PHI 660 Scanning Auger (AES) System
Brief Description
Auger electron spectroscopy (AES) identifies elemental compositions of surfaces by measuring the energies of Auger electrons. Auger electrons are stimulated by bombarding the sample with an electron beam and the kinetic energy is measured. Auger electron spectroscopy is widely used for analysis of surfaces, thin films, and interfaces.
Auger cannot detect hydrogen or helium, but is sensitive to all other elements, and is most sensitive to the low atomic number elements.
660 Specifications
- Cylindrical Mirror Analyzer (CMA) for high performance
- LaB6 electron column & coaxial CMA
- Energy Resolution 0.3 % to 2.0%
- Energy range 0 to 3200 eV
The CMA has a well defined, easy to find, focal point, which uses the elastically backscattered electron spectrum Coaxial electron gun and CMA. The electron beam is automatically aligned at the CMA focal point.
Guaranteed Base Pressure: 5.0 x 10-10 Torr
UHV pumping: 200 l/s
Minimum Electron Beam Diameter: 25 nm at 20 kV
AES Signal-to-Noise Ratio: 50:1 at 5 kV Electron beam voltage
Sensitivity in Pulse Count mode: @.05 nA, 10 kV=750 cps
Maximum Beam Current: 10 uA
