Ion Gun Comparison Matrix

Ion Source

04-161
04-162

04-165
IG2

04-191
04-192

04-300

04-303

06-660
06-650

06-670
06-650

Manufacturer

PHI

RBD

PHI

PHI

PHI

PHI

PHI

Source Type

Backfill
Electron Impact

Backfill Electron Impact

Backfill
Electron Impact

Electron
Impact

Electron Impact

Duoplasmatron Cold Cathode

Surface Ionization

Max Beam Energy

2 keV

2 keV

5 keV

4 keV

5 keV

10 keV

10 keV

Min. Beam Diameter

3.5 mm

3.5 mm

2.5 mm

0.8 mm

200 μm

5 μm

5 μm

Current Density

100 μA/cm2

100 μA/cm2

200 μA/cm2

800 μA/cm2

600 μA/cm2

50 mA/cm2

25 mA/cm2

Differentially Pumped

No

No

No

Yes

Yes

Yes

Yes

Raster

No

No

2 cm x 2 cm

7 mm x 7 mm

1 cm x 1 cm

1 mm x 1 mm

1 mm x 1 mm

Gas Species

Ar

Ar

Ar

Ar, He3, He4, Ne, O, N, Xe

Ar, He3, He4, Ne, O, N, Xe

O, Ar, N

Cs

CF Flange

2.75 in

2.75 in

2.75 in

2.75 in

2.75 in

4.5 in

4.5 in