PHI 5100 XPS System
Brief Description:
Great starter XPS system. Ideal for large area samples and powders. Single channel detector. Includes sample load lock, turbo pump, differentially pumped ion source, dual anode 15kV X-ray source and XYZ specimen stage. RBD147 PC interface and AugerScan 3.2 included. CASA XPS optional.
PHI 5100 XPS Specifications:
