Ion Gun Comparison Matrix
| Ion Source | 04-161 04-162 | 04-165 IG2 |
04-191 04-192 |
04-300 | 04-303 | 06-660 06-650 |
06-670 06-650 |
|---|---|---|---|---|---|---|---|
| Manufacturer | PHI | RBD | PHI | PHI | PHI | PHI | PHI |
| Source Type | Backfill Electron Impact |
Backfill Electron Impact | Backfill Electron Impact |
Electron Impact |
Electron Impact | Duoplasmatron Cold Cathode | Surface Ionization |
| Max Beam Energy | 2 keV | 2 keV | 5 keV | 4 keV | 5 keV | 10 keV | 10 keV |
| Min. Beam Diameter | 3.5 mm | 3.5 mm | 2.5 mm | 0.8 mm | 200 μm | 5 μm | 5 μm |
| Current Density | 100 μA/cm2 | 100 μA/cm2 | 200 μA/cm2 | 800 μA/cm2 | 600 μA/cm2 | 50 mA/cm2 | 25 mA/cm2 |
| Differentially Pumped | No | No | No | Yes | Yes | Yes | Yes |
| Raster | No | No | 2 cm x 2 cm | 7 mm x 7 mm | 1 cm x 1 cm | 1 mm x 1 mm | 1 mm x 1 mm |
| Gas Species | Ar | Ar | Ar | Ar, He3, He4, Ne, O, N, Xe | Ar, He3, He4, Ne, O, N, Xe | O, Ar, N | Cs |
| CF Flange | 2.75 in | 2.75 in | 2.75 i | 2.75 in | 2.75 in | 4.5 in | 4.5 in |
