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Scanning Auger Microprobe (SAM)
Price: $265,000.00 Includes installation in the continental U.S., training and one year warranty. Multiple year extended service is an option.
The Model 670 AES/SAM uses a field emission electron source and a cylindrical mirror analyzer. The electron beam size can be focused as low as 10 nm at 20 kV. Instrument features include beam rastering; SED imaging; AES mapping, line scans and points/areas.
Includes 04-303 sputter gun for specimen cleaning and depth profiling.
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Performance Specifications Summary
| Elastic Peak Energy | Resolution 0.5% |
| 20 kV Beam Size | 15 nm |
| 5 kV Beam Size | 50 nm |
| Copper Data (10 kV, 10nA) | Signal-to-noise: 600 |