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Surface Analysis Instrumentation
microCMA AES Spectrometer
Direct Replacement (PHI)
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Water-vapor Desorption
IRB-100
UVB-100
ZCUVE

 

Viewports & Laser coatings

 

Current Measurement
9103 USB Picoammeter

 

Sputter Ion Sources
IG2 2 kV Ion Source Package
3 kV Ion Source Package
High-Performance Ion Source Packages

 

Vacuum Related
3.5 CFM
Gaskets
TC Gauges
Magnetic Load Lock
Ion Gauge Filaments

 

Software
PHI Upgrades
AugerScan / AugerMap
CasaXPS (XPS/SIMS/AES)
RBD Instruments Request Quote

3.5 CFM Two-Stage
Rotary Vane Vacuum Pump
(Replacement for Balzers-Pfeiffer Duo 1.5 and 2.5 Pumps)

UVB-100 ChamberIn the last year or so, getting a DUO 1.5 repaired has been problematic because some of the partss for it are no longer manufactured. Depending on what is wrong with the pump, it might not be repairable at all.

In order to provide a more reliable and affordable replacement for the DUO 1.5 and DUO 2.5 pumps, we are now offering a 3.5 CFM Two-stage Rotary Vane Backing Pump. It is extremely quiet, virtually vibration-free, and has an anti-suckback design to prevent the back-streaming of oil. It also includes a 2-year warranty. The higher pumping capacity will result in faster pump-downs and less load on your turbo pump.

These pumps can be wired from 115 to 230VAC, 60 Hz (50 Hz is an option). RBD also provides a Pump Control Unit (PCU) to interface the pump to Balzers turbo pump controls so that the backing pump will turn on and off with the turbo pump control.

So if your DUO 1.5 or DUO 2.5 needs to be repaired, or you are in the market for an affordable and reliable backing pump, this 3.5 CFM backing pump costs just a little bit more than getting your broken or leaky pump repaired. Other models up to 28 CFM are available.