Vacuum Equipment Replacement Parts
RBD Instruments provides replacement parts and consumables for most PHI / Physical Electronics vacuum equipment at great prices. For more information or a quotation please call us at 541 330 0723 X310 or email us at sales@rbdinstruments.com.
Air Shock Diaphrams
| Model Number |
Description |
RBD Part # |
Price |
| 2000RE |
Rubber Diaphragm for most PHI vacuum consoles |
2000RE |
$160.00 |
Gaskets
| Model Number |
Description |
RBD Part # |
Price |
| 268-0750 |
1.33" OD mini CF flange |
133ODGRE |
$25.00/10 |
| 268-1500 |
2 ¾" OD flange |
275ODGRE |
$24.00/10 |
| 268-2000 |
3.375" OD sublimator flange |
3375ODGRE |
$19.00/10 |
| 268-2500 |
4.5" OD flange |
45ODGRE |
$39.00/10 |
| 603700 |
Large I.D. 2 ¾" OD |
275XLIDGRE |
$34.00/10 |
| 268-4000 |
6" OD flange |
6ODRE |
$55.50/10 |
| 1001986 |
6 ¾" OD flange SIMSII |
675ODGRE |
$43.00/10 |
| 268-6000 |
8" OD flange |
8ODGRE |
$78.50/10 |
| 268-8000 |
10" OD flange |
10ODGRE |
$101.00/10 |
| 268-9129 |
12.995" Copper wire gasket (TNBX Gasket) |
12995CWGRE |
$65.00 |
| 608141 |
XPS Hemisphere Gasket |
608141RE |
$500.00 |
| 613506 |
XPS LS Stage Gasket |
613506RE |
$325.00 |
| 618550 |
XPS Monochromator Gasket |
618550RE |
$350.00 |
| A041186 |
XPS LS Bonnet Gasket |
A041186RE |
$125.00 |
| 1ea-V75029RE & V75033RE |
Rebuild Kit for High Vacuum Apparatus 122-0150 |
1220150GKRE |
$40.00/set |
IN-GV
 |
2.75" Indium Torrvac / Innotec
Gate Valve Gasket
(V1 on older PHI systems) |
IN-GVRE |
$112.00 |
| 11120-0400 |
Viton Gate & Copper Bonnet Seal Kit |
KSB40MRE |
$80.00 |
Ion Gauges and Filaments
| Model Number |
Description |
RBD Part # |
Price |
| 6057671 |
Redesigned Tungsten (W) Filament for DIG III (8 mil) |
6057671V2RE |
$62.00 |
| 6057671 |
Tungsten (W) Filament |
6057671RE |
$62.00 |
| 6057672 |
Ion Gauge with Ir Filament |
6057672RE |
$357.00 |
| 6057672 |
Ion Gauge Rebuild with Ir filament |
6057672RP |
$170.00 |
| 6057673 |
Ion Gauge with W filament |
6057673RE |
$357.00 |
| 6057673 |
Ion Gauge Rebuild with W filament |
6057673RBLD |
$150.00 |
| 6057676 |
Iridium (Ir) Filament |
6057676RE |
$68.00 |
| DV-6M |
Thermocouple Gauge Tube for most PHI systems |
DST06MRE |
$65.00 |
| DV-6M |
Matching Set: (2) Thermocouple Gauge Tubes for most PHI Systms |
DST06MSRE |
$167.00 |
G-75-IR
 |
Bayard Alpert Glass Ionization Gauge 3/4" Diameter Tube with Thoria Coated Iridium Filament. Also Available in 1.0" Diameter Tube (PN G100IRRE) and Pyrex Tubulation. |
G75IRRE |
$125.00 |
G-75-TT
 |
Bayard Alpert Glass Ionization Gauge 3/4" Diameter Tube with Twin Tungsten Filaments. Also Available in 1.0" Diameter Tube (PN G100TTRE) and Pyrex Tubulation. |
G75TTRE |
$111.00 |
G-75-KIR
 |
Bayard Alpert Glass Ionization Gauge with a 3/4" Diameter Kovar Metal Side Tubulation and a Hairpin Thoria Coated Iridium Filament |
G75KIRRE |
$135.00 |
G-100-KIR
 |
Bayard Alpert Glass Ionization Gauge with a 1.0 " Diameter Kovar Metal Side Tubulation and a Hairpin Thoria Coated Iridium Filament. Also available with Welded 2.75" CF, ISO NW25 or NW40 Flange (Please call). |
G100KIRRE |
$135.00 |
G-75-KTT
 |
Bayard Alpert Glass Ionization Gauge with a 3/4" Diameter Kovar Metal Side Tubulation and Twin Tungsten Filaments. |
G75KTTRE |
$114.00 |
G-100-KTT
 |
Bayard Alpert Glass Ionization Gauge with 1.0" Diameter Kovar Metal Side Tubulation and Twin Tungsten Filaments. Also available with Welded 2.75" CF, ISO NW25 or NW40 Flange (Please call). |
G100KTTRE |
$114.00 |
G-100-KIRPT
 |
