lenses and mounting hardware | SYSMICRE | $2,975.00 |
| C79104X | Dynode for 660 | C79104XRE | $800.00 |
| 606289 | 600/660 Objective Coil | 606289RE | $7,200.00 |
| 04-303 (cable) | 04-303 HV Cable (replacement) | 04303CableRE | $875.00 |
Electronics Replacement Parts
| Model Number | Description | RBD Part # | Price |
|---|---|---|---|
| DIG III (battery) | DIG III Set Point Battery | BA3.6RE | $18.75 |
| N/A | 28V Power Supply for 11-065 | 28VPSRE | $195.00 |
| N/A | 45V Battery for Bias Box | Battery45VRE | $25.50 |
| Model Number | Description | RBD Part # | Price |
|---|---|---|---|
| 04-303 (cable) | 04-303/11-065 HV Cable (replacement) | 11065HVPR | $875.00 |
| DIG (cable) | DGCIV Bakeable Ion Gauge Cable (12 ft) | DGCIVCableBRE | $250.00 |
| DIG (cable) | DGCIV Non-Bakeable Ion Gauge Cable (10ft) | DGCIVCableRE | $185.00 |
| Model Number | Description | RBD Part # | Price |
|---|---|---|---|
| 9331-16-6 | 9331 DAC Replacement | 9331166PR | $225.00 |
| HDH 1205 | 1205 DAC Replacement | DAC1205RE | $225.00 |
| Model Number | Description | RBD Part # | Price |
|---|---|---|---|
| 330-120V-180 | 18-030 Time Delay Relay | 473-036RE | $111.00 |
| 602988 | 32-095 HV Switch | 602988RE | $32.00 |
| 273055 | 20-085 Beam Voltage Switch | 273055RE | $49.00 |
| Model Number | Description | RBD Part # | Price |
|---|---|---|---|
| 275056 | 20-115 Deflection Transformer | 275056RE | $485.00 |
| 278016 | T2 Transformer for 11-065 | 278016RE | $475.00 |
| 602817 | T2 Transformer for 11-010 | 602817RE | $520.00 |
| n/a | 18-085 Filament Current Module Out of Stock | 18085FMRE | $900.00 |
| n/a | 18-085 HV Module | 18085HVMRE | $675.00 |
| Model Number | Description | RBD Part # | Price |
|---|---|---|---|
| TIL-109 | TIL-109 Optoisolators | TIL109RE | $75.00 |
| 1000848 | Boostivac flexible shaft | TSPSHAFTRE | $40.00 |
| GE8068 | GE Vacuum Tube | GE6068RE | $95.00 |
Vacuum Equipment Replacement Parts
Click on the applicable tab below for vacuum equipment replacement parts pricing information.
| Model Number | Description | RBD Part # | Price |
|---|---|---|---|
| 2000RE | Rubber Diaphragm for most PHI vacuum consoles | 2000RE | $160.00 |
| Model Number | Description | RBD Part # | Price |
|---|---|---|---|
| 268-0750 | 1.33" OD mini CF flange | 133ODG | $15.00 |
| 268-1500 | 2 ¾" OD flange | 275ODG | $17.00 |
| 268-2000 | 3.375" OD sublimator flange | 3375ODG | $19.00 |
| 268-2500 | 4.5" OD flange | 45ODG | $27.00 |
| 603700 | Large I.D. 2 ¾" OD | 275XLIDG | $29.00 |
| 268-4000 | 6" OD flange | 6OD | $39.50 |
| 1001986 | 6 ¾" OD flange SIMSII | 675ODG | $43.00 |
| 268-6000 | 8" OD flange | 8ODG | $54.50 |
| 268-8000 | 10" OD flange | 10ODG | $74.50 |
| 268-9129 | 12.995" Copper wire gasket (TNBX Gasket) | 12995CWG | $65.00 |
| 608141 | XPS Hemisphere Gasket | 608141RE | $500.00 |
| 613506 | XPS LS Stage Gasket | 613506RE | $325.00 |
| 618550 | XPS Monochromator Gasket | 618550RE | $350.00 |
| A041186 | XPS LS Bonnet Gasket | A041186RE | $125.00 |
| Model Number | Description | RBD Part # | Price |
|---|---|---|---|
| TSP-12-PE | TSP Filaments | TSP12PEFILRE | $25.00/ea |
| TSP-12-PE | TSP Filament Package (4) | TSP12PEPKGRE | $100.00 |
N/A |
Rebuilt Ion Pump Element (with exchange of old element) | DIF0250RBRE | $523.00/ea |
| N/A | New Ion Pump Element | NEWDIF0250RE | $583.00/ea |
| N/A | New Ion Pump Element Rebuild Kit - Includes Band & Nuts | IPRKRE | $71.00/ea |
| N/A | TSP Assembly (with exchange, includes 4 new filaments) | TSPASWEXRE | $205.00 |
| N/A | TSP Assembly (no exchange, includes 4 new filaments) | TSPASNEXRE | $399.00 |
| Model Number | Description | RBD Part # | Price |
|---|---|---|---|
| N/A | 0.5” diameter screen on 0.7” square, UHV compatible | PHOSSCR0.7RE | $285.00 |
| N/A | 1.5” diameter screen on 2.0” square, UHV compatible | PHOSSCR2.0RE | $355.00 |
| Model Number | Description | RBD Part # | Price |
|---|---|---|---|
| A78168 | Sample Intro Seal Set, (2) 1 1/8 in. seals (For Intro Model 15-720) | 99907LSRE | $100.00 |
| B79035 | Drive Chain (For Intro Model 15-720) | 15720SICRE | $50.00 |
| B79047 | Threaded Brass Insert (For Intro Model 15-720) | B79047RE | $70.00 |
| 611484 | Sample Intro Spacer Set, (2) ½ in. spacers (For Intro Model 04-725) | 99908SPRE | $85.00 |
| 620025 | Sample Intro Seal Set, (2) ½ in. seals (For Intro Model 04-725) | 99909SRE | $60.00 |
| 613174 | Cu/Be Intro Switch Clip (For Intro Model 04-725) | 613174RE | $75.00 |
| 601488 | Sample Intro Spacer Set, (2) 3/8 in. spacers (For Old-style 04-725) | 601488RE | $50.00 |
| 601551 | Sample Intro Seal Set, (2) 3/8 in. seals (For Old-style 04-725) | 601551RE | $30.00 |
| Model Number | Description | RBD Part # | Price |
|---|---|---|---|
| 606266 | Model 190 (flat) | 606266RE | $75.00 |
| 606142 | Model 191 (recessed) | 606142RE | $95.00 |
| N/A | Sample Clips (Cu/Be) | SampleClipPR | $3.00/ea |
| Model Number | Description | RBD Part # | Price |
|---|---|---|---|
| 179088 | V2 24V Solenoid/Auto Valve Control | T062E1-3-10-35RE | $185.00 |
| 179087 | V1 24V Solenoid/Auto Valve Control | T062-4E2RE | $315.00 |
| 179086 | V4,V3,V5,V6 24V Solenoid/Auto Valve Control | T062-4E1RE | $230.00 |
| Model Number | Description | RBD Part # | Price |
|---|---|---|---|
| N/A | 1000Å Ta2O5 (1” x 6”) | TA2O5PR | $175.00 |
| N/A | 1000Å SiO2 (3” wafer) | SIO2RE | $150.00 |
| Model Number | Description | RBD Part # | Price |
|---|---|---|---|
| N/A | V1 Gate Valve 600, and 660 (Not recommended for 590 and 560 systems) | V1VALVERE | $1,400.00 |
.jpg)