Bayard Alpert Glass Ionization Gauge with 1.0" Diameter Kovar Metal Side Tubulation and a Hairpin Thoria Coated Iridum Filament. The Kovar Tubulation is Weldable and Suitable for adding a flange. It also has an internal platinum coating to dissipate any internal static charge. Also available with 3/4" tube. |
G100KIRPTRE |
$152.00 |
RFA-1A
 |
Twin tungsten Filaments with a Temporary Wire Support for all Nude Bayard Alpert Gauges |
RFA1ARE |
$20.00 |
RFA-2A
 |
A Thoria Coated Iridium Hairpin Filament with a Temporary Wire Support for all Nude Bayard Alpert Gauges. |
RFA2ARE |
$44.00 |
RFA-3A & 4A
 |
Twin Tungsten Filaments with a loose foot support for all Nude UHV gauges. 3A is 2" in length and 4A is 1.75" in length (for Varian Ion Gauges) |
RFA3ARE or RFA4ARE |
$20.00 |
RFA-580I
 |
A Thoria Coated Iridium Hairpin Filament used on Nude Broadrange Gauges |
RFA580IRE |
$48.00 |
RFA-ASM-10
 |
An Alcatel Helium Leak Detector Replacement Filament |
RFAASM10RE |
$108.00 |
Ion Pump Elements and TSPs
| Model Number |
Description |
RBD Part # |
Price |
TSP-12-PE
 |
TSP Filaments |
TSP12PEFILRE |
$25.00/ea |
| TSP-12-PE |
TSP Filament Package (12 per pack) |
TSP12PEPKGRE |
$255.00 |
N/A |
Rebuilt Ion Pump Element (with exchange of old element) |
DIF0250RBRE |
$523.00/ea |
| N/A |
New Ion Pump Element |
NEWDIF0250RE |
$583.00/ea |
| N/A |
New Ion Pump Element Rebuild Kit - Includes Band & Nuts |
IPRKRE |
$71.00/ea |
| N/A |
TSP Assembly (with exchange, includes 4 new filaments) |
TSPASWEXRE |
$205.00 |
| N/A |
TSP Assembly (no exchange, includes 4 new filaments) |
TSPASNEXRE |
$399.00 |
Phosphor Screens
| Model Number |
Description |
RBD Part # |
Price |
| N/A |
0.5” diameter screen on 0.7” square, UHV compatible |
PHOSSCR0.7RE |
$290.00 |
| N/A |
1.5” diameter screen on 2.0” square, UHV compatible |
PHOSSCR2.0RE |
$355.00 |
| N/A |
3.0" x 3.0" Phosphor Target, UHV compatible |
PHOST3.0RE |
$150.00 |
Sample Intro Parts
| Model Number |
Description |
RBD Part # |
Price |
| A78168 |
Sample Intro Seal Set, (2) 1 1/8 in. seals (For Intro Model 15-720) |
99907LSRE |
$100.00 |
| B79035 |
Drive Chain (For Intro Model 15-720) |
15720SICRE |
$50.00 |
| B79047 |
Threaded Brass Insert (For Intro Model 15-720) |
B79047RE |
$70.00 |
| 611484 |
Sample Intro Spacer Set, (2) ½ in. spacers (For Intro Model 04-725) |
99908SPRE |
$85.00 |
| 620025 |
Sample Intro Seal Set, (2) ½ in. seals (For Intro Model 04-725) |
99909SRE |
$60.00 |
| 613174 |
Cu/Be Intro Switch Clip (For Intro Model 04-725) |
613174RE |
$75.00 |
| 601488 |
Sample Intro Spacer Set, (2) 3/8 in. spacers (For Old-style 04-725) |
601488RE |
$50.00 |
| 601551 |
Sample Intro Seal Set, (2) 3/8 in. seals (For Old-style 04-725) |
601551RE |
$30.00 |
Sample Mounts
| Model Number |
Description |
RBD Part # |
Price |
| 606266 |
Model 190 (flat) |
606266PR |
$75.00 |
| 606142 |
Model 191 (recessed) |
606142RE |
$95.00 |
| N/A |
Sample Clips (Cu/Be) |
SampleClipPR |
$3.00/ea |
Solenoid Valves
| Model Number |
Description |
RBD Part # |
Price |
179088
|
V2 24V Solenoid/Auto Valve Control |
T062E1-3-10-35RE |
$206.00 |
179087
 |
V1 24V Solenoid/Auto Valve Control |
T062-4E2RE |
$351.00 |
179086
 |
V4,V3,V5,V6 24V Solenoid/Auto Valve Control |
T062-4E1RE |
$260.00 |
Sputtering Standards
| Model Number |
Description |
RBD Part # |
Price |
| N/A |
1000Å Ta2O5 (1” x 6”) |
TA2O5RE |
$175.00 |
| N/A |
1000Å SiO2 (3” wafer) |
SIO2RE |
$150.00 |
Miscellaneous Vacuum Parts
| Model Number |
Description |
RBD Part # |
Price |
| N/A |
V1 Gate Valve 600, and 660 (Not recommended for 590 and 560 systems) |
V1VALVERE |
$1,900.00 |
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